Projects
Current Projects
Funding Bodies
Funding Code
and Duration
Title
Principal Investigator
[Research Entity]
Collaborating Participants
Novel approaches for halogen-free and sustainable etching of silicon and glass (HaloFreeEtch)
Dr. Danny Reuter
[MAIN Research Center for Micro and Nano Technologies]
Dr. Jörg Schuster
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
Dr. Jörg Schuster
[MAIN Research Center for Micro and Nano Technologies]
Gottfried Wilhelm Leibniz Prize 2018
Prof. Dr. Oliver G. Schmidt
[MAIN Research Professorship Material Systems for Nanoelectronics]
[MAIN Research Professorship Material Systems for Nanoelectronics]
Transduction of smart hydrogel swelling state by advanced flexible CNT-based MEMS capacitors on a membrane platform (HydroMEMS)
Dr. Sascha Hermann
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Julia Körner
[Leibniz University Hanover, Institute for Electrical Engineering and Measurement Technology]
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Julia Körner
[Leibniz University Hanover, Institute for Electrical Engineering and Measurement Technology]
Self-powered and self-reshaping autarkic skin for wireless motes (LEAF)
Dr. Daniil Karnaushenko
[MAIN Research Group Shapeable Electronics]
[MAIN Research Group Shapeable Electronics]
Systematically designed polypeptides to explore the CISS effect
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Prof. Dr. Sibylle Gemming
[MAIN Research Professorship Theoretical Physics of Quantum Mechanical Processes and Systems]
[MAIN Research Professorship Theoretical Physics of Quantum Mechanical Processes and Systems]
Chiral nanoclusters for spin hyperpolarization upon photoexcitation
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Prof. Dr. Georgeta Salvan
[MAIN Research Group Magneto Optics]
[MAIN Research Group Magneto Optics]
Chiral nanoclusters for spin hyperpolarization upon photoexcitation
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Prof. Dr. Michael Mehring
[MAIN Research Professorship Coordination Chemistry]
[MAIN Research Professorship Coordination Chemistry]
Block cooligomers for spin filtering and transport across all-organic interfaces
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Part of DFG CRR/TRR 386: Hyperpolarization in molecular systems (HYP*MOL)
Prof. Dr. Michael Sommer
[MAIN Research Professorship Polymer Chemistry]
[MAIN Research Professorship Polymer Chemistry]
Supraconductive Architectures for the 3D Integration of Quantum Computers (Supra 3D)
Prof. Dr. Bernhard Wunderle
[MAIN Research Professorship Materials and Reliability of Micro Systems]
Fraunhofer Institute for Electronic Nano Systems (Fraunhofer ENAS)
Leibniz Institute for Solid State and Materials Research Dresden (Leibniz IFW)
[MAIN Research Professorship Materials and Reliability of Micro Systems]
Fraunhofer Institute for Electronic Nano Systems (Fraunhofer ENAS)
Leibniz Institute for Solid State and Materials Research Dresden (Leibniz IFW)
European Research Council ERC Starting Grant 2021
EU GA 101039802 (TUC 20120159)
01.05.2022 – 30.04.2027
EU GA 101039802 (TUC 20120159)
01.05.2022 – 30.04.2027
Smart-Dust Batteries Integrated with Near-Zero-Power Surveillance (SMADBINS)
Dr. Minshen Zhu
[MAIN Research Professorship Material Systems for Nanoelectronics]
[MAIN Research Professorship Material Systems for Nanoelectronics]
Nanomaterial-based platform electronics for PUF circuits with extended entropy sources (NanoSec2)
Part of SPP 2253: From Nano-Electronics to Secure Systems
Part of SPP 2253: From Nano-Electronics to Secure Systems
Dr. Sascha Hermann
[MAIN-Forschungsgruppe Technologien der Nanoelektronik]
Prof. Dr. Stefan Katzenbeisser
(University Passau, Chair of Computer Engineering)
Prof. Dr. Elif Bilga Kavun
(University Passau, Professorship of Secure Intelligent System)
[MAIN-Forschungsgruppe Technologien der Nanoelektronik]
Prof. Dr. Stefan Katzenbeisser
(University Passau, Chair of Computer Engineering)
Prof. Dr. Elif Bilga Kavun
(University Passau, Professorship of Secure Intelligent System)
Correlation between electronic and optical properties of materials used in printed organic solar cells
Part of DFG FOR 5387: Printed & Stable Organic Photovoltaics from Non-fullerene Acceptors (P*PULAR)
Part of DFG FOR 5387: Printed & Stable Organic Photovoltaics from Non-fullerene Acceptors (P*PULAR)
Prof. Dr. Dietrich R. T. Zahn
[MAIN Research Professorship Semiconductor Physics]
[MAIN Research Professorship Semiconductor Physics]
Structural, electronic and chemical properties of low-index high-entropy alloy surfaces
Prof. Thomas Seyller
[MAIN Reseach Professorship Technical Physics]
[MAIN Reseach Professorship Technical Physics]
SMWK/SAB ESF Plus Young Research Group
SMWK/SAB 100693458
01.01.2024 – 31.12.2026
SMWK/SAB 100693458
01.01.2024 – 31.12.2026
Transferable knowledge-based process models for agile production
Prof. Dr. Karla Hiller
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
SMWK/SAB EFRE-Validierungsförderung
SMWK/SAB ...
