| Arnold,B.; Rost,F.; Decker,R.; Bauer,A.; Tsapkolenko,A.; Heinrich,M.; Gessner,T.; Rzepka,S.; Otto,T.; Michel,B.; Mehner,J.; Kroll,L.: Chapter Technologien für die Integration miniaturisierter Silizium-Sensorsysteme. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen – Ressourceneffizienz durch die Schlüsseltechnologie „Leichtbau“, ed. by Kroll, Lothar (2019) pp 485-515 (ISBN 978-3-662-54733-5, 978-3-662-54734-2) |
| Bullinger-Hoffmann,A.C.; Kroll,L.; Otto,T.; Weiss,A.; Kaiser,A.; Langenickel,J.; Meyer,M.: Chapter Integration von QD-LEDs in Spritzgießstrukturen. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen – Ressourceneffizienz durch die Schlüsseltechnologie „Leichtbau“, ed. by Kroll, Lothar (2019) pp 323-346 (ISBN 978-3-662-54733-5, 978-3-662-54734-2) |
| D.R.T.Zahn; Schulz,S.E.; Hiller,K.; Wagner,C.; Reuter,D.; Otto,T.: Sensoric Micro and Nano Systems (ISSN 1862-6319) |
| Goetze,U.; Kroll,L.; Otto,T.; Gessner,T.; Schmidt,A.; Lipowski,M.; Schueller,M.; Stiehl,C.; Symmank,C.; Walther,M.: Chapter Integration funktionaler elektronischer Elemente. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen – Ressourceneffizienz durch die Schlüsseltechnologie „Leichtbau“, ed. by Kroll, Lothar (2019) pp 419-439 (ISBN 978-3-662-54733-5, 978-3-662-54734-2) |
| Grossmann,T.D.; Hartwig,M.; Heinrich,M.; Kurth,S.; Baumann,R.R.; Otto,T.; Gessner,T.: Chapter Mikro- und Nanosystemintegration in Leichtbaustrukturen - Technologien zur Integration von Metaflächen. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen, ed. by Kroll, L. (2019) pp 458-484 (ISBN 978-3-662-54733-5) |
| Huebler,A.C.; Nestler,D.; Otto,T.; Wagner,G.; Wielage,B.; Gessner,T.; Fuegmann,U.; Wett,D.; Boeddicker,A.; Ebert,F.; Karapepas,C.; Reimann,N.; Seider,T.: Chapter Kontinuierliche Fertigung intelligenter hybrider Verbunde. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen - Ressourceneffizienz durch die Schlüsseltechnologie „Leichtbau“, ed. by Kroll, Lothar (2019) pp 125-148 (ISBN 978-3-662-54733-5, 978-3-662-54734-2) |
| Moebius,M.; Martin,J.; Hartwig,M.; Dzhagan,V.M.; Miesel,D.; Baumann,R.R.; Zahn,D.R.T.; Lang,H.; Otto,T.; Gessner,T.: Chapter Entwicklung und Integration von folienbasierten Sensoren für Belastungsdetektion. in the book: Technologiefusion für multifunktionale Leichtbaustrukturen, ed. by Kroll,L. (2019) pp 439-457 (ISBN 978-3-662-54733-5) |
| Otto,T.; Baumann,R.R.; Zichner,R.: Chapter Go Beyond 4.0 Lighthouse Project. in the book: Digital Transformation, ed. by Neugebauer, Reimund (2019) pp 215-229 (ISBN 978-3-662-58133-9, 978-3-662-58134-6) |
| Baum,M.; Saeidi,N.; Wiemer,M.; Otto,T.: Miniaturized Capacitive Micromachined Ultrasound Transducer Arrays for personalized Medicine. 41st Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC), Berlin, 2019 Jul 23-27; Proceedings |
| Buelz,D.; Streit,P.; Forke,R.; Otto,T.: Simulation der Eigenerwärmung gedruckter Leiterbahnen für die thermische Auslegung. MikroSystemTechnik Kongress 2019, Berlin (Germany), 2019 Oct 28-30; Proceedings, pp 690-693 (ISBN 978-3-8007-5090-0) |
