Use of Impedimetric Sensors for Multifunctional Applications
Dr. Anindya Nag
Junior Professorat Technische Universität Dresden, Dresden, GermanyElectrochemical impedance spectroscopy (EIS) has been one of the common ways to detect the response of sensors used for everyday life. The simple, non-invasive, real-time detection process has allowed researchers to understand the electrochemical cell involving sensing operations. While the low-cost microelectromechanical systems (MEMS)-based silicon sensors have been used for various applications, the conjugation of EIS with these sensors has allowed us to analyse their nature and efficiency. The tutorial provides an overall view of the fabrication of the MEMS-based sensors and deploying them for specific detection of ions significant to biomedical, environmental and industrial uses. The performances of the silicon sensors having interdigitated electrodes are depicted in terms of their operating range, sensitivity and other related parameters. The sensors have also been integrated with microcontroller-based systems to provide wireless operation.