Navigation

Jump to main content
Professorship Materials and Reliablility of Microsystems
Publications

Publications


Publications since 2007

Since 2007 publications are collected in the University Library and could be retrieved from there:  Publications of the chair at the University Library

Alternatively there is a list containing the most important publications of Bernhard Wunderle, Prof. Dr. as PDF-file: publications as per April 2020.

Publications 2006

  • R. Schacht, D. May, B. Wunderle, O. Wittler, A. Gollhardt, B. Michel and H. Reichl
    Characterization of Thermal Interface Materials to Support Thermal Simulation.
    Proc. 12th Therminic 2006, Sep 27-29, Nice, Côte d'Azur, France, 2006.
  • M. Dressler, H. Rohde, G. Liebing, K.-F. Becker, B. Wunderle and H. Reichl
    Influence of Assembly Process, Material Properties and Geometry on the Reliability of Flip Chip Interconnections on MID for Automotive Applications.
    Proc. 7th MID Congress, Sep 27-28, F�rth, Germany, 2006
  • T. Braun, B. Wunderle, K.-F. Becker, M. Koch, V. Bader, R. Aschenbrenner and H. Reichl
    Improved Reliability Of Leadfree Flip Chip Assemblies Using Direct Underfilling By Transfer Molding.
    Proc. 31st IEMT, Nov 8-10, 2006, Putrajaya, Malaysia
  • R. Schacht, D. May, B. Wunderle, O. Wittler, A. Gollhardt, B. Michel and Reichl
    Characterization of Thermal Interface Material.
    Proc. 1st ESTC 2006, Sep 5-7, 2006, Dresden, Germany, pp 1367-1373, 2006
  • B. Wunderle and B. Michel
    Progress in Reliability Research in the Micro and Nano Region.
    Journal of Microelectronics Reliability, Elsevier, 46/9-11, pp 1685-1694, 2006
  • M. Dressler, K.-F. Becker, B. Wunderle, H. Rohde, J. Auersperg, G. Liebing and H. Reichl
    Identifying the reliability-affecting parameters of SBB Flip-Chip Interconnections for Automotive Applications.
    Proc. 1st ESTC, Sep 5-7, 2006, Dresden, Germany 2006
  • E.D. Dermitzaki, J. Bauer, B. Wunderle, B. Michel
    Diffusion of water in amorphous polymers at different temperatures using molecular dynamics simulation.
    Proc. 1st ESTC, Sep 5-7, 2006, Dresden, Germany 2006
  • R. Schacht, E. Auerswald, J.P. Sommer, B. Wunderle, B. Michel and H. Reichl
    Accelerated Active High-Temperature Cycling Test for Power MOSFETs.
    Proc. Itherm 2006, May 30 - June 2, San Diego, USA, 2006
  • S. Déplanque, W. Nüchter, B. Wunderle, R. Schacht and B. Michel
    Lifetime Prediction of SnPb and SnAgCu Solder Joints of Chips on Copper Substrate Based on Crack Propagation FE-Analysis.
    Proc. 7th EuroSimE Conf., Como, Italy, April 2006
  • F. Schindler-Saefkow, D. May, B. Wunderle, R. Schacht, B. Michel
    3D-PCB-Packaging Technology for High Power Applications with Water Cooling.
    ACTUATOR 2006, June 14, Bremen, Germany, 2006
  • Reithmeier, E.; Frühauf, J., Rahlves M.; Kraft, A.; Seifert, M.
    Heißprägen multifunktionaler Kalibriernormale f�r die optische 3D Mikroskopie
    VDI-Berichte Nr. 1950 Messtechnik für Mikro- und Nano-Engineering, S. 35-44, VDI Verlag GmbH, Düsseldorf 2006
    ISSN: 0083-5560
    ISBN: 3-18-091950-7
  • Gärtner, E.; Frühauf, J.
    Silizium-Normale f�r die Tiefen- Längen- und Rauheitsmesstechnik
    VDI-Berichte Nr. 1950 Messtechnik für Mikro- und Nano-Engineering, S. 25-34, VDI Verlag GmbH, Düsseldorf 2006
    ISSN: 0083-5560
    ISBN: 3-18-091950-7