| Buelz,D.; Streit,P.; Forke,R.; Otto,T.: Simulation of Self-Heating of Printed Interconnects for Thermal Design. 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Hannover (Germany), 2019; Proceedings, pp 1-5 (ISBN 978-1-5386-8040-7, 978-1-5386-8039-1, 978-1-5386-8041-4) |
| D.R.T.Zahn; Schulz,S.E.; Hiller,K.; Wagner,C.; Reuter,D.; Otto,T.: Sensoric Micro and Nano Systems - honoring the merits of Thomas Gessner (1954-2016). physica status solidi (a) , 216, 19 (2019) p 1900733 (ISSN 1862-6319) |
| Dittmar,N.; Kuechler,M.; Meinecke,C.; Reuter,D.; Otto,T.: Developing a process to remove single silicon layers by atomic layer
etching. MikroSystemTechnik Kongress, Berlin, 2019 Oct 28.-30.; Proceedings, pp 585-588 (ISBN 978-3-8007-5090-0) |
| Enderlein,T.; Nestler,J.; Stiehl,C.; Morschhauser,A.; Otto,T.: Electrically Controlled Actuation of Strained Nanomembranes. "Sensoric Micro and Nano Systems", physica status solidi (a), 216, 19 (2019) p 1800840 (ISSN 1862-6319) |
| Forke,R.; Hiller,K.; Hahn,S.; Weidlich,S.; Konietzka,S.; Motl,T.; Praedicow,A.; Otto,T.: Low Power High Bandwidth Acceleration Sensor For Industrial Applications. 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, FL, (USA), 2019 Apr 1-5; Proceedings, pp 1-4 (ISBN 978-1-5386-7828-2, 978-1-5386-7827-5, 978-1-5386-7829-9) |
| Forke,R.; Hiller,K.; Hahn,S.; Weidlich,S.; Kuechler,M.; Konietzka,S.; Motl,T.; Praedicow,A.; Otto,T.: Low Power High Bandwidth Acceleration Sensors. 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI), Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 30-37 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Forke,R.; Hiller,K.; Kuechler,M.; Hahn,S.; Weidlich,S.; Konietzka,S.; Motl,T.; Praedicow,A.; Otto,T.: Beschleunigungssensoren mit großer Bandbreite und geringer Leistungsaufnahme für industrielle Anwendungen. MikroSystemTechnik Kongress 2019, Berlin (Germany), 2019 Oct 28-30; Proceedings, pp 119-122 (ISBN 978-3-8007-5090-0) |
| Gadhiya,G.; Braemer,B.; Rzepka,S.; Otto,T.: Assessment of FOWLP process dependent wafer warpage using parametric FE study. 2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC), Pisa (Italy), 2019 Sep 16-19; Proceedings (ISBN 978-0-9568086-6-0, 978-1-7281-6291-1) |
| Gadhiya,G.; Braemer,B.; Rzepka,S.; Otto,T.; Kuisma,H.: The Creation of a Validated Scheme for the Automated Optimization of
Systems in Package Designs. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 102-109 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Geidel,S.; Morschhauser,A.; Otto,T.: The Implementation of Semiconductor Based Biosensors Into Point of Need Systems for the Automatized Analysis of Complex Samples. 2019 China Semiconductor Technology International Conference (CSTIC), Shanghai, China, 18-19 March 2019; Proceedings (ISBN 978-1-5386-7443-7) |
| Grossmann,T.D.; Decker,R.; Kurth,S.; Kroll,L.; Otto,T.: Reflection based Strain Sensing using Metamaterials.. IMTC 2019, Chemnitz, 2019 Fep 18-19; Technologies for Lightweight Structures (TLS) 2019 |
| Hann,J.; Helke,C.; Lakatos,M.; Heerwig,A.; Nestler,J.; Erben,J.; Reuter,D.; Mertig,M.; Otto,T.: Parameter dependency of DNA origami immobilization at micro- and nano structured CF polymer surfaces on SiO2. Materialstoday: Proceedings, 7, Part 3 (2019) pp 844-854 |
