Publikationen
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Jahr 2003
Papers
| Kuechler,M.; Otto,T.; Gessner,T.; Ebling,F.; Schroeder,H.: Hot embossing for MEMS using silicon Tools. ICMAT 2003, Singapore, 2003; International Journal of Computational Engineering Science, 4 No.3 (2003) pp 609-612 |
| Otto,T.; Saupe,R.; Gessner,T.: Novel Possibilities in Physical Analytics Employing Miniaturized Devices. Proc. of the MST 2003,, München (Germany); Proceedings, pp 565-567 |
| Saupe,R.; Otto,T.; Stock,V.; Fritsch,U.; Gessner,T.: Packaging and Characterization of Micro-Opto-Electro-Mechanical Systems. ISMOT (International Symposium on Microwave and Optical Technology), Ostrava (Czech Republic); Proceedings |
| Windhorn,K.; Meixner,L; Drost,S.; Schroeder,H.; Kilgus,E.; Scheel,W.; Ebling,F; Otto,T.; Kuechler,M.; Nestler,J.; Gessner,T.: Polymer BioMEMs with integrated optical and fluidic functionality. Micro System Technologies, Munich (Germany), 2003 Oct 7-8; Proceedings, pp 416-423 |