01.12.2023 – 30.11.2026
SMWK/SAB ...
01.12.2023 – 30.11.2026
Technologieplattform für innovative, kompakte und vollintegrierte System in Package (KoVoPack)
Prof. Dr. Karla Hiller
[MAIN Research Center for Micro and Nano Technologies]
Dr. Jörg Schuster
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
Dr. Jörg Schuster
[MAIN Research Center for Micro and Nano Technologies]
Industry
(TUC 2413096)
01.10.2023 – 30.09.2026
(TUC 2413096)
01.10.2023 – 30.09.2026
Development of thermo-mechanical stress tests for small µ/n structures
Prof. Dr. Bernhard Wunderle
[MAIN Research Professorship Materials and Reliability of Micro Systems]
[MAIN Research Professorship Materials and Reliability of Micro Systems]
Novel cation-substituted quarternary chalcogenide nanocrystals Cu2XSnS4 (X = Zn, Ni, Fe, Co): Properties and potential applications
Prof. Dr. Dietrich R. T. Zahn
[MAIN Research Professorship Semiconductor Physics],
Institute of Semiconductor Physics Kiew,
National University of Kiew
[MAIN Research Professorship Semiconductor Physics],
Institute of Semiconductor Physics Kiew,
National University of Kiew
Near-field-enhanced optomechanical nanoresonators (NEONA)
Dr. Danny Reuter
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Dirk Plettemeier (TU Dresden, Chair of Radio Frequency and Photonics Engineering)
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Dirk Plettemeier (TU Dresden, Chair of Radio Frequency and Photonics Engineering)
Federal Ministry for Education and Research BMBF-KDT Key Digital Technologies
101111890 (TUC 2420177)
01.05.2023 – 30.04.2026
101111890 (TUC 2420177)
01.05.2023 – 30.04.2026
Intelligent GaN Power Electronics for Efficient Energy Conversion
Prof. Karla Hiller
[MAIN Research Area Micro and Nano Technologies]
[MAIN Research Area Micro and Nano Technologies]
Analogue Integrated High-Frequency Circuits based on Carbon Nanotube Field-effect Transistors (ICCNT)
Dr. Sascha Hermann
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Michael Schröter
[Dresden University of Technology, Chair of Electronic Components and Integrated Circuits]
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Michael Schröter
[Dresden University of Technology, Chair of Electronic Components and Integrated Circuits]
Single Photon source and detector based on novel materials for the detection of endocrine disruptors (GREENER)
Dr. Martin Möbius
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
Proximity-induced supraconductivity in graphene on SiC by intercalation
Part of DFG FOR 5242: Proximity-induced correlation effects in low-dimensional structures
Part of DFG FOR 5242: Proximity-induced correlation effects in low-dimensional structures
Prof. Dr. Thomas Seyller
[MAIN Research Professorship Technical Physics]
[MAIN Research Professorship Technical Physics]
European Research Council (ERC Advanced Grant 2018)
EU GA 835268 (TUC 20120154)
01.11.2019 – 31.10.2025
EU GA 835268 (TUC 20120154)
01.11.2019 – 31.10.2025
Medical Microbots to support new assisted reproduction techniques (MicroRepro)
Prof. Dr. Oliver G. Schmidt
[MAIN Research Professorship Material Systems for Nanoelectronics]
[MAIN Research Professorship Material Systems for Nanoelectronics]
Intelligent integrated stent II
Dr. Daniil Karnaushenko
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz Institute for Solid State and Materials Research Dresden
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz Institute for Solid State and Materials Research Dresden
SMWK/SAB (EFRE-Validierungsförderung)
SAB...