| Heldt,G.; Weiss,A.; Helke,C.; Erben,J.; Kurth,S.; Meinig,M.; Martin,J.; Hiller,K.; Reuter,D.; Otto,T.: Integration of plasmonic nanostructures for micro-opto-electro-mechanical-systems. Smart System Integration (SSI), Barcelona, 2019 Apr 01-02; Proceedings, pp 1-7 |
| Helke,C.; Hiller,K.; Seiler,J.; Erben,J.; Werner,T.; Reuter,D.; Meinig,M.; Kurth,S.; Otto,T.: Nanostructered Al SWG Reflectors on thin LP-Si3N4 membranes as (TiO2/SiO2)³ Bragg reflector alternative for VIS Fabry-Pérot Interferometers. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, 23-27 Jun pp 1596-1599 (ISBN 978-1-5386-8104-6) |
| Helke,C.; Hiller,K.; Seiler,J.; Werner,T.; Meinig,M.; Kurth,S.; Otto,T.: VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)³ Bragg-reflectors on 5 mm large LP-Si3N4 membranes. SPIE Photonics West - MOEMS and Miniaturized Systems XVIII, San Francisco, 2019 Feb 2-7; Proceedings, Vol. 10931 (2019) pp 1-8 |
| Hertel,S.; Jobke,A.; Wiemer,M.; Reuter,D.; Otto,T.: Fabrication of Nano Porous Gold towards Wafer Level Packaging. Smart System Integration , Barcelona, 2019 April 10-11; Proceedings, 13 (2019) pp 169-176 (ISBN ISBN 978-3-8007-4919-5) |
| Hiller,K.; Helke,C.; Seifert,M.; Seiler,J.; Kurth,S.; Meinig,M.; Otto,T.: Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter. MikroSystemTechnik Kongress, Berlin, 2019 Oct 28-30; Proceedings, pp 1-4 (ISBN ISBN 978-3-8007-5090-0) |
| Hofmann,C.; Froehlich,A.; Kimme,J.; Wiemer,M.; Otto,T.: A Novel Method for MEMS Wafer-Level Packaging: Selective and Rapid Induction Heating for Copper-Tin SLID Bonding. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin (Germany), 2019 Jun 23-27; Proceedings, 20 (2019) pp 277-280 |
| Huber,M.; Zienert,A.; Weigel,P.; Schueller,M.; Berger,H.-R.; Schuster,J.; Otto,T.: Optimization of synthetic jet actuation by analytical modeling. Aircraft Engineering and Aerospace Technology (submitted) (ISSN 0002-2667) |
| Kaupmann,P.; Pinter,S.; Franz,J.; Streiter,R.; Otto,T.: A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors. Journal of Microelectromechanical Systems (IEEE/ASME), 28, 2 (2019) pp 226-234 (ISBN 1057-7157, 1941-0158) |
| Kurth,S.; Meinig,M.; Wecker,J.; Seifert,M.; Hiller,K.; Otto,T.: A MEMS IR optical chopper based on subwavelength structures. SPIE Defense + Commercial Sensing, Micro- and Nanotechnology Sensors, Systems and Applications XI, Baltimore (USA), 2019 May 13; Proceedings of SPIE, 10982, 109823A (2019) |
| Lange,S.; Bueker,M.-J.; Sievers,D.; Hedayat,C.; Foerstner,J.; Hilleringmann,U.; Otto,T.: Method of superposing a multiple driven magnetic field to
minimize stray fields around the receiver for inductive wireless
power transmission. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 371-374 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Lange,S.; Hedayat,C.; Otto,T.: Verfahren zur Lokalisierung von Sensoren in der Medizintechnik. inno Innovative Technik - Neue Anwendungen, 24. Jahrgang, 74, November 2019 (2019) |
| Lange,S.; Schroeder,D.; Hedayat,C.; Otto,T.; Hilleringmann,U.: Inductive Locating Method to Locate Miniaturized Wireless Sensors Within Inhomogeneous Dielectrics. 17TH IEEE international NEWCAS conference, Munich (Germany), 2019 Jun; Proceedings |
