1 Technologies for the integration of miniaturized silicon sensor systems

Autoren: Kroll, Lothar; Mehner, Jan; Michel, Bernd; Otto, Thomas; Rzepka, Sven; Geßner, Thomas; Arnold, Benjamin; Rost, Florian; Decker, Ricardo; Bauer, Angelika; Tsapkolenko, Alexander; Heinrich, Michael
Quelle: Multifunctional Lightweight Structures. Resource Efficiency by MERGE of Key Enabling Technologies, Integrating micro and nano systems into lightweight structures . - Berlin : Springer Vieweg, 2023, S. 473 - 501. - 1
Erscheinungsjahr: 2023
ISBN/ ISSN: Hardcover ISBN 978-3-662-62216-2 ; Softcover ISBN 978-3-662-62219-3 ; eBook ISBN 978-3-662-62217-9