Publications 2005

  • B. Wunderle and B. Michel
    Packaging Reliability on the Way from Micro to Nano. (Keynote Paper)
    Intern. Congress Nanotechnology, International Congress on Nanotechnology 2005, San Francisco, USA, Nov 1-4, 2005
  • D. Vogel, N. Sabate, B. Wunderle, J. Keller, B. Michel and H. Reichl
    Nanoreliability for Mechanically Loaded Devices.
    International Congress of Nanotechnology 2005, San Francisco, USA, Nov 1-4, 2005
  • B. Michel, B. Wunderle, A. Gollhardt, C. Bombach and J. Keller
    Zuverlässigkeit von Komponenten der Mikrosystemtechnik durch die Einbeziehung von Nanoanalytik und Nanomechanik.
    Mikroelektronik, Chemnitz, Oct 26-27, 2005
  • R. Schacht, D. May, B. Wunderle, O. Wittler, A. Gollhardt, B. Michel and H. Reichl
    Characterization of Thermal Interface Material for Thermal Simulation.
    Proc. Deutsche IMAPS-Konferenz 2005, Okt 10-11, 2005, Munich, Germany
  • R. Schacht, E. Auerswald, J.P. Sommer, B. Wunderle, B. Michel and H. Reichl
    Accelerated Failure Test for High-T Applications of Power MOSFETs by Power Cycling.
    Proc. 11th Therminic 2005, Sep 28-30, 2005, Belgriate, Italy.
  • M. Spraul, W. Nüchter, B. Wunderle, B. Michel
    Comparison of Lifetime Predictions with 3D Finite Element Models of a High Density Flip Chip without Underfill on LTCC.
    Proc. 6th EuroSIME 2005, Berlin, Germany, pp. 441-447, 2005
  • Frühauf, J.
    Werkstoffe der Mikrotechnik
    Lehruch für Ingenieure
    Fachbuchverlag Leipzig im Carl Hanser Verlag, München Wien, 2005
    ISBN 3-446-22557-9
    Verfügbar in Universitätsbibliothek
  • Frühauf, J.
    Shape and Functional Elements of the Bulk Silicon Microtechnique
    A Manual of Wet Etched Silicon Structures
    Springer Verlag, Berlin Heidelberg New York, 2005
    ISBN: 3-540-22109-3
    Verfügbar in Universitätsbibliothek
  • Frühauf, J.; Gärtner, E.; Seifert, M.
    Solid Hinge Guide Made by Silicon Bulk Technology.
    Proceedings of the EUSPEN, p. 329, Montpellier 2005
    ISBN: 92-990035-0-5
  • Krüger-Sehm, R.; Dziomba T.; Frühauf, J.
    Determination of the short wavelength cutoff of interferential and confocal microscopes
    Proceedings of the 10th International Conference on Metrology and Properties of Engineering Surfaces, St. Etienne, France, July 4-7 2005 p. 21-28
    ISBN: 2-86272-389-4
  • Frühauf, J.; Krönert S.
    Wet etching of silicon gratings with triangular profiles
    Microsyst. Technol. 11 (2005) 1287-1291
    ISSN: 0946-7076

Publications 2004

  • Frühauf, J.; Krönert, S.
    Linear Silicon Gratings with Different Profiles: Trapezoidal, Triangular, Rectangular
    XI. International Colloquium on Surfaces, Chemnitz, Germany, February 2-3 2004
    Proceedings Part II 75-83, Shaker-Verlag Aachen 2004 ISBN: 3-8322-2419-X
  • Frühauf, J.; Krönert, S.; Brand, U.; Krüger-Sehm, R.
    Reachable precision of silicon dimensional standards
    Proceedings of the EUSPEN, p. 217, Glasgow 2004
    ISBN: 1861941080
  • Frühauf, J.; Gärtner, E.; Brand, U.; Döring, L.
    Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers
    Proceedings of the EUSPEN, p. 362, Glasgow 2004
    ISBN: 1861941080
  • Frühauf, J.
    Ätzmasken-Entwurf und Simulation des kristallorientierungsabhängigen Silizium-Ätzens
    Tagungsband 10. GMM-Workshop Methoden und Werkzeuge zum Entwurf von Mikrosystemen (Hrsg. B. Falter; W. John), Cottbus 2004, S. 19-23
    ISSN: 0947-1413
  • Krüger-Sehm, R.; Häßler-Grohne, W.; Frühauf, J.
    Traceable calibration standard for the lateral axis of contact stylus instruments
    Wear, Vol. 257 Nr. 12 (2004), 1241-1245
    ISSN: 0043-1648