| Meinel,K.; Stoeckel,C.; Melzer,M.; Zimmermann,S.; Forke,R.; Hiller,K.; Otto,T.: Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin (Germany), 2019 June 23-27; Proceedings, pp 1518-1521 |
| Meinel,K.; Stoeckel,C.; Melzer,M.; Zimmermann,S.; Forke,R.; Hiller,K.; Otto,T.: Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf
Dünnschicht-Aluminiumnitrid. MikroSystemTechnik Kongress, Berlin, 2019 Oct 28-30; Proceedings, pp 92-95 (ISBN 978-3-8007-5090-0) |
| Meinel,K.; Stoeckel,C.; Melzer,M.; Zimmermann,S.; Forke,R.; Hiller,K.; Otto,T.: Piezoelectric Scanning Micromirror with Built-in Sensors Based on Thin Film Aluminum Nitride. IEEE SENSORS, Montreal (Canada), 2019 Oct 27-30; Proceedings |
| Moebius,M.; Martin,J.; Hartwig,M.; Decker,R.; Kroll,L.; Baumann,R.R.; Otto,T.: Visualization of mechanical loads with semiconductor nanocrystals. Adv. Mater. Lett., 10, 6 (2019) pp 391-394 |
| Petrov,D.; Schmidt,M.; Hilleringmann,U.; Hedayat,C.; Otto,T.: RFID based sensor platform for industry 4.0 application. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 363-366 (ISBN 978-3-8007-4878-5 ,978-3-8007-4919-5) |
| Roscher,F.; Thalheim,R.; Seifert,T.; Paul,S.D.; Zichner,R.; Wiemer,M.; Otto,T.: Joining two worlds – hybrid integration of silicon based electronics and printed functionalities. Smart Systems Integration, Barcelona (Spain); Smart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems, pp 1-8 (ISBN 978-3-8007-4919-5) |
| Saeidi,N.; Han,M.; Baum,M.; Wiemer,M.; Otto,T.: Tools and Techniques for Ultrasound Nerve Stimulation. 41st Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC), Berlin, 2019 Jul 23-27; Proceedings |
| Schmidt,M.; Petrov,C.; Hedayat,C.; Hilleringmann,C.; Otto,T.: Wireless power supply for a RFID based sensor platform. Smart Systems Integration 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems (SSI), Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 367-370 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Schroeder,D.; Hangmann,C.; Hedayat,C.; Otto,T.; Hilleringmann,U.: Characterization of H-field Probes regarding Unwanted Field
Suppression using Different Calibration Structures. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 375-378 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Wolf,M.; Barth,M.; Eberhardt,W.; Zimmermann,A.; Geneiss,V.; Hedayat,C.; Otto,T.: Optimized Micro-Mounting and Hybrid Integration of RF Mixed-
Signal Systems based on MID Technology. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Proceedings, pp 383-386 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
| Zahn,D.R.T.; Schulz,S.E.; Hiller,K.; Wagner,C.; Reuter,D.; Otto,T.: Sensoric Micro and Nano Systems. Physica Status Solidi. A: Applications and Materials Science, 216.2019, 19 (2019) p 1900733 (ISSN 0031-8965) |
| Zichner,R.; Thalheim,R.; Baumann,R.R.; Otto,T.: Printing Beyond Color - Towards the Integration of Digital Printing
and Laser Technics into General Manufacturing Environments. 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems, Barcelona (Spain), 2019 Apr 10-11; Talk (The manuscript of the presentation was not present at the time of production), p 262 (ISBN 978-3-8007-4878-5, 978-3-8007-4919-5) |
