Chemnitz University of Technology Receives New Cleanroom at the Center for Micro and Nano Technologies for € 68 Million

With a multi-million investment, the Free State of Saxony is laying the groundwork for a new cleanroom at the Center for Micro- and Nanotechnologies at Chemnitz University of Technology, thereby strengthening research infrastructure and technology transfer in Southwestern Saxony

The Free State of Saxony is supporting structural transformation in Southwestern Saxony with further multi-million-euro investments in science and research. One of the largest planned investments is the construction of a new cleanroom for research and technology development in the field of sustainable microelectronics and sensor technology at the Center for Micro and Nanotechnologies (ZfM) at Chemnitz University of Technology. Unspent EU funds are to be utilized for the building, which will cost approximately €68 million. Subject to approval by the European Commission, this will enable the implementation of a project that strengthens Chemnitz University of Technology's research infrastructure and creates new opportunities for collaboration with research institutions and companies. This was announced by the Saxon State Ministry of Science, Culture and Tourism in a press release published on August 25, 2026.

“We are absolutely thrilled that, even in these highly constrained and challenging fiscal times, the construction of the new cleanroom for research and technology development in the field of sustainable microelectronics and sensor technology can be realized. This represents an exceptionally significant investment in Chemnitz University of Technology—particularly in its core competencies of materials and intelligent systems — as well as in the entire region of Southwestern Saxony. We would like to express our heartfelt thanks to the Saxon State Government — in particular to Minister-President Michael Kretschmer and Minister of Science Sebastian Gemkow — as well as to everyone else involved for their outstanding support!" says Prof. Dr. Gerd Strohmeier, Rector of Chemnitz University of Technology.

With the planned cleanroom, the ZfM will further expand its expertise in micro- and nanotechnologies. The focus will be on technologies for sustainable microelectronics and sensor technology. The new infrastructure creates the prerequisite for cutting-edge research and technology development, while also aiming to intensify collaboration with non-university research institutions and industry partners.

“The planned new cleanroom represents a milestone boost for the Center for Micro and Nanotechnologies at Chemnitz University of Technology. Through these forward-looking investments, our world-class research can be further expanded and strengthened. This state-of-the-art infrastructure serves as a tremendous source of motivation for our staff and acts as a magnet for leading international researchers. In doing so, we are not only creating optimal conditions for research into sustainable microelectronics and cutting-edge technologies in quantum computing, neuromorphic computing, photonics, and smart sensors, but we are also building a stronger bridge between excellent research and industrial applications. As a key player in the region, we make a significant contribution to value creation—from which regional partners will benefit in the long term," said Prof. Dr. Harald Kuhn, holder of the Professorship for Smart Systems Integration at the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology, Director of the Fraunhofer Institute for Electronic Nano Systems (ENAS), and Director of the ZfM at Chemnitz University of Technology.

The planned investment is part of a comprehensive package of measures by the Free State of Saxony to strengthen Southwestern Saxony as a hub for science and research. This includes 79 European research funding projects (ERDF/JTF) in the field of mechanical and plant engineering, totaling more than € 80 million, as well as projects totaling over € 200 million in medium-term financial planning through 2031.

Background: The Center for Micro and Nanotechnologies (ZfM)

With the ZfM, Chemnitz University of Technology (TU Chemnitz) is home to one of the world’s leading research centers for microsystems technology and nanotechnologies. It represents one of the technological cornerstones of the Southwestern Saxony industrial region and serves as an indispensable pillar of Silicon Saxony. Key research areas include system miniaturization, energy efficiency, performance enhancement with reduced resource consumption, and the integration of micro- and nanoscale components into complex systems.

Microelectronics is the core enabling technology for AI, medical technology, autonomous systems, as well as energy and mobility solutions—forming the foundation of industrial transformation. With over 120 German and 49 European partners, the ZfM serves as a global development partner for industry. The planned new building is therefore far more than just a construction project; it is of immense strategic importance. Ultimately, it will help secure and expand more than 300 highly skilled jobs in Saxony.

(Source: including a press release from the SMWK dated August 25, 2026)

Anne Eichhorn
02.09.2026

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