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Professorship of Microtechnology

Welcome to the homepage of the Chair Smart Systems Integration

Education and Research

Education and research is mainly focused on the

  • properties of semiconductors and the
  • fabrication processes for discrete and integrated electronic devices as well as sensors and actuators.

Due to our research activities at the Center for Microtechnologies (ZfM) and the Fraunhofer Institute for Electronic Nano Systems ENAS we offer high quality courses and practical trainings for our students.


Postal Address:
Technische Universität Chemnitz
Faculty for Electrical Engineering and Information Technologies
Chair Smart Systems Integration
09107 Chemnitz


Email: info@...
Where to find us:
Fraunhofer ENAS
Technologie-Campus 3
09126 Chemnitz


Phone: +49 (371) 531 36650
Fax: +49 (371) 531 836650

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