Publications 2003

  • Frühauf, J.
    Silicon as a suitable material in precision engineering
    Proceedings of the EUSPEN, p. 39, Aachen 2003
    ISBN: 3-926832-30-4
  • Gärtner, E.; Frühauf, J.; Jänsch, E.
    Flexural solid hinges etched from silicon
    Proceedings of the EUSPEN, p. 43, Aachen 2003
    ISBN: 3-926832-30-4
  • Frühauf, J.; Krönert, S.; Krüger-Sehm, R.
    Precision of etched bulk silicon structures with dimensions up to the mm-range
    Proceedings of the EUSPEN, p. 253, Aachen 2003
    ISBN: 3-926832-30-4
  • Döring, L,; Brand, U.; Peiner, E.; Frühauf, J.; Gärtner, E.
    Development of micro force setting standards for stylus instruments
    Proceedings of the EUSPEN, p. 407, Aachen 2003
    ISBN: 3-926832-30-4
  • Krüger-Sehm, R., Häßler-Grohne, W., Frühauf, J.
    Traceable calibration standard for the lateral axis of contact stylus instruments
    9th Conference on Metrology and Properties of Engineering Surfaces, 10.-11.09.2003, Halmstad, Sweden, Proceedings, p. 7-14
    ISBN: 91-631-5455-2
  • Kuhn, M.; Flaspöhler, M.; Krönert, S.; Kaufmann, C.; Geßner, T.; Hübler, A.; Frühauf, J.
    Herstellung und Charakterisierung von mikromechanischen Scannern mit integrierten Beugungsgittern
    6. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 29./30. Oktober 2003, Chemnitz, Germany, Tagungsband S. 60-64
    ISBN: 3-00-011655-9
  • Gärtner, E.; Frühauf, J.; Krönert, S.; Jänsch, E.
    Festkörpergelenkführungen aus Si mit bis zu +/- 5 mm Hub
    6. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 29./30. Oktober 2003, Chemnitz, Germany, Tagungsband S. 118-121
    ISBN: 3-00-011655-9

Publications 2002

  • Frühauf, J.; Trumpold, H.
    Silicon Standards for Assessment and Calibration of Stylus Probes
    Annals of the CIRP Vol. 51/1/2002, 475-478
  • Jänsch, E.; Gärtner, E.; Frühauf, J.
    Biegebruchfestigkeiten von geätzten und verformten Silicium-Mikrostrukturen
    Freiberger Forschungshefte B321 Werkstofftechnologie (2002) 'Kristallisation und Technik', S. 238-253
    Herausgeber: H.-J. Möller, E. Buhrig und Rektor der TU Bergakademie Freiberg (2002)
    ISBN: 3-86012-173-1
  • Flaspöhler, M.; Kuhn, M.; Kaufmann, C.; Guessous, F.; Frühauf, J.; Gessner, T.; Hübler, A.
    Image capturing method using a microactuator with diffraction grating
    Actuator 2002, 8th International Conference on New Actuators, 10-12 June 2002, Bremen, Germany, Conference Proceedings 325-328,
    ISBN: 3-933339-04-9
  • Hanf, H.; Bennini, F.; Frühauf, J.; Gärtner, E,; Dötzel, W.
    Realization of electrostatically driven Actuators using curved electrodes using by sillicon bulk micromachining techniques
    Actuator 2002, 8th International Conference on New Actuators, 10-12 June 2002, Bremen, Germany, Conference Proceedings 329-332,
    ISBN: 3-933339-04-9

Publications 2001

  • Gärtner, E.; Frühauf, J.; Löschner, U.; Exner, H.
    Laser bending of etched silicon microstructures
    Microsystem Technologies 7 (2001) 23-26
    ISSN: 0946-7076
  • Gärtner, E.; Frühauf, J.; Hannemann, B.; , Jänsch, E.
    Mounting of Si-chips with plastically bent cantilevers
    Transducers '01 Eurosensors XV, The 11th International Conference on Solid State Sensors and Actuators, Munich, Germany, June 10-14, 2001
    Digest of technical Papers Vol.1 1C3.08P, p. 206-209
    ISBN: 3-8265-6999-7
  • Frühauf, J.; Krönert, S.; Brand, U.
    Tiefen- und L�ngennormale aus Silizium
    tm - Technisches Messen 68, 7-8 (2001) 326-332
    ISSN: 0171-8096
  • Gärtner, E.; Frühauf, J.; Jänsch, E.
    Plastic reshaping of silicon microstructures: process, characterization and application
    Microsystem Technologies 7 (2001) 155-160

Publications 2000

  • Frühauf, J.; Hannemann, B.
    Wet etching of undercut sidewalls in (001)-Silicon
    Sensors and Actuators A 79 (2000) 55-63
    ISSN-Nr: 0924-4247
  • Frühauf, J.; Hannemann, B.; Löhr, K.
    Measurement of form profiles of microstructures using stylus instruments - problems and tools
    X. International Colloquium on Surfaces, 31st January to 2nd February of the year 2000, Chemnitz University of Technology, Proceedings, p. 322-329
    ISBN: 3-8265-6999-7
  • Gärtner, E.; Frühauf, J.; Jänsch, E.
    Plastic reshaping of silicon microstructures: process, characterization and application
    Micro Materials 2000, April 17-19, 2000, Berlin, Germany, Proceedings of the 3rd International Micro Materials Conference
    Editors: B. Michel, T. Winkler, M. Werner, H. Fecht. Verlag ddp goldenbogen Dresden, pp. 1165-1168
  • Bennini, F.; Frühauf, J.; Dötzel, W.
    High force and large displacement electrostatic actuators with curved electrodes using silicon bulk micromachining
    Actuator 2000, 7th International Conference on New Actuators, 19-21. June Bremen, Germany, Proceedings
    ISBN: 3-933339-02-2, p.87-90

