Veröffentlichungen der Arbeitsgruppe
Technische Physik / Physik fester Körper
seit 1994
G. Jungnickel, M. Kühn, S. Deutschmann, F. Richter, U. Stephan, P. Blaudeck,
Th. Frauenheim Structure and Chemical Bonding in High Density Amorphous Carbon
Diam. Rel. Mater. 3 (1994) 1056-1065 [Abstract]
F. Elstner, A. Ehrlich, H. Giegengack, H. Kupfer, F. Richter Structure and properties of titanium nitride thin films deposited at low temperatures
using d.c.
magnetron sputtering
J. Vac. Sci. Technol. 12A (1994) 2, 476-483 [Abtstract]
R. Pintaske, S. Peter, J. Lang, G. Hecht, F. Richter Characterization of the Plasma Enhanced CVD Process using optical Emission
Spectroscopy
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel, 1994, 183-186
N. Schwarzer, J. Schimmel, F. Richter The Contact Problem of Elastic Indentation of Coating/Substrate Systems
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel, 1994, 391 - 394 [Abstract]
N. Schwarzer, J. Schimmel, S. Schmidbauer, J. Hahn The Peeling Test with Initialized Crack Formation
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel, 1994, 486-489
S. Peter, R. Pintaske, B. Reinhold, F. Richter, G. Hecht Determination of Ion Energy Distribution in Glow Discharges
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel, 1994, 187-190
S. Peter, R. Pintaske, F. Richter, G. Hecht Deposition of Si-C-N Films by Metalorganic Plasma CVD
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel, 1994, 191-194
F. Richter, S. Peter, R. Pintaske, G. Hecht In situ Characterization of a Plasma MOCVD Process
Surf. Coat. Technol. 68-69 (1994) 719-723 [Abstract]
S. Peter, F. Richter The Ion Component in a Plasma CVD Process
in: M.C.M. van de Sanden (ed.) Proc. of the 12th European Sectional Conf.
on the Atomic and Molecular Physics
of Ionized Gases
Noordwijkerhout, The Netherlands, August 23-26, 1994 (Europhysics Conference
Abstracts, Vol. 18E), 382
N. Schwarzer, J. Schimmel, F. Richter Adhesion and Elastic Indentation of Coating/Substrate Systems
LE VIDE, les Couches Minces 272, Aug./Sept./Oct. 1994, 246-251 [Abstract]
N. Schwarzer, J. Schimmel, F. Richter The Elastic Indentation of Coating-Substrate Systems with Large Difference in the
Young Moduli
physica status solidi (a) 145 (1994) 379-383 [Abstract]
H. Kupfer, G. Hecht The PVD-Metallization of Plastic Materials: Influence of the Interface structure on the
Thin Fils properties
in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
DGM Informationsgesellschaft Verlag, Oberursel 1994, 97 - 101
H. Kupfer, G. Hecht Vakuumphysikalische Metallisierung von Plastwerkstoffen: Schichthaftung und
funktionelle Eigenschaften
Proceedings des 1. Öffentlichen Statusseminars Systemtechnologien für
Mikro- und
Millimeterwellenschaltungen, Juni 1994, Berlin
VDI/VDE-Technologiezentrum Informationstechnik GmbH
N. Schwarzer, F. Richter Adhesion and Elastic Contact Stresses of Coating/Substrate Systems under Normal and
Tangential Load
Surf. and Coat. Technol. 74-75 (1995) 97-103 [Abstract]
H. Kupfer, F. Richter, S. Friedrich, H.-J. Spies Deposition and Properties of TiN/C Multilayers for Corrosion Protection of
Steel
Surf. Coat. Technol. 74-75 (1995) 333-338 [Abstract]
