Micro-Nano-Analytics Lab
SEM/FIB Zeiss Auriga40 with Analytics and Nanomanipulation
Crossbeam Electron & Focus Ion Beam
Imaging: inLens SE, inLens BSE, Chamber SE and SI
Analytics: Oxford EBSD & EDX, Nanomanipulator: Omniprobe
Raman Imaging Microscope mit AFM in Vakuumkammer
WiTec Raman Spektrometer
SemiLab AFM
Vakuum-kompatibel: SemiLab Vakuumkammer mit Schleuße
Vakuum Shuttle: REM-kompatibel
Hysitron PI-88 SEM Picoindenter
Hysitron PI-88xR inside Zeiss Auriga.
Nanomanipulator Imina™ Bots
Four Nanomanipulator Bots
Nanomanipulation & electrical probing
Vacuum compatible
Resolution: 1nm
Electrical Bias TEM-Holder
Electrical biasing (8 pin) sample holder for TEM
In-situ testing at nano scale
Electrically driving of Si-based MEMS
Signatone S-1160 Probe Station
WaferProber placed inside EMV-box
4x S-725 micro manipulators (3 axes)
Probing individual chips and wafers up to 8"
Hot plate for reticles (max 500°C)
Microscope with WD = 34 mm
Sputter Coater Polaron E5000
DC Sputter Coater
Thin metals like Au, Al or Pt
