Werkstoffe der Mikrotechnik
Responsibility: Prof. Dr. Bernhard Wunderle, Dr. Uwe Zschenderlein
This course is held in German language under the its original title 'Werkstoffe der Mikrotechnik'.
All documents and latest information are available from the OPAL-course: Werkstoffe der Mikrotechnik (in German language).
Offical course dates for this semester [de]
General Information
- Language: German
- Participants
- mandatory: B_MMFE4 (module B_MM 5.2.4)
- optional required: B_MMEW4 (module B_MM 5.1.6)
- Types of teaching (LVS = contact hours)
- Lecture: 2 LVS in SS
- Lab class: 1 LVS in SS
- Examiniation: oral exam
Objectives
- Knowledge of special materials for use in microtechnology and their properties
- Understanding the fundamental mechanisms that relate micro structure and physical properties
- Knowledge of changes in the material during processing and application
- Ability to select materials for microelectronic application
- Ability to process materials properly
- Ability to recognize and solve material-relevant problems
Content
- Metallic structural materials
- Materials for conductors, resistors and electrical contacts
- Semi conductor materials
- Materials for electrical insulaters and dieletrics
- Magnetic materials
- Monocrystalline, polycrystalline and amorphous substrates, coating materials
- Solders and adhesives, materials for electrically conductive micro joints
- Materials for housings and enclosures
- Resists and materials of the LIGA technology Transducer materials
- Transducer materials
- mechanical - electrical
- thermal - electrical
- magnetic - electrical
- chemical - electrical
