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Professorship Materials and Reliablility of Microsystems
Micro-Nano-Analytics Lab

Micro-Nano-Analytics Lab


SEM/FIB Zeiss Auriga40 with Analytics and Nanomanipulation

Auriga

Crossbeam Electron & Focus Ion Beam
Imaging: inLens SE, inLens BSE, Chamber SE and SI
Analytics: Oxford EBSD & EDX, Nanomanipulator: Omniprobe

REM TESCAN Proxima with extra large specimen chamber

TESCAN Proxima

REM TESCAN Proxima

Nanomanipulator Imina™ Bots

Imina™ Bot

Four Nanomanipulator Bots
Nanomanipulation & electrical probing
Vacuum compatible
Resolution: 1nm

Electrical Bias TEM-Holder

TEM-Holder

Electrical biasing (8 pin) sample holder for TEM
In-situ testing at nano scale
Electrically driving of Si-based MEMS

Signatone S-1160 Probe Station

WaferProber

WaferProber placed inside EMV-box
4x S-725 micro manipulators (3 axes)
Probing individual chips and wafers up to 8"
Hot plate for reticles (max 500°C)
Microscope with WD = 34 mm

Sputter Coater Polaron E5000

Polaron E5000

DC Sputter Coater
Thin metals like Au, Al or Pt

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