F. Elstner, H. Kupfer, F. Richter Activation Energy of Point Defect Diffusion in Low-Temperature Deposited
TiN
physica status solidi (a) 147 (1995) 2, 373-377 [Abstract]
F. Richter Cubic boron nitride and carbon nitride films: Recent developments
in K.V. Ravi and J.P. Dismukes (eds.): Diamond Materials IV
(Electrochemical Society Proceedings Volume 95-4), The Electrochemical Society,
Pennington, NJ, 1995, 347-358 [Abstract]
M. Friedrich, J. Hahn, S. Laufer, F. Richter, H.-J. Hinneberg, D.R.T. Zahn The Formation of Cubic Boron Nitride and Silicon Carbide Layers on Silicon
in K.V. Ravi and J.P. Dismukes (eds.): Diamond Materials IV
(Electrochemical Society Proceedings Volume 95-4), The Electrochemical Society,
Pennington, NJ, 1995, 394-402 [Abstract]
A. Ehrlich, M. Kühn, F. Richter, W. Hoyer Complex Characterization of Vacuum Arc Deposited Thin Films
Surf. Coat. Technol. 76-77 (1995) 280-286 [Abstract]
N. Schwarzer, H. Djabella, F. Richter, R. D. Arnell Comparison between analytical and FEM calculations for the contact problem of
spherical indenters on layered materials
Thin Solid Films 270 (1995) 279-282 [Abstract]
N. Schwarzer, M. Whittling, M. Swain, F. Richter The analytical solution of the contact problem of spherical indenters on layered
materials:
application for the investigation of TiN films on silicon
Thin Solid Films 270 (1995) 371-375 [Abstract]
F. Richter, F. Elstner, H. Kupfer, M. Kühn Reactive Layer Deposition using Magnetron Sputtering and Arc Evaporation
Plenarvortrag auf dem 10th International Colloquium on Plasma Processes,
Antibes, France, June 11-14, 1995,
veröffentlicht in LE VIDE, Suppl. 275, Jan./Feb./M¨rz 1995, 209-
217 [Abstract]
R. Pintaske, J. Hahn, N. Kahl, M. Schaller, F. Richter Process Diagnostics during the Deposition of Cubic Boron Nitride
in: J.V. Heberlein, D. W. Ernie, J. T. Roberts (eds.), Proc. of the 12th Int.
Symp. on Plasma Chemistry
(ISPC-12), August 1995, Minneapolis, MN, USA, 2119-2124
S. Peter, F. Richter In situ Characterization of Plasma MOCVD of Ti-C-N Films
in: J.V. Heberlein, D. W. Ernie, J. T. Roberts (eds.), Proc. of the 12th Int.
Symp. on Plasma Chemnistry
(ISPC-12), August, 1995, Minneapolis, MN, 2137-2142
H. Kupfer, K. Rusnak, Th. Welzel, G. Hecht Reactive Magnetron Sputtering of CNx Films with rf Substrate Bias
Voltage
gemeinsamer Proceedingsband der International Conference on Advanced Materials and
Technologies, 13.-16. Juni 1995, Plzen
und des 17th Symposium on Plasma Physics and Technology, 13.-16. Juni
1995, Prague
H. Kupfer Haftfeste Metallisierungen auf Polymergehäsen mit physikalischen
Abscheideverfahren
Proceedings des Workshops Systemtechnologien für Mikro- und
Millimeterwellenschaltungen,
Herausgeber VDI/VDE-Technologiezentrum GmbH, (6 S., 11 Abb. 3 Tab.)
A. P. Knights, A. S. Saleh, P. C. Rice-Evans, S. Bull, F. Elstner, F. Richter, H .
Kupfer Investigations of magnetron-sputtered titanium nitride films using positron annihilation
spectroscopy
J. Phys.: Condens. Matter 8 (1996) 2479-2468 [Abstract]
J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization
and process diagnostics
Diam. Rel. Mater. 5 (1996) 1103-1112 [Abstract]
T. Flügel, P. Schlott, H. Kupfer, F. Richter Herstellung dielektrischer Schichten mittels reaktiver
