Springe zum Hauptinhalt
Professur Smart Systems Integration
HiWi-Jobs, Studienarbeiten, Abschlussarbeiten, ...

Student Jobs, Thesis

NEW: Students of the Master course »Micro and Nano Systems« should apply for a research project on Bildungsportal Sachsen.

Apply filter
Job Type
Topic
Working field
Sort by
Description(?)Type of Job
#285  
#281  

The impact of moisture on the reliability of silica thin films can lead to dramatic effect in microelectronic and microelectromechanical systems. For the deposition of Silica, different techniques can be used, which usually requires high temperature treatments. A thermal oxidation usually takes places at temperatures above 1000 °C, whereas the chemical vapor deposition (CVD) of silica by TEOS still takes temperature above 700 °C. Within the beginning of the 21th century, the microelectronic industry focuses more on the introduction and optimization of high- and low-k dielectrics, whereas novel emerging devices and technologies require low-temperature oxides. Low temperature silica can either be deposited by plasma enhanced chemical vapor deposition (PECVD) at temperature below 400 °C or by spin coating techniques. However, the lower the deposition temperature, the lower the material properties like mechanical and electrical stability, density or material defects. This all can lead to an increasing uptake of moisture in low temperature oxides and low-k dielectrics. Further process steps can led to a higher amount of water inside the material and therefor to a further degradation of the silica, which finally causes a failure of the whole system. Consequently, developing new devices and technologies needs well-defined knowledge of process- and material-properties and parameter.

The research project will focus on destructive and non-destructive characterization techniques to investigate the water uptake of the different Silica, deposited by high to low temperature processes.
The main tasks will cover:
- Literature research
- Sample preparation and batch mentoring (Losbetreuung)
- Thickness measurements by spectral ellipsometry
- CV-Measurements and sample preparation of MIS-structures
- FTIR-measurements and evaluation
- Correlation with CV-Measurements
- Potential Silica to be used: thermal grown SiO2, CVD SiO2, PECVD SiO2, Spin-On SiO2 and low-k Oxides, PECVD low-k Oxides

Contact: Apply for this job by email

Possible as: Student research project

Addressed topics: MEMS, Micro- and Nanoelectronics, Nano technology, Measurement / analytics, Processes / technology, Review of Literature

#282  
#284  

Labels: Student research project   Student Assistance   Bachelor-Thesis   Master-Thesis   Diploma Thesis   PhD Position  

Presseartikel