like other ellipsometers, this device enables fast, efficient and accurate real-time tracking of dielectric functions (ε) ld layer thicknesses

it supports combinatorial analysis by combining in-situ ellipsometry with sample preparation methods such as spray coating (ultrasonic spray coater), flash lamp annealing and tempering

fixed angle: 64.5°

Spectral range: 4.9 - 1.49 eV (multi-wavelength mode), 6.2 - 1.37 eV (single-wavelength mode)

Spectral resolution: 0.3 eV (MWM), 0.1 eV (SWM)