Magnetronzerstäubung
Kolloquium des Sonderforschungsbereiches 379 mit internationaler Beteiligung,
Chemnitz, 4./5. 11. 1996, Tagungsband S. 79-82
S. Schmidbauer, H. Klose, A. Ehrlich, M. Friedrich, M. Röder, F. Richter Vacuum arc deposition of thin films from a LaB6 cathode
Surf. Coat. Technol. 82 (1996) 247-253 [Abstract]
M. Kühn, R. Pintaske, F. Richter Optical Emission Spectroscopy in Cathodic Arc Deposition
Proc. XVIIth Int. Symp. on Discharges and Electrical Insulation in Vacuum,
Berkeley, CA,
July 21-26, 1996, Vol.II, 932-936 [Abstract]
M. Kühn, C. Spaeth, F. Richter Properties of CNx - Films Prepared by Ion Beam Assisted Filtered
Cathodic Arc Deposition
J.W. Patrick (ed.), Ext. Abstr. Book of the European Carbon Conf. '96, Newcastle upon
Tyne,
UK, July 7-12, 1996, Vol. II, pp. 413 [Abstract]
F. Richter Dünne Schichten aus superharten Materialien
in: Werkstoffe für die Fertigungstechnik, A. de Paoli (Hrsg.), ISBN 3-88355-
233-X,
DGM Informationsgesellschaft Verlag, Oberursel, 1996, 31-38
O. Stenzel, J. Hahn, M. Röder, A. Ehrlich, S. Prause, F. Richter The Optical Constants of Cubic and Hexagonal Boron Nitride Thin Film and Their
Relation to the Bulk Optical Constants
phys. stat. sol. (a) 158 (1996) 1, 281-287 [Abstract]
C. Spaeth, M. Kühn, F. Richter Herstellung von CNx-Schichten mittels ionenstrahlgestützter
Vakuumbogenentladung
Werkstoffwoche Stuttgart, 28.-31. 5. 1996, Tagungsband Vol. 5, ISBN 3-88355-233-X,
DGM Informationsgesellschaft
Verlag, Oberursel, 1996
S. Peter, St. Pfau, J. Radecker, F. Richter Ion Energy Distributions at the Cathode of d.c. and Pulsed d.c. H2-
N2-Ar Glow Discharges
in: P. Lukac, I. Kosinar, J.D. Skalny (eds.), Europhys. Abstracts Vol. 20E, Part A
(Proc. ESCAMPIC 96, Poprad,
Slovakia, August 27-30, 1996), pp.113
M. Ellrodt, M. Kühn Investigation of the Cathode Spot Dynamics in a Vacuum Arc Coating
Process
Contrib. Plasma Phys. 36 (1996) 6, 687-696
G. Hecht, H. Kupfer Ion assisted plasma etching of polymeric substrates and adhesion related surface
modifications
Proceedings auf dem 5th International Symposium on Trends and New
Applications in Thin Films, Colmar, France,
1996, Herausgeber: Societe du Vide und Deutsche Vakuum Gesellschaft, S. 119-
121 [Abstract]
H. Kupfer, G. Hecht, P. Schlott Haftfestes Metallisieren von Polymeroberflächen durch ionengestütztes
Plasmakonditionieren
mo metalloberfläche 50 (1996) 2, 131-134 [Abstract]
R. Pintaske, M. Schaller, Th. Welzel, N. Kahl, J. Hahn, F. Richter Spectroscopic Studies of a Magnetron Sputtering Discharge
Proc. of the 13th European Sectional Conference on Atomic and Molecular
Processes in Ionized Gases
(ESCAMPIG XIII), Proprad, Slovakia, Aug. 1996, Europhysics Conference Abstracts, col.
20E, 245
J. Kourtev, R. Pascova, E. Weißmantel Arc evaporated Ti-N films with reduced macroparticle contamination
Thin Solid Films 287, 1-2 (1996) 202-207 [Abstract]
T. Chudoba Spitzenkorrektur bei Härteprüfkörpern, Möglichkeiten und
Grenzen der Korrektur
Materialprüfung 38 (1996) 9, 380-384 [Abstract]
M. Röder, J. Hahn, U. Falke, S. Schulze, F. Richter, M. Hietschold Electron Microscopic Phase Analysis of BN Thin Films
Mikrochimica Acta, 125 (1997) 283-286 [Abstract]
