Mittwoch, 17.06.2026 MAIN-Vorlesung "Investigation of Low-Temperature Dopant Activation for 3D IC Technology" (Vorlesung/Vortrag)

• TU Chemnitz, Forschungszentrum MAIN
• Zeit: 09:30 bis 10:30 Ort: Forschungszentrum MAIN, Rosenbergstr. 6, 09126 Chemnitz Sprache: Englisch
• Referent/-in: Prof. Dr. Ruey-Dar Chang (Chang Gung University , Department of Electronics Engineering, Taoyuan, Taiwan, ROC)
• Info: MAIN-Geschäftsstelle | MAIN Management Office (0371/531-20100 | kontakt@…)
• The increasing demand for data processing and computational performance drives the need for higher transistor densities in integrated circuits. 3D ICs based on vertically stacked devices fabricated through low-T BEOL processes have emerged as solution.
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