01.01.2024 – 30.06.2025
SAB...
01.01.2024 – 30.06.2025
Fab-compatible additive semiconductor process CNT-on-insulator (COI)
Dr. Sascha Hermann
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
SMWK/SAB (EFRE-Validierungsförderung)
SAB...
01.01.2024 – 30.06.2025
SAB...
01.01.2024 – 30.06.2025
DNA-Origami goes Wafer Level (DNAup)
Dipl.-Ing. Andreas Morschhauser
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
TU Chemnitz
(TUC 2019005)
01.01.2024 – 30.06.2025
(TUC 2019005)
01.01.2024 – 30.06.2025
Wellenspiele (TUCculture2025)
Dr. Thomas Blaudeck
[Research Center MAIN, Management Office and Research Coordination],
Prof. Dr. Angela Thränhardt (Professorship Theoretical Physics: Simulation of New Materials),
Prof. Dr. Ralf Zichner (Professorship RF Technology and General Electrical Engineering),
Prof. Dr. Ulrich T. Schwarz (Professorship Experimental Sensor Technology)
[Research Center MAIN, Management Office and Research Coordination],
Prof. Dr. Angela Thränhardt (Professorship Theoretical Physics: Simulation of New Materials),
Prof. Dr. Ralf Zichner (Professorship RF Technology and General Electrical Engineering),
Prof. Dr. Ulrich T. Schwarz (Professorship Experimental Sensor Technology)
Carbohydrate-based block copolymers as sustainable zinc micro anodes in aqueous 3D micro batteries
Dr. Minshen Zhu
[MAIN Research Professorship Material Systems for Nanoelectronics],
Prof. Dr. Kai Zhang (Georg-August-University Göttingen, Wood Technology and Wood-Based Materials)
[MAIN Research Professorship Material Systems for Nanoelectronics],
Prof. Dr. Kai Zhang (Georg-August-University Göttingen, Wood Technology and Wood-Based Materials)
Upcoming Projects
Funding Bodies
Funding Code
and Duration
Title
Principal Investigator
[Research Entity]
Collaborating Participants
Analysis of intrinsic damping effects and development of design rules for enhanced robustness of high-Q micromechanical systems
Prof. Dr. Jan Mehner
[MAIN Research Professorship Micro Systems and Biomedical Engineering]
Dr. Danny Reuter
[MAIN Research Area Micro and Nano Technologies]
[MAIN Research Professorship Micro Systems and Biomedical Engineering]
Dr. Danny Reuter
[MAIN Research Area Micro and Nano Technologies]
SMWK/SAB EFRE Programm InfraProNet 2021-2027
100757310 (TUC #)
01.10.2025 – 31.12.2027
100757310 (TUC #)
01.10.2025 – 31.12.2027
Flexible wireless implants for neurological real-time monitoring (FreeNEMo)
Prof. Dr. Oliver G. Schmidt
[MAIN Research Professorship Material Systems of Nanoelektronics]
ChA Prof. Dr. Matthias Kirsch
[Klinikum Chemnitz gGmbH, Department of Neurosurgery]
Prof. Dr. Gerald Steiner
[Dresden University of Technology, Department of Medicine „Carl Gustav Carus“, Hospital and Clinic for Anaesthesiology and Intensive Care, Department Clinical Sensoring and Monitoring]
[MAIN Research Professorship Material Systems of Nanoelektronics]
ChA Prof. Dr. Matthias Kirsch
[Klinikum Chemnitz gGmbH, Department of Neurosurgery]
Prof. Dr. Gerald Steiner
[Dresden University of Technology, Department of Medicine „Carl Gustav Carus“, Hospital and Clinic for Anaesthesiology and Intensive Care, Department Clinical Sensoring and Monitoring]
Previous Projects
Funding Bodies
Funding Code
and Duration
Title
Project Manager
[Research Centers]
Collaborating Participants
Industry
TUC 2170547
13.05.2023 – 26.07.2024
TUC 2170547
13.05.2023 – 26.07.2024
X-ray reflectivity measurements of film thickness homogeneity on test wafers for deposition system qualification.