F. Richter, G. Krannich, J. Hahn, R. Pintaske, M. Friedrich, S. Schmidbauer, D.R.T.
Zahn Utilization of the Cathodic Arc Evaporation for the Deposition of Boron Nitride Thin
Films
Surf. Coat. Technol. 90 (1997) 178-183 [Abstract]
T. Werninghaus, M. Friedrich, J. Hahn, F. Richter, D.R.T. Zahn Raman Spectroscopy Investigations of Cubic Boron Nitride Single Crystals and Layers
on Si(100)
Diam. Rel. Mater. 6 (1997) 612-616 [Abstract]
R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. Richter Process Diagnostics during the Deposition of Cubic Boron Nitride
Surf. Coat. Technol. 90 (1997) 3, 275-284 [Abstract]
T. Werninghaus, J. Hahn, F. Richter, D.R.T. Zahn Raman Spectroscopy of Size Effects in Cubic Boron Nitride
Appl. Phys. Lett. 70 (1997) 8, 958-960 [Abstract]
G. Krannich, F. Richter, J. Hahn, R. Pintaske, V.B. Filippov, Y. Paderno Formation of Cubic Boron Nitride Thin Films by Reactive Cathodic Arc
Evaporation
Diam. Rel. Mater. 6 (1997) 1005-1009 [Abstract]
J. Hahn, F. Richter, R. Pintaske, M. Röder, E. Schneider, Th. Welzel Formation of c-BN thin films under reduced ion impact
Surf. Coat. Technol. 92 (1997) 129-134 [Abstract]
M. Kühn, F. Richter Characteristics in Reactive Arc Evaporation
Surf. Coat. Technol. 89(1997) 16-23 [Abstract]
E. Franke, H. Neumann, M. Schubert, T.E. Tiwald, J.A. Woollam, J. Hahn Infrared-Ellipsometry on Hexagonal and Cubic Boron Nitride Thin Films
Appl. Phys. Lett. 70 (1997) 13, 1668-1670 [Abstract]
M. Friedrich, Th. Welzel, R. Rochotzki, H. Kupfer, D.R.T. Zahn Optical Properties of Nitrogen-Rich Carbon Films Deposited by dc Magnetron
Sputtering
Diam. Rel. Mater. 6 (1997) 33-40 [Abstract]
M. Schubert, B. Rheinländer, E. Franke, H. Neumann, J. Hahn, M. Röder,
F. Richter Anisotropy of Boron Nitride Thin Films Reflectivity Spectra by Generalized
Ellipsometry
Appl. Phys. Lett. 70 (1997) 14, 1819-1821 [Abstract]
C. Spaeth, M. Kühn, U. Kreissig, F. Richter Preparation of CNx - Films by Ion Beam Assisted Filtered Cathodic Arc
Deposition
Diam. Rel. Mater. 6 (1997) 626-630 [Abstract]
M. Kühn, R. Pintaske, F. Richter Optical Emission Spectroscopy in Cathodic Arc Deposition
IEEE Trans. Plasma Sci. 25 (1997) 694-699 [Abstract]
E. Franke, M. Schubert, H. Neumann, T.E. Tiwald, D.W. Thompson, J.A. Woollam, J.
Hahn, F. Richter Phase and Microstructure Investigations of Boron Nitride Thin Films by Spectroscopic
Ellipsometry in the Visible and
Infrared Spectral Range
J. Appl. Phys. 82 (1997) 6, 2906-2911 [Abstract]
M. Schubert, B. Rheinländer, E. Franke, H. Neumann, T.E. Tiwald, J.A.
Woollam, J. Hahn, F. Richter Infrared Optical Properties of Mixed-phase Thin Films by Spectroscopic Ellipsometry
using Boron Nitride as an Example
Phys. Rev. B 56 (1997) 20, 13306-13313 [Abstract]
M. Kühn, C. Spaeth, R. Pintaske, S. Peter, F. Richter, A. Anders The Effect of Additional Ion/Plasma Assistance in CNx-Film
Deposition Based on a Filtered Cathodic Arc
Thin Solid Films 311 (1997) 151-156 [Abstract]
J. K. Walters, M. Kühn, C. Spaeth, H. Fischer, F. Richter, R. J. Newport Neutron Diffraction Studies of Amorphous CNx Materials
Phys. Rev. B 56 (1997) 14315 [Abstract]
S. Grigull, W. Jacob, D. Henke, A. Mücklich, C. Spaeth, L.
Sümmchen On the presence of molecular nitrogen in nitrogen-implanted amorphous
carbon
Appl. Phys. Lett. 70 (1997) 1387-1389 [Abstract]
