Nanoindenter UNAT
(Properties of thin films (PVD, CVD, DLC) and interfaces (inferface) without substrate influence) )
Technical specifications
- Indenter: Berkovich, Ball
- Maximum force: 2000 mN
- Force resolution: ≤ 0.1 µN (40 µN noise)
- x-y table, travel range: 50 x 50 mm
- z-table, travel range: 50 mm
- Lens magnification: 50x
Nanoindentation
- Hardness according to standard DIN EN ISO 14577
- Elasticity measurement with ball indenter
- cyclic measurements
Microscratch test
- Indenter radius: from 5 µm
- Normal force: 10 to 2000 mN
- Scratch length: up to 2 mm
- Scratch speed: up to 10 µm/s
Microwear test
- Indenter radius: from 5 µm to 3.2 mm
- Normal force: 100 to 2000 mN
- Wear track length: up to 150 µm
QCSM module
- Hardness and modulus of elasticity as a function of penetration depth
