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Honorary Professorship Nanoelectronics Technologies
Honorary Professorship

Honorary Professorship Nanoelectronics Technologies

Professor Schulz is deputy director of the Fraunhofer Institute for Electronic Nanosystems ENAS and manager of the department Nano Device Technologies.

Main research topics are:

  • Process and material development for advanced interconnect systems
  • Carbon nanotubes (CNT) for interconnect applications
  • Development of thin films with high tensions (Stressors)
  • Concepts and metallization processes for the integration of electronics and micro/nanosystem components
  • Atomic layer deposition of metal and metal oxide layers
  • Materials and metallization for NEMS
  • Simulation and modeling of devices, processes and equipment

You also find more information on:

http://www.enas.fraunhofer.de/en/departments/BEOL.html


Prof. Dr. Stefan E. Schulz

Address:
Technische Universität Chemnitz
Center for Microtechnologies
Reichenhainer Str. 70
09107 Chemnitz

Phone: +49 (0) 371 - 531 35186
Fax: +49 (0) 371 - 531 835186
E-Mail: stefan.schulz@...

Secretary:
Birgit Weber
Tel: +49 (0) 371 - 531 37219
Fax: +49 (0) 371 - 531 837219
E-Mail: birgit.weber@...
 

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