A. Weber, U. Hoffmann, T. Löhken, C.-P. Klages, M. Kühn C. Spaeth, F.
Richter Carbon Based Field Emitters for Field Emission Displays
SID Int. Symp., Boston, May 28-30, 1997, Digest of Technical Papers (1997) 591-
594 [Abstract]
K.C. Tang, A. Faulkner, N. Schwarzer, R.D. Arnell, F. Richter Comparison between an elastic-perfectly Plastic F.E.M. and a purely elastic analytical
model for
a spherical indenter on a layered substrate
Thin Solid Films 300 (1997) 177-188 [Abstract]
J. Kourtev, R. Pascova, E. Weißmantel A modified method for arc deposition of Ti-N thin films
Vacuum 48 (1997) 1, 7-12 [Abstract]
U. Falke, A. Weber, M. Kühn, C. Spaeth, M. Hietschold EXELFS-Investigations of Carbon and Carbon Nitride Films
European J. of Cell Biology 74 (1997) 45-51 [Abstract]
T. Chudoba Registrierende Härtemessung, Ein neues Modell für die Bewertung von
Ergebnissen
Materialprüfung 39 (1997) 9, 357-361 [Abstract]
A.K. Jamting, J.M. Bell, M.V. Swain, N. Schwarzer Investigation of the Elastic Modulus of Thin Films using simple Biaxial Bending
techniques
Thin Solid Films 308 - 309 (1997) 304 - 309 [Abstract]
H. Kupfer Plasmagestützte Verfahren für eine haftfeste Metallisierung von
Gehäusekomponenten
In: Poster und Proc. zum Statusseminar Oberflächen- und Schichttechnologien,
Würzburg, 9.-11. Juli 1997
VDI Technologiezentrum Physikalische Technologien Düsseldorf (Hrsg.), (i.A. und
mit Unterstützung des BMBF)
Bd. 2, S. 295
R. Pintaske, Th. Welzel, M. Schaller, N. Kahl, J. Hahn, F. Richter Spectroscopic Studies of a Magnetron Sputtering Discharge for Boron Nitride
Deposition
Europhys. Conf. Abstr. 20E (1996), Surf. Coat. Technol. 99 (1998) 3, 266-280 [Abstract]
F. Richter, R. Pintaske, H. Hahn, Th. Welzel Deposition of Cubic Boron Nitride: Process Diagnostics and Film
Characterization
in A. Kumar, Y.-W. Chang, R.W.J. Chia (eds.): Hard Coatings Based on Borides,
Carbides and Nitrides: Synthesis,
Characterization and Applications, The Minerals, Metals and Materials Society,
Warrendale, PA, USA, 1998, 153-168 [Abstract]
A. Anders, M. Kühn Characterization of a low-energy constricted-plasma source
Rev. Sci. Instrum. 69 (1998) 3, 1340-1343 [Abstract]
U. Hoffmann, A. Weber, T. Löhken, C.-P. Klages, C. Spaeth, F. Richter Electron Field Emission of Amorphous Carbon Films
Diam. Rel. Mater. 7 (1998) 682-686 [Abstract]
M. Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, J.
Hahn Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic
ellipsometry
Thin Solid Films 313-314 (1998) 692-696
C. Spaeth, F. Richter, S. Grigull, U. Kreissig Conversion algorithm for ERDA multielement spectra and its application to thin-film
problems
Nucl. Instrum. Meth. B 140 (1998) 243-250 [Abstract]
J. K. Walters, M. Kühn, C. Spaeth, E. Dooryhee and R. J. Newport X-ray diffraction studies of the effects of N incorporation in amorphous CN x
materials
J. Appl. Phys. 83 (1998) 3529 [Abstract]
Th. Welzel, R. Pintaske, F. Richter A LIF and OES investigation on the role of metastable argon atoms on the excitation
conditions in an Ar-N2
r.f. magnetron discharge
in: D. Riley, C. M. O. Mahony, W. G. Graham (eds.), Europhysics Conference
Abstracts 22H(1998) 346
N. Schwarzer, F. Richter A Simple Biaxial Bending Technique for Coated Materials - Theory
and Application
in: H. Oettel, S. Hogmark, J. v. Stebut (eds.), Mechanical Behaviour of PVD Coated
Materials, Freiberg 1998, 91-100 [Abstract][Abstract + Figures]
S. Grigull, W. Jacob, D. Henke, C. Spaeth, L. Sümmchen, W. Sigle Transport and structural modification during nitrogen implantation of hard amorphous
carbon films
J. Appl. Phys. 83 (1998) 10, 5185-5194 [Abstract]
S. Intarasiri, L. D. Yu, T. Chudoba, H. Reuther, U. Rammelt, E. Richter Hardness, tribological behaviour and corrosion performance at the very near surface of
nitrogen implanted
X5CrNi18.10 steel
Surf. Coat. Technol. 88 (1998) 305-310 [Abstract]
F. Richter, S. Peter, V. B. Filippov, G. Flemming, M. Kühn Characteristics of the Cathodic Arc Discharge with a Hot Boron Cathode
Proc. XVIIth ISDEIV, Eindhoven, August 17-21, 1998, IEEE Catalog number
98CH36073, Vol. 2, 668-671 [Abstract]
