Prof. Dr. Harald Kuhn New Head of the Center for Microtechnologies at Chemnitz University of Technology

Prof. Dr. Harald Kuhn, Chair of the Professorship of Smart Systems Integration in the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology and director of the Fraunhofer Institute for Electronic Nano Systems ENAS, also takes over the management of the Center for Microtechnologies at Chemnitz University of Technology.

Prof. Dr. Harald Kuhn is the new head of the Center for Microtechnologies (ZfM) in the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology. Kuhn had already taken over as director of the Fraunhofer Institute for Electronic Nano Systems ENAS in Chemnitz and the professorship at Chemnitz University of Technology, which was rededicated from "Microtechnology" to "Smart Systems Integration" on 1 September 2020.

Kuhn's predecessor, Prof. Dr. Thomas Otto, remains part of the ZfM as honorary professor for optoelectronic systems at Chemnitz University of Technology and deputy director of Fraunhofer ENAS. The board of directors thanked him for his work, especially for the development of the cleanroom strategy and the advancement of basic research projects, which continue to be Otto's area of responsibility.

Strengthening excellence

In order to strengthen Germany as a business location, Kuhn clarifies that industry needs young scientists whose training relates closely to future tasks. "The excellent education of students and the strengthening of the scientific excellence at the Center for Microtechnologies and thus at Chemnitz University of Technology are our most urgent tasks," explains Prof. Dr. Harald Kuhn. "This is automatically accompanied by high regional, national, and international visibility for the ZfM and Chemnitz University of Technology. Our key to success is interdisciplinary cooperation on a small scale such as in the ZfM, as well as on a large scale such as across faculties at Chemnitz University of Technology, at the local campus, in Saxony, and nationwide."

Center for Microtechnologies at Chemnitz University of Technology is excellent base for research and teaching

A well-structured and vibrant research landscape is an important factor for the development and utilization of the innovative potential for the technologies of the future. The conditions for this are ideal at Chemnitz University of Technology: "With the Center for Microtechnologies, its cleanrooms, and technological equipment at the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology, we have an excellent scientific operating unit for research and teaching," says Prof. Dr. Stefan Streif, Dean of the Faculty of Electrical Engineering and Information Technology. This operating unit is an excellent base for producing demonstrators and prototypes, for the development of processes and materials, and for the research- and practice-oriented training of students, interns, and young scientists.

Providing new inspiration for high-frequency electronics and hardware security

"At the Center for Microtechnologies, my highly motivated and excellently trained staff are working on relevant innovative topics, from MEMS sensors and actuators as well as their integration, new nanocomponents, new innovative process technologies up to simulation, hardware cryptography, and artificial intelligence," explains Prof. Kuhn. Among other things, one team is working on manufacturing processes suitable for industrial use in the field of nanomaterials. This should result in new functions and integration technologies in electronics and sensor technology.

"We will continue to work on these and other research topics in the years to come," says Kuhn, adding, "Excellent, interdisciplinary and future-oriented. We are driving basic research from idea to design up to technology development, the development of prototypes, and intelligent data evaluation in the network. This takes place in the ZfM, the faculty, and at Chemnitz University of Technology. Thus, we are available as a reliable and innovative research and development partner."

Background: ZfM Executive Director Election

The managing director of the ZfM is proposed by the ZfM board and elected by the Faculty of Electrical Engineering and Information Technology’s staff council. The board includes the holder of the following professorships:

• Smart Systems Integration (Prof. Dr. Harald Kuhn)
• Microsystems and Biomedical Engineering (Prof. Dr. Jan Mehner)
• Circuit and System Design (Prof. Dr. Ulrich Heinkel)
• Power Electronics (Prof. Dr. Thomas Basler)
• Electronic Devices of Micro and Nano Systems (Prof. Dr. John-Thomas Horstmann)
• Measurement and Sensor Technology (Prof. Dr. Olfa Kanoun)
• Materials and Reliability of Micro Technical Systems (Prof. Dr. Bernhard Wunderle)

About Prof. Dr. Harald Kuhn

Harald Kuhn has been Professor for Smart Systems Integration at the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology and Director of the Fraunhofer Institute for Electronic Nano Systems ENAS since 1 September 2020. Previously, he was employed as a director at Infineon Technologies AG in Regensburg. There he headed the Automation & Equipment Technology department.

He studied materials science at the Friedrich-Alexander University Erlangen-Nuremberg and started as a development engineer for SiC crystal growth in the Research & Development department of Siemens AG in 1996. At the same time, he completed his doctorate at the University of Erlangen-Nuremberg.

Prof. Dr. Harald Kuhn has more than 20 years of experience in the semiconductor industry and has held various management positions at Infineon and Siemens. In his last position, he was responsible for both the development of differentiating special equipment and the automation/industry 4.0 of backend sites with worldwide teams. His high level of methodological expertise in developing innovative, modularized, and scalable concepts was the basis for a successful global implementation. In his role, Kuhn was a leader in innovation (Artificial Intelligence, Industrial Internet of Things) and its productive implementation. His international experience, especially in Asia, rounds out his profile.

Background: Center for Microtechnologies (ZfM)

The Center for Microtechnologies has a long tradition, starting with its founding in 1991. Its predecessor, the Microelectronics Technical Center, was established in 1979 as a joint research facility for universities and industry. Currently, the ZfM has two clean rooms with a total area of 1,000 m². Cleanroom 2 with 300 m² of cleanroom class 10 (ISO 4) is located in the new building at the Institute of Physics.

Modern equipment allows the processing of six-inch and eight-inch wafers. This enables the development and investigation of individual manufacturing steps as well as the development of overall technologies.

Main research areas are:

• Development of technologies and components for micro and nano systems such as sensors, actuators, arrays
• Development of technologies for metallization systems in microelectronics
• Design of components and systems
• Nanotechnologies, components, and ultra-thin functional layers

The holistic treatment of the individual aspects of design, material development, technology, characterization, and application of components and systems has proven to be particularly successful. In these areas, there is intensive cooperation with numerous research institutions and companies on a regional, national, and international level.

Homepage of the Center for Microtechnologies: https://www.zfm.tu-chemnitz.de

Additional information is available from: Dr. Martina Vogel, martina.vogel@zfm.tu-chemnitz.de

(Author: Matthias Fejes / Translation: Chelsea Burris)

Matthias Fejes
24.02.2021

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