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Honorary Professorship Nanoelectronics Technologies
Publications

Publications

2024 | 2023 | 2022 | 2021 | 2020 | 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004 | 2003

Year 2022

Books

Blaudeck,T.; Meinecke,C.; Reuter,D.; Steenhusen,S.; Jain,A.; Hermann,S.; Schulz,S.E.; Zenkevich,E.I.; Korten,T.; Linke,H.: Chapter Biocomputation Using Molecular Agents Moving in Microfluidic Channel Networks: An Alternative Platform for Information Technology. in the book: Cyber-Physical Systems: Intelligent Models and Algorithms Part of the Studies in Systems, Decision and Control book series; 417, ed. by Alla G. Kravets , Alexander A. Bolshakov , Maxim Shcherbakov (2022) pp 15-27 (ISBN 978-3-030-95115-3, 978-3-030-95116-0)

Papers

Bickmann,C.; Meinecke,C.; Korten,T.; Heldt.G.; Hartmann,S.; Helke,C.; Reuter,D; Schulz,S.E.: Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen. 15. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2022 Nov 9-10; Proceedings (ISBN 978-3-00-073342-0)
Huber,M.; Hu,X.; Zienert,A.; Schuster,J.; Schulz,S.E.: Modeling the temporal evolution and stability of thin evaporating films for wafer surface processing. The Journal of Chemical Physics, 157, 8 (2022) pp 084706-1-8
Rettig,K.; Schuster,J.; Loos,E.; Dunger,T.; Nestler,M.; Schulz,S.E.: Modeling of the ion extraction from an inductively coupled plasma source.. XXVIII. Erfahrungsaustausch „Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen“ , Mühlleithen, 2022 Mar 15-18
Rettig,K.; Schuster,J.; Loos,E.; Dunger,T.; Nestler,M.; Schulz,S.E.: Modeling of the ion extraction from an inductively coupled plasma source. 28. INPLAS-AG NPP „Neuartige Plasmaquellen und -prozesse“ , Stuttgart, 2022 Jun 28
Rettig,K.; Schuster,J.; Loos,E.; Dunger.T.; Nestler,M.; Schulz,S.E.: Modeling of the extraction of a focused broad ion beam from an inductively coupled plasma source. 18th International Conference on Plasma Surface Engineering (PSE 2022), Erfurt, 2022 Sep 12-15