Characterization of the arc evaporation of a hot boron cathode
F. Richter, M. Kühn, S. Peter, H. Wagner
Technische Universität Chemnitz, Institut für Physik
D - 09107 Chemnitz
Germany
G. Flemming
Technische Universität Chemnitz, Audiovisuelles Zentrum
D - 09107 Chemnitz
Germany
Cathodic arc discharge with a hot boron cathode has been characterized by high-speed photography,
mass spectroscopy and
ion energy analysis. During operation, the cathode surface exhibits an extended molten area
in which moving cathode spots could
be detected by the high-speed cine-camera. This leads to the conclusion that the hot boron cathode
exhibits a mixed arc mode
including features both of thermionic and spot modes. The charge state distribution, as well as the
kinetic energy of the boron
ions emerging from the cathode, were measured and conclusions have been drawn with respect to the
underlying mechansims.
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