HLPH - Publication: ID[1091] [ print ]  -  [ close ]
Author(s):
P. Meszmer, K. Hiller, S. Hartmann, A. Shaporin, D. May, R.D. Rodriguez, J. Arnold, G. Schondelmaier, J. Mehner, D.R.T. Zahn, B. Wunderle

Source:
Microsyst. Technol. (2014), DOI 10.1007/s00542-014-2143-6

Title:
Numerical Characterization and Experimental Verfication of an in-plane MEMS-actuator with Thin-Film Aluminium Heater

Abstract:
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Type of Publication:
Refereed Journal

Year:
2014