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Professur Smart Systems Integration
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Professur Smart Systems Integration 

Student Jobs, Thesis

NEW: Students of the Master course »Micro and Nano Systems« should apply for a research project on Bildungsportal Sachsen.

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#343  

Aluminum
Scandium Nitride (AlScN) has emerged as a key material for next-generation
MEMS, RF devices, resonators, sensors, and piezoelectric actuators due to its
outstanding piezoelectric properties. However, the fabrication of high-quality
AlScN microstructures requires advanced and well-controlled etching processes.
In particular, achieving high etch rates, steep sidewalls, good selectivity,
and low surface damage remains a significant technological challenge.

At the Center
for Micro and Nano technologies (ZfM) and Fraunhofer ENAS, we are developing
advanced microfabrication processes for functional thin-film materials.
Fraunhofer ENAS operates one of the very few 200 mm Pulsed Laser Deposition
(PLD) systems available worldwide in a research environment, enabling the
deposition of AlScN thin films with scandium contents of up to 40%. To enable
the future integration of this high-performance material into our MEMS process
flows, a robust and well-characterized etching process for this challenging
material is required. The goal of this project is to develop and optimize dry
etching processes for AlScN thin films and investigate complementary
wet-etching as well as combined wet/dry etching approaches.

        What will
you do?

  •          Conducting
    a comprehensive literature review on plasma and wet etching of AlScN
  •          Investigate chlorine-based dry etching chemistries (e.g., Cl?/BCl?/Ar) in
    an ICP-RIE process environment.
  •          Systematically optimize key etching parameters to optimize the etching
  •         Evaluate etch performance with respect to etch rate, uniformity, as well
    as process reproducibility.
  •          Characterize etched structures using optical inspections and scanning
    electron microscopy (SEM).
  •          Develop and validate an optimized etching recipe for future AlScN based
    MEMS and piezoelectric device fabrication.

·                 What will you bring?


  •          You study Microsystems Engineering, Physics, Electrical Engineering or a
    related field

  •          Interest in semiconductor technology, MEMS fabrication, and plasma
    processing

  •          Basic understanding of plasma processes and thin-film deposition is
    advantageous

  •          Familiarity with cleanroom fabrication processes is a plus


    We are currently seeking candidates for Master's Research Projects and theses and internship positions. 

Contact: Apply for this job by email

Possible as: Student research project, Master-Thesis

Addressed topics: MEMS, Processes / technology, Review of Literature

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