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NEW: Students of the Master course »Micro and Nano Systems« should apply for a research project on Bildungsportal Sachsen.

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#282  

Silica is one of the most used oxides in microelectronics and microelectromechanical systems (MEMS) as high-quality, mechanical and electrical very stable insulator and passivation layer. Prominent examples are the gate isolation of metal-oxide-semiconductor field-effect transistors (MOSFETs) or the Inter- and Intra- level dielectrics in integrated circuits (ICs). For the deposition of Silica, different techniques can be used, which usually requires high temperature treatments. A thermal oxidation usually takes places at temperatures above 1000 °C, whereas the chemical vapor deposition (CVD) of silica by TEOS still takes temperature above 700 °C. Within the beginning of the 21th century, the microelectronic industry focuses more on the introduction and optimization of high- and low-k dielectrics, whereas novel emerging devices and technologies require low-temperature oxides. Low temperature silica can either be deposited by plasma enhanced chemical vapor deposition (PECVD) at temperature below 400 °C or by spin coating techniques. However, the lower the deposition temperature, the lower the material properties like mechanical and electrical stability, density or material defects. Further process steps can led to a further degradation of the silica and can finally cause a failure of the whole system. Consequently, developing new devices and technologies needs well-defined knowledge of process- and material-properties and parameter.

The research project will focus on non-destructive characterization techniques to investigate the material properties of the different Silica, deposited by high to low temperature processes.
The main tasks will cover:
- Literature research
- Sample preparation and batch mentoring (Losbetreuung)
- Spectral ellipsometry measurements and evaluation
- FTIR-measurements and evaluation
- Potential Silica to be used: thermal grown SiO2, CVD SiO2, PECVD SiO2, Spin-On SiO2 and low-k Oxides, PECVD low-k Oxides

Contact: Apply for this job by email

Possible as: Student research project

Addressed topics: MEMS, Micro- and Nanoelectronics, Nano technology, Measurement / analytics, Processes / technology, Review of Literature

#284  

Labels: Student research project   Student Assistance   Bachelor-Thesis   Master-Thesis   Diploma Thesis   PhD Position  

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