- Author(s):
- P. Meszmer, K. Hiller, S. Hartmann, A. Shaporin, D. May, R.D. Rodriguez, J. Arnold, G. Schondelmaier, J. Mehner, D.R.T. Zahn, B. Wunderle
Source:- Microsyst. Technol. (2014), DOI 10.1007/s00542-014-2143-6
Title:- Numerical Characterization and Experimental Verfication of an in-plane MEMS-actuator with Thin-Film Aluminium Heater
Abstract:- ---
Type of Publication:- Refereed Journal
Year:- 2014
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