HLPH - Publication: ID[1053] [ print ]  -  [ close ]
Author(s):
S. Knohl, A. Roy, R. Lungwitz, S. Spange, T. Mäder, D. Nestler, B. Wielage, S. Schulze, M. Hietschold, H. Wulff, C. Helm, F. Seidel, D.R.T. Zahn, W. Goedel

Source:
ACS Applied Materials & Interfaces, (2013) 6161

Title:
Non-aqueous Atomic Layer Deposition (ALD) of Aluminum Phosphate

Abstract:
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Type of Publication:
Refereed Journal

Year:
2013