Publications 1999

  • Frühauf; J.; Gärtner, E.; Jänsch, E.
    New aspects of the plastic deformation of silicon - prerequisites for the reshaping of silicon microelements
    Appl.Phys.A 68 (1999) 673-679
  • Frühauf; J.; Hannemann, B.

    Mikrotechnik in Bestform - Designunterstützung für Funktionselemente aus Silizium
    F&M Feinwerktechnik, Mikrotechnik, Mikroelektronik, Jahrg. 107(1999) Nr.5, 50-52
  • Dötzel, W.; Frühauf, J.; Gessner, T.; Hühnerfürst, A.; Kehr, K.; Gätner, E.; Jänsch, E.
    Characterization of elastic and plastic behaviour of materials in silicon micromechanics in Materials Mechanics - Fracture Mechanics - Micromechanics
    An Anniversary Volume in Honeur of B. Michel's 50th Birthday, Editors: T. Winkler, A. Schubert, Fraunhofer IZM Berlin, Chemnitz 1999, p.243-249
  • Hannemann, B; Frühauf, J.
    Micro-optical silicon elements fabricated by wet chemical etching
    Proc. SPIE Vol. 3739, 9 (1999), Optical Fabrication and Testing, (Roland Geyl; Jonathan Maxwell; Eds.) p. 213-223
  • Frühauf, J.; Gärtner, E.; Jänsch, E.
    Silicon as a Plastic Material
    J. Micromech. Microeng. 9 (1999) 305-312

Publications 1998

  • Hannemann, B.; Frühauf, J.
    New and extended possibilities of orientation dependent etching in microtechnics
    Proceedings IEEE The Eleventh Annual International Workshop on Mico Electro Mechanical Systems MEMS'98, January 25-29, 1998, Heidelberg, Germany, 234-239
  • Frühauf, J.
    Problems of contour measuring on microstructures using a surface profiler
    Meas. Sci. Technol. 9 (1998) 293-296
  • Frühauf, J.; Gärtner, E.; Jänsch, E.
    Disloction content and fracture of plastically deformed silicon microstructures
    The 9th Micromechanics Europe Workshop MME '98, June 3-5, 1998, Ulvik in Hardanger, Norway, Proccedings, p.66-69
  • Hannemann, B.; Frühauf, J.
    A catalogue of shapes and elements of Si-bulk microtechnique, producable by anisotropic chemical wet etching
    The 9th Micromechanics Europe Workshop MME '98, June 3-5, 1998, Ulvik in Hardanger, Norway, Proccedings, p.311-314
  • Gärtner, E.; Frühauf, J.; Jänsch, E.
    Plastische Verformung von Silizium-Mikrostrukturelementen
    K. Kempter und J. Haußelt (Hrsg.) Werkstoffwoche '98, Band I, Symposium 12 Mikrosystemtechnik, Wiley-VCH, Weinheim; New York; Chichester; Brisbane; Singapore; Toronto, 1999, 315-320

Publications 1997

  • Frühauf, J.
    Kapitel Werkstoffe der Mikrosystemtechnik
    in Grundlagen der Mikrosystemtechnik
    Herausgeber: G. Gerlach; W. Dötzel, München, Wien, 1997, Carl Hanser Verlag
  • Frühauf, J., Franke, C.
    Plastic deformation of silicon microelements at high temperatures
    Micro Materials '97, April 16-18, 1997, Berlin Germany
    Proceedings of the International Conference and Exhibition ed. by Deutscher Verband f�r Materialforschung und -prüfung e.V.
    Berlin April 16-18, 1997 Berlin, Germany, 459-462
  • Zielke, D.; Frühauf, J.
    Complete simulation support for orientation dependent etched MEMS
    in Adey, R.A.; Renaud, Ph. (Eds.): MICROSIM II Simulation and Design of Microsystems and Microstructures,
    Computational Mechanics Publications, 261-270
    2nd International Conference Simulation and Design of Microsystems and Microstructures
    17-19 September 1997, Lausanne, Switzerland

Press Articles