Honorary Professorship Nanoelectronics Technologies

Main research topics are:

• Process and material development for advanced interconnect systems
• Carbon nanotubes (CNT) for sensor and high frequency applications
• Concepts and metallization processes for the integration of electronics and micro/nanosystem components
• Atomic layer deposition of metal and metal oxide layers
• Materials and metallization for NEMS
• Simulation and modeling of devices, processes and equipment
• Spintronics

Prof. Dr. Stefan E. Schulz

Address: Technische Universität Chemnitz Center for Microtechnologies Reichenhainer Str. 70 09107 Chemnitz Phone: +49 (0) 371 - 531 35186 Fax: +49 (0) 371 - 531 835186 E-Mail: stefan.schulz@…