Prof. Dr. Harald Kuhn

	Telefon:	+49 (0) 371 - 531 33009
	Email	harald.kuhn@…
	Adresse:	Prof. Harald Kuhn Technische Universität Chemnitz Fakultät für Elektrotechnik und Informationstechnik Reichenhainer Straße 70 D-09107 Chemnitz

Mitgliedschaften

• Vorstandsmitglied der Europäischen Technologieplattform für Smart Systems Integration (EPoSS e.V.)
• Vorsitzender des wissenschaftlichen Beirats des IVAM Fachverbunds für Mikrotechnik e.V.
• Mitglied des Lenkungsausschusses der Forschungsfabrik Mikroelektronik Deutschland (FMD)

Lebenslauf

Ausgewählte Publikationen

• Schade A., Melzer M., Zimmermann S., Schwarz T., Stoewe K., Kuhn H. Plastic Waste Recycling-A Chemical Recycling Perspective. (2024) ACS Sustainable Chemistry and Engineering, 12 (33), pp. 12270 - 12288. DOI: 10.1021/acssuschemeng.4c02551. Open Access
• Haase M., Sayyed M.A., Langer J., Reuter D., Kuhn H. About the Data Analysis of Optical Emission Spectra of Reactive Ion Etching Processes-The Method of Spectral Redundancy Reduction. (2024) Plasma, 7 (1), pp. 258 - 283. DOI: 10.3390/plasma7010015. Open Access
• Huber M., Schuster J., Schmidt O.G., Kuhn H., Karnaushenko D. A Mechanical-Electrical Model to Describe the Negative Differential Resistance in Membranotronic Devices (2024) Physica Status Solidi - Rapid Research Letters, 18 (5), art. no. 2300397. DOI: 10.1002/pssr.202300397. Open Access
• Cirulis I., Zschenderlein U., Braun S., Radestock M., Pantou R., Vogel K., Selbmann F., Kurth S., Wunderle B., Kuhn H. Investigation of Aluminum and Gold Flip-Chip Bonding for Quantum Device Integration. (2023) Advancing Microelectronics, 2023 (EMPC), pp. 61 - 65. DOI: 10.4071/001c.94682. Open Access
• Selbmann F., Scherf C., Langenickel J., Roscher F., Wiemer M., Kuhn H., Joseph Y. Impact of Non-Accelerated Aging on the Properties of Parylene C. (2022) Polymers, 14 (23), art. no. 5246. DOI: 10.3390/polym14235246. Open Access
• Stoeckel C., Meinel K., Melzer M., Zukauskaite A., Zimmermann S., Forke R., Hiller K., Kuhn H. Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors. (2022) Micromachines, 13 (4), art. no. 625. DOI: 10.3390/mi13040625. Open Access
• Forke R., Hiller K., Hahn S., Shaporin A., Weidlich S., Bulz D., Kuchler M., Reuter D., Helke C., Wunsch D., Gottfried K., Kuhn H. The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance. (2022) INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. DOI: 10.1109/INER- TIAL53425.2022.9787762
• Cirulis I., Braun S., Vogel K., Roscher F., Wiemer M., Hiller K., Kuhn H. Optimal design configuration for aluminum pillar fabrication towards fine pitch ultrasonic bonding applications. (2022) 2022 IEEE 9th Electronics System-Integration Technology Conference, ESTC 2022 - Proceedings, pp. 6 - 10. DOI: 10.1109/ESTC55720.2022.9939459
• Selbmann F., Baum M., Meinecke C., Wiemer M., Kuhn H., Joseph Y. Low-Temperature Parylene-Based Adhesive Bonding Technology for 150 and 200 mm Wafers for Fully Biocompatible and Highly Reliable Microsystems. (2021) ECS Journal of Solid State Science and Technology, 10 (7), art. no. 074010. DOI: 10.1149/2162-8777/ac12b6. Open Access
• Meinel K., Melzer M., Stoeckel C., Shaporin A., Forke R., Zimmermann S., Hiller K., Otto T., Kuhn H. 2d scanning micromirror with large scan angle and monolithically integrated angle sensors based on piezoelectric thin film aluminum nitride. (2020) Sensors (Switzerland), 20 (22), art. no. 6599, pp. 1 - 23. DOI: 10.3390/s20226599. Open Access