- Author(s):
- S. Knohl, A. Roy, R. Lungwitz, S. Spange, T. Mäder, D. Nestler, B. Wielage, S. Schulze, M. Hietschold, H. Wulff, C. Helm, F. Seidel, D.R.T. Zahn, W. Goedel
Source:- ACS Applied Materials & Interfaces, (2013) 6161
Title:- Non-aqueous Atomic Layer Deposition (ALD) of Aluminum Phosphate
Abstract:- ---
Type of Publication:- Refereed Journal
Year:- 2013
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