Prof. Dr. Olav Hellwig
[MAIN Research Center for Micro and Nano Technologies],
[MAIN Research Center for Micro and Nano Technologies],
Ultra-scaled SiGeC HBTs beyond the existing roadmap - a simulation-based study (USHBER)
Dr. Jörg Schuster
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Michael Schröter (Dresden University of Technology, Electronic Components and Integrated Circuits)
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Michael Schröter (Dresden University of Technology, Electronic Components and Integrated Circuits)
Intelligent integrated stent I
Prof. Dr. Oliver G. Schmidt
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz Institute for Solid State and Materials Research Dresden
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz Institute for Solid State and Materials Research Dresden
Cluster decorated recognition elements on DNA origami for enhanced Raman spectroscopic detection methods (DeDNAed)
Dr. Danny Reuter
[MAIN Research Center for Micro and Nano Technologies]
[MAIN Research Center for Micro and Nano Technologies]
Industry
(TUC 2112453)
01.10.2021 – 30.06.2024
(TUC 2112453)
01.10.2021 – 30.06.2024
Development of a sponge with self-triggering disinfection dosage
Prof. Dr. Heinrich Lang
[MAIN Research Group Organometallic Chemistry],
Company Max Clean & Health UG
Company Max Clean & Health UG
Federal Ministry for Economic Affairs and Energy BMWi-AiF-ZIM
16KN087139 (TUC 2112017)
01.06.2021 – 31.05.2024
16KN087139 (TUC 2112017)
01.06.2021 – 31.05.2024
Synthesis and IR characterization for database creation including optimization (Smart Lub)
Prof. Dr. Heinrich Lang
[MAIN Research Group Organometallic Chemistry],
MAVEG Maschinen-Vertriebsgesellschaft GmbH, Chemnitz;
Comline Elektronik-Elektrotechnik GmbH, Wackersdorf ;
MAVEG Maschinen-Vertriebsgesellschaft GmbH, Chemnitz;
Comline Elektronik-Elektrotechnik GmbH, Wackersdorf ;
Industry
(TUC 20113209)
01.12.2023 – 31.05.2024
(TUC 20113209)
01.12.2023 – 31.05.2024
SiO2 Vacbond I & II
Prof. Dr. Jan Mehner
[MAIN Research Professorship Micro Systems and Biomedical Engineering]
[MAIN Research Professorship Micro Systems and Biomedical Engineering]
Federal Ministry for Education and Research BMBF-PENTA-EUREKA Inter Cluster Calls
19I23007I (TUC 2413048)
01.04.2021 – 31.03.2024
19I23007I (TUC 2413048)
01.04.2021 – 31.03.2024
Novel Design-Methods for Trustable Electronics
Prof. Dr. Karla Hiller
[MAIN Research Area Micro and Nano Technologies]
[MAIN Research Area Micro and Nano Technologies]
Else Kröner Fresenius Center (EKFZ) for Digital Health
EKFZ Call 2021 (TUC 20112567)
01.01.2021 – 31.12.2023
EKFZ Call 2021 (TUC 20112567)
01.01.2021 – 31.12.2023
Miniature proteometric sensor for label free cytokine identification and quantification (ProteoSens)
Prof. Dr. Oliver G. Schmidt
[MAIN Research Professorship Material Systems for Nanoelectronics],
Prof. Dr. med. Tjalf Ziemssen, PD Dr. med. Katja Akgün, Martin Nötzel,
(TU Dresden, Faculty of Physics, Institute of Applied Physics, Honorary Chair of Nanophysics),
(Leibniz Institute for Solid State and Materials Research Dresden)
[MAIN Research Professorship Material Systems for Nanoelectronics],
Prof. Dr. med. Tjalf Ziemssen, PD Dr. med. Katja Akgün, Martin Nötzel,
(TU Dresden, Faculty of Physics, Institute of Applied Physics, Honorary Chair of Nanophysics),
(Leibniz Institute for Solid State and Materials Research Dresden)
Low-ohmic contacts for high-frequency carbon nanotube field-effect transistors (NanoCon)
Dr. Sascha Hermann
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Michael Schröter (Dresden University of Technology, Electronic Components and Integrated Circuits)
[MAIN Research Center for Micro and Nano Technologies],
Prof. Dr. Michael Schröter (Dresden University of Technology, Electronic Components and Integrated Circuits)
Chemnitz: Wood, Light, Sound (TUCculture2025)
Dr. Thomas Blaudeck
[Research Center MAIN, Management Office and Research Coordination],
Prof. Dr. Angela Thränhardt (Professorship Theoretical Physics: Simulation of New Materials),
