Infrared MEMS spectrometers

Figure 1: NIR/MIR MEMS Spectrometer

Exemplary for the activities in the field of microoptics is the development and validation of infrared MEMS spectrometers. Such a miniaturized spectrometer has been developed together with the company TQ Systems GmbH Chemnitz. The systems can be configured for different wavelength bands and hence used in various applications. To the fields of application of this spectrometer belong, for example, food studies, environmental monitoring, medical diagnostics, metrology or the physical forensic analysis.