Honorary Professorship Nanoelectronics Technologies
Professor Schulz is deputy director of the Fraunhofer Institute for Electronic Nanosystems ENAS and manager of the Business Unit Process, Device and Packaging Technologies.
Main research topics are:
- Process and material development for advanced interconnect systems
- Carbon nanotubes (CNT) for sensor and high frequency applications
- Concepts and metallization processes for the integration of electronics and micro/nanosystem components
- Atomic layer deposition of metal and metal oxide layers
- Materials and metallization for NEMS
- Simulation and modeling of devices, processes and equipment
- Spintronics
You also find more information on:
http://www.enas.fraunhofer.de/en/Business_Units/Process,_Device_and_Packaging_Technology.html
Prof. Dr. Stefan E. Schulz
Address: Phone: +49 (0) 371 - 531 35186 |