Publikationen
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Jahr 2025
| Franz,M.; Jaeckel,L.; Hu,X.; Kassner,L.; Thurm,C.; Rittrich,D.; Helke,C.; Schuster,J.; Daniel,M.; Stahr,F.; Rueffer,N.; Kretschmer,R.; Schulz,S.E.: Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures. Journal of Vacuum Science & Technology A, 43, 2 (2025) p 022412 (ISSN 0734-2101) |
| Manoharan,G.; Hann,J.; Selyshchev,O.; Meinecke,C.; Otto,T.; Schulz,S.E.; Zahn,D.R.T.; Blaudeck,T.: FluidFM Deposition of Semicondutor Quantum Dots From Aqueous Dispersions. Nano Select, p 0:e70011 |