C. Spaeth, M. Kühn, F. Richter, U. Falke, M. Hietschold, R. Kilper, U.
Kreissig A comparative study of elastic recoil detection (ERDA), electron energy loss
spectroscopy (EELS) and X-ray photoelectron
spectroscopy (XPS) for structural analysis of amorphous carbon nitride films
Diam. Rel. Mater. 7 (1998) 1727-1733 [Abstract]
F. Richter, G. Krannich, M. Kühn, S. Peter, Chr. Spaeth Cathodic Arc Evaporation - A versatile tool for Thin Film Deposition
in: H. Hoffmann (ed.), Trends and New Application in Thin Films
ISBN 0-87849-815x, Materials Science Forum Vols. 287 - 288,
Trans Tech Publications Ltd., Zürich 1998, pp. 193 - 198 [Abstract]
H. Kupfer, R. Ostwald Physical and chemical surface preconditioning and metallization of thermoplastic
packaging for electronic components
in: K.L. Mittal (ed.), Metallized Plastic 5+6: Fundamental and Applied
Aspects
Utrecht 1998, pp. 85 - 96 [Abstract]
N. Schwarzer, F. Richter, B. Michel Penny shaped interface crack under uniform pressure ans shear loading
in: S.N. Atluri, P.E. O'Donoghue (eds.): Modelling and Simulation based
Engineering Vol. II
Tech Science Press, Atlanta, USA 1998
F. Richter, G. Flemming, M. Kühn, S. Peter, H. Wagnery Characterization of the arc evaporation of a hot boron cathode
Surf. Coat. Technol. 112 (1999) 43-47 [Abstract]
C. Spaeth, M. Kühn, T. Chudoba, F. Richter Mechanical properties of carbon nitride thin films prepared by ion beam assisted
filtered cathodic
vacuum arc deposition
Surf. Coat. Technol. 112 (1999) 140-145 [Abstract]
St. Collard, H. Kupfer, G. Hecht, W. Hoyer, H. Moussaoui The reactive magnetron deposition of CrxOy films: first
results of property investigation
Surf. Coat. Technol. 112 (1999) 181 - 184 [Abstract]
H. Kupfer, G. Hecht, R. Ostwald Ecologically important metallizationprocess for high performance polymers
Surf. Coat. Technol 112 (1999) 379 - 383 [Abstract]
N. Schwarzer, F. Richter, G. Hecht The elastic field in a coatet half-space under Hertzian pressure distribution
Surf. Coat. Technol. 114 (1999) 292 - 304 [Abstract]
I. Dani, S. Peter, F. Richter ECR - Microwave Diagnostics during the growth of SiCN.H films
in: H. Hrabovsky, M. Konrad, V. Kopecky (eds.), Proc. 14th International
Symposium on Plasma Chemistry (ISPC-14)
2.-6. August 1999, Prag, Vol. V, 1275 - 1280. [Abstract]
St. Collard, H. Kupfer, W. Hoyer, G. Hecht Growth of nitrogen stabilized cubic ZrO2 phase by reactive magnetron
sputtering using two reactive gases
Vacuum 55 (1999)153 - 157 [Abstract]
H. Kupfer, F. Richter, P. Schlott, A. Duparre, S. Gliech Light scattering and atomic force microscopic investigation on magnetron sputtered
Oxide Single Layers and Multilayers
for micromechanical Laser mirrors
in: C. Amra, A. Macleaod (eds.), Advanced in Optical Interference Coatings, ISBN
0-8194-3212-1, Proc. of Conf. on
Advances in Optical Interference Coatings, Berlin, 25-27 May 1999, SPIE Vol. 3738, 294-
400 [Abstract]
F. Richter, S. Peter, V.B. Filippov, G. Flemming, M. Kühn Charactristics of the Cathodic Arc Discharge with a hot boron cathode
IEEE Trans. Plasma Sci. 27 (1999) 4, 1079
T. Chudoba, N. Schwarzer, F. Richter New possibilities of mechanicalsurface characterization with spherical indenters by
comparison of experimental and
theoretical results
Thin Soluid Films 355 - 356 (1999) 284-289 [Abstract]
N. Schwarzer, T. Chudoba, D. Billep, F. Richter Investigation of Coating Substrate Compounds using inclined sperical
indentation
Surf. Coat. Technol. 116-119 (1999) 244 - 252 [Abstract]
