Professorship of Electronic Devices of Micro and Nano Technique
Professorship of Electronic Devices of Micro and Nano Technique

Measuring Equipment at the Professorship


  • Mixed-signal-Oszilloskop Agilent MSO9404A (4 Ghz, 4 analog and 16 digital Channels)
    • Option MSO9000A-001: RS-232/UART Protocol Triggering and Decode
    • Option MSO9000A-007: I2C/SPI Protocol Triggering and Decode
    • Option MSO9000A-008: CAN, LIN, FlexRay Protocol Triggering and Decode
    • Option MSO9000A-016: Xilinx FPGA dynamic probe
    • Differential High Voltage Probe N2891A - 70 Mhz
    • Passive High Voltage Probe 10076B - 4 kV, 250 Mhz
    • 2 Stck. Differential Probe N2752A - 6 GHz
  • Logic Analyzer Agilent 16822A
    • 68-channel portable logic analyzer
    • 48-channel pattern generator with up to 300 MVector/s speed and 16 M vector depth
    • 4 GHz (250 ps) timing zoom with 64 K memory
    • 1.0 GHz / 500 MHz (half / full-channel) conventional timing with deep memory
    • PODS:
      • 6x 10476A 1,8-V-Daten-Pod und Leitungssatz
      • 1x 10475A 1,8-V-Takt-Pod und Leitungssatz
      • 6x 10483A 3,3-V-Daten-Pod und Leitungssatz
      • 1x E8140A LVDS-Takt-Pod und Leitungssatz
      • 1x E8141A LVDS-Daten-Pod und Leitungssatz
      • 1x 10461A TTL-Daten-Pod und Leitungssatz
      • 1x 10460A TTL-Takt-Pod und Leitungssatz

    Logic Analyzer Measuring Station
  • Manual Probe System PM8 (Süss Microtec, later Cascade Microtech, now FormFactor)
  • Semiconductor Test System HP 4062UX
    • Modular DC Source/Monitor Mainframe 4142B mit
      • 2x 41420A High Power Source/Monitor Unit (HPSMU)
      • 2x 41421A Medium Power Source/Monitor Unit (MPSMU)
      • 1x 41424A Voltage Source/Voltage Monitor Unit (VSVM)
      • 1x GROUND Unit (GNDU)
    • 4280 1MHz Capacitance Meter (CM)
    • 8-Slot Precision Measurement Mainframe E5270B mit
      • 2x E5287A High Resolution Source/Monitor Unit (HRSMU)
      • 1x E5288A Atto-sense and Switch Unit (ASU)
      • 2x E5280B High Power Source/Monitor Unit (HPSMU)
      • 1x GROUND Unit (GNDU)
    • 4084 Switching Matrix
  • 82357A USB/GPIB Interface
  • Wafer Prober PA200 (Süss Microtec, later Cascade Microtech, now FormFactor)
    • 8" Chuck: TA1G8
    • Probes: PH100, PH150, PH110HF
  • 2 semi-automatic Wafer Prober PA300 (1x Measuring Temperature Range -60 ... +300 °C, Süss Microtec, later Cascade Microtech, now FormFactor)

    Wafer Prober PA300 in our Clean Room
  • Climatic Chamber T-40/25 (CTS), -40 ... 180 °C
  • Power Device Analyzer B1505A (Agilent Technologies)
  • Laser Cutting System EzLaze 3 (New Wave Research, now ESI)
  • Laser Scanning Microscope Axiotron (Zeiss)
  • Electrostatic Discharge Simulator ESS-2002 (Noisken)
  • Logic Analyzer HP16500B with Prototype Analyzer HP 16505A, Modules:
    • 2 x HP 16555A 68-Channel 110 MHz State / 500 MHz Timing Logic Analyzer Module with 1M of acquisition memory
    • 1 x HP 16522A 20-Channel 200 MHz clock or 40-Channel 100 MHz clock Pattern Generator Module
  • Network / Spectrum / Impedance Analyzer HP4395A (10 Hz ... 500 MHz)
    • Option 001 (DC voltage/current source)
    • Option 010 + 43961A RF Impedance Test Kit
    • 87512A Transmission/Reflection Test Set
  • N5242A PNA-X Network Analyzer 10 MHz ... 26,5 GHz (Agilent Technologies)
  • Wavetek 50MHz Synthesized Arbitrary Waveform Generator Model 296
  • Tektronix 500MHz Oscilloscope TDS744A
  • Precision LCR Meter HP4284A
  • Ultrasound Microscope up to 400 MHz (KSI, Resolution about 2 µm)
  • Lifetime Scanner WT-85 (Semilab)
  • Measuring Station for unilluminated I-V Curves of Solar Cells
  • Measuring Station for illuminated I-V Curves of Solar Cells (Self-Construction)
  • Complex Spectral Measuring Station for Solar Cells
  • Measuring Station for capacitive Pressure Sensors
  • TLP50 Measuring Station (Self-Construction)
  • Standard measuring Equipment for Circuit Development
  • FPGA Development System XILINX Spartan-3AN (based on XC3S700AN)
  • Microcontroller Development System

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