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Group of Composites and Material Compounds
Professur Verbundwerkstoffe und Werkstoffverbunde

Services

composites

Chemical Vapour Deposition (CVD)

  • Thermal and plasma-enhanced pretreatment and coating of substrates
  • Production of mono- and multilayer coatings
  • Substrates: fibers, wires, platelets, max. Ø: 80 mm
  • Layers: Boron nitride, silicon nitride, yttrium oxide, ...
  • Process gases: O2, N2, NH3, CH4,, silane, diborane
  • Temperature: max. 1000 °C
  • Pressure range: 0.5 - 20 mbar

Weiterführende Informationen

Ansprechpartner

Foto des Ansprechpartners Maik Trautmann
Dr.-Ing. Maik Trautmann