T. Chudoba Fortschritte bei der Bewertung dünner Randschichten mit Hilfe von
registrierenden Härtemessungen
Freiberger Forschungshefte Bd. 297, Werkstoffwissenschaft,
Werkstofffertigungstechnologie, 1999, S. 81-92
ISBN: 3-86012-094-8
H. Kupfer, Th. Flügel, F. Richter, P. Schlott Intrinsic stress in dielectric thin films for micromechanical components
Surf. Coat. Technol. (1999) 116-119 [Abstract]
C. Spaeth, U. Kreissig, F. Richter Sputtering and chemical erosion during CNx synthesis by ion beam
assisted filtered cathodic arc
evaporation
Surf. Coat. Technol (1999) 284-289 [Abstract]
P. Schlott, F. Richter, H. Kupfer Abscheidung hochreflektierender Vergütungsschichten für
mikromechanische Komponenten
Technische Universität Chemnitz, Zentrum für Mikrotechnologien (Veranst.),
Kolloquium des Sonderforschungsbereiches
379 Mikromechanische Sensor- und Aktorarrays 12. Oktober 1999, S. 43-47,
(im Rahmen der 4. Chemnitzer Fachtagung Mikrosystemtechnik) [Abstract]
V. Linss, O. Stenzel, D.R.T. Zahn Correlation between linear optical constants and raman enhancement in phthalocyanine
thin solid films with incorporated
silver clusters
J. Raman Spectrosc. 30 (1999) 531-536 [Abstract]
T. Cudoba, N. Schwarzer, F. Richter Determination of elastic properties of thin films by indentation measurements with a
spherical indenter
Surf. Coat. Technol. 127 (2000)9-17 [Abstract]
S. Bhattacharyya, M. Hietschold, F. Richter Investigation on the change in structure of tetrahedral amorphous carbon by a large
amount of nitrogen
incorporation
Diam. Rel. Mater. 9(2000) 544-547 [Abstract]
S. Bhattacharyya, O. Madel, S. Schulze, P. Hässler, M. Hietschold, F.
Richter Structure of nitrogenated carbon films by electron diffraction and imaging
Phys. Rev. B61 (2000) 6, 3927-3935 [Abstract]
K. Bewilogua, F. Richter Vapor phase depostion of cubic boron nitride films
In: R. Riedel (ed.)Handbook of Ceramic Hard Materials, Whiley-VCH, Weinheim,
2000, pp. 420-445
F. Richter Thermophysics of superhard thin film materials
Plenary Lecture, 15thEuropean Conf. on Thermophysical Properties,
Würzburg, Germany,
5.-9.September 1999 [Abstract]
S. Peter, F. Richter, R. Tabersky, U. König Optical emission spectroscopy of a PCVD process used for the deposition of TIN on
cemented carbides
Thin Solid Films 377-378 (2000) 430-435 [Abstract]
O. Stenzel, H. Kupfer, Th. Pfeifer, A. Lebedev, S. Schulze Probing ultra-thin amorphous carbon films by means of nanometricsilver
islands
Optical Materials 15 (2000) 159-165 [Abstract]
N. Schwarzer Arbitrary load distribution on a layered half space
ASME Journal of Tribologz 122 (2000) 4, 672-681 [Abstract]
N. Schwarzer Coating design due to analytical modelling of mechanical contact problems on multilayer
systems
Surf. Coat. Technol. 133-134 (2000), 397-402 [Abstract]
T. Chudoba, N. Schwarzer, F. Richter, U. Beck Determination of mechanical film properties of a bilayer system due to elastic
intendation measurements
with a spherical indenter
Thin Solid Films 377-378 (2000) 366-372 [Abstract]
N. Schwarzer, T. Heuer, T. Chudoba Application of modern approaches in mechanics to adhesion problems in
dentistry
Proc. 5th European Adhesion Conf. (EURADH 2000), Lyon, France, Sept.
2000, Edition SFV, 19 rue du Renard,
75004 Paris, 377-382. [Abstract]
N. Schwarzer, F. Richter Adhesion modelling in layered materials using analytical solutions of crack
problems
Proc. 5th European Adhesion Conf. (EURADH 2000), Lyon, France, Sept.
