Inductive heating based on VHF-ISM radio band frequencies as technology platform for efficient heating of metallic micro-scaled bonding layers in MEMS packaging - Hofmann, Christian; Kroll, Martin; Panhale, Sushant; Wiemer, Maik; Kunke, Andreas; Hiller, Karla; Kuhn, Harald (2023 IEEE International Magnetic Conference - Short Papers (INTERMAG Short Papers), Sendai, Japan, 15 - 