Prof. Dr. Ulrich T. Schwarz
(Professorship Experimental Sensor Technology)
[Research Center MAIN, Management Office and Research Coordination],
Prof. Dr. Angela Thränhardt (Professorship Theoretical Physics: Simulation of New Materials),
Prof. Dr. Ulrich T. Schwarz
(Professorship Experimental Sensor Technology)
Smart integrated extreme environment health monitor with sensory feedback for enhanced situation awareness (SIXTHSENSE)
Prof. Dr. Thomas Otto
[MAIN Research Area Micro and Nano Technologies]
Manipulation-proof PUFs based on Nanostructures for Secure and Resilient Hardware Security Primitives (NanoSec) > Part of SPP 2253: Nanosecurity - Von Nanoelektronik zu sicheren Systemen
Dr. Sascha Hermann
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Stefan Katzenbeisser
[University of Passau, Chair of Data Science Technology]
[MAIN Research Area Micro and Nano Technologies]
Prof. Dr. Stefan Katzenbeisser
[University of Passau, Chair of Data Science Technology]
Novel Li-S batteries with dual redox couples: design, synthesis, in operando X-ray studies and theoretical modelling
Part of DFG-SPP 2248: Polymer-based batteries
Part of DFG-SPP 2248: Polymer-based batteries
Prof. Dr. Michael Sommer
[MAIN Research Professorship Polymer Chemistry],
Dr. Matthias Müller (Physikalisch-Technische Bundesanstalt Berlin, PTB),
PD Dr. Michael Walter (Albert Ludwig University of Freiburg),
Prof. Dr. Soumyadip Choudhuri (Indian Institute of Technology Kharagpur)
Dr. Matthias Müller (Physikalisch-Technische Bundesanstalt Berlin, PTB),
PD Dr. Michael Walter (Albert Ludwig University of Freiburg),
Prof. Dr. Soumyadip Choudhuri (Indian Institute of Technology Kharagpur)
Lab-in-a-Tube: Non-linear dielectric spectroscopy for multiparametric bioanalytics
Part of DFG-SPP 1857: Electromagnetic sensors for life sciences (ESSENCE)
Part of DFG-SPP 1857: Electromagnetic sensors for life sciences (ESSENCE)
Dr. Daniil Karnaushenko
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
[MAIN Research Professorship Material Systems for Nanoelectronics],
Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
Environment-friendly 0D/2D nanocomposites for broadband UV-vis-NIR-sensitive photodetectors
Prof. Dr. Dr. h.c. Dietrich R. T. Zahn [MAIN Research Professorship Semiconductor Physics]
Heavy main group elements as dispersion energy donors - experimental and theoretical studies of bismuth compounds with bismuth-pi-interactions as structure determining component
Prof. Dr. Michael Mehring
[MAIN Research Professorship Coordination Chemistry],
Prof. Dr. Alexander A. Auer
[MAIN Research Professorship Coordination Chemistry],
Prof. Dr. Alexander A. Auer
Rational design of selective thermal atomic layer etching processes through computational chemistry
Dr. Xiao Hu
[MAIN Research at the Center for Micro- and Nanotechnologies, Research Group Process, Device and Component Simulations]
Federal Ministry for Economic Affairs and Energy BMWi-AiF-ZIM
FG 4117603SA8
01.02.2019 – 31.03.2022
FG 4117603SA8
01.02.2019 – 31.03.2022
Synthesis of uranyl-specific ligands and their optimization for their use in the micro-and nano-analytic on the basis of the in the project to develop a measurement method
Prof. Dr. Heinrich Lang
[MAIN Research Professorship Inorganic Chemistry],
SanuC GmbH
[MAIN Research Professorship Inorganic Chemistry],
SanuC GmbH
SMWK/SAB Programm RL TG70
100540635
30.11.2020 – 31.12.2020
100540635
30.11.2020 – 31.12.2020
Retrofitting of laboratory glass washer MAIN: Retrofitting of suction lances, lower baskets, holding grids and dosing devices for special liquid cleaners, among others. for automatic residue-free cleaning and drying of synthesis and formulation dishes
Research Center MAIN [Management Office and Building Services], Professorship Inorganic Chemistry, Professorship Polymer Chemistry, Professorship Coordination Chemistry, Professorship Material Systems in Nanoelectronics, Center for Micro- and Nanotechnologies, Department Construction and Technology