2000, Edition SFV, 19 rue du Renard,
75004 Paris, 586-591.
K. Krämer, T. Chudoba, I. Hermann Some remarks about indentation tests with spherical indenters
Proc. of 3rd Intern. Conf. an Poster Exhibition Micro Materials 2000, 17.-
19.4.2000 Berlin, ISBN 3-932434-15-3,
pp. 722-725
H. Kupfer, G. K. Wolf Plasma and ion beam assisted metallization of polymers and their application
Nucl. Instr. and Meth. in Phys. Res. B, 166-167 (2000) 722-731 [Abstract]
S. Bhattacharyya, M. Lübbe, F. Richter Near edge x-ray absorbtion fine structure of thermally annealed amorphous nitrogenated
carbon films
J. App. Phys. 88 (2000) 10, 1-7 [Abstract]
D.H. Evans, S. Evans, A. Burgess, J.J. Wells, E. Weissmantel, F. Richter c-BN Surfaces: Annealing and Alkali Metal Adsorption
Proc. DeBeer Conference 2000, pp. 8.1-8.4
L. Bardos, H. Barankova, Th. Welzel, I. Dani, S. Peter, F. Richter Comparison between the radio frequency hollow cathode to the microwave antenna
discharge for plasma processing
J. Appl. Phys. 90 (2001) 4, 1703-1709 [Abstract]
F. Richter, H. Kupfer, P. Schlott, T. Gessner, C. Kaufmann Optical properties and mechanical stress in
SiO2/Nb2O5 multilayers
Thin Solid Films 389 (2001) 1-2. 278-283 [Abstract]
F. Richter, T. Chudoba, N. Schwarzer, G. Hecht Neue Möglichkeiten zur Charakterisierung dünner Schichten mit
Indentermethoden -
Novel possibilities for thin film characterisation using indentationmethods
Materialwissenschaften und Werkstofftechnik 32 (2001) 621-627 [Abstract]
S. Bhattacharyya, K. Walzer, M. Hietschold, F. Richter Nitrogen doping of tetrahedral amorphous carbon films: Scanning tunneling spectroscopy
J. Appl. Phys. 89 (2001) 3, 1619-1624 [Abstract]
S. Bhattacharyya, C. Spaeth, F. Richter Valence band spectra of nitrogen incorporated amorphous carbon films
J. Appl. Phys. 89 (2001) 4, 2414-2421 [Abstract]
F. Richter Formation of optical thin film by ion and plasma-assisted techniques
Contrib. Plasma Phys. 61 (2001) 6, 549-561 [Abstract]
S. Peter, H. Giegengack, F. Richter, R. Tabersky, U. König An analysis of the TiN plasmachemical vapor deposition process based on optical emission spectroscopy measurements
Thin Solid Films 398-399 (2001) 343-348 [Abstract]
D.A. Evans, S. Evans, J.W. Wells, E. Weissmantel, F. Richter Metal Interface with c-BN
DeBeers Diamond Conference Abstracts 2001, pp. 37.1-37.4
S. Bhattacharyya, F. Richter, U. Starke H. Griessmann, A. Heinrich Thermoelectric power of nitrogen-incorporated tetrahedral amorphous-carbon films
Appl. Phys. Lett. 79 (2001) 25, 4157-4159 [Abstract]
N. Schwarzer, I. Hermann, T. Chudoba, F. Richter Contact modelling in the vicinity of an edge
Surf. Coat. Technol. 146-147 (2001) 371-377 [Abstract]
T. Chudoba, F. Richter Investigation of Creep Behaviour under Load During Indentation Experiments and its
Influence on Hardness and Modulus Results
Surf. Coat. Technol. 148 (2001) 191-198
T. Chudoba, F. Richter Neue Möglichkeiten der mechanischen Oberflächenprüfung mit Indentermethoden
HTM Härtereitechnische Mitteilungen 56 (2001) 6, 403-409
S. Bhattacharyya, M. Lübbe, P.R. Bressler, D.R.T. Zahn, F. Richter Structure of nitrogenated amorphous carbon films from NEXAFS
Diam. Rel. Mater. 11 (2002) 8-15 [Abstract]
T. Chudoba, N. Schwarzer, F. Richter Steps towards a mechanical modelling of layered systems
Surf. Coat. Technol. 154 (2002) 140-151 [Abstract]
E. Weissmantel, Th. Pfeifer, F. Richter Electron microscopic analysis of cubic boron nitride films deposited on fused silica
Thin Solid Films 408 (2002) 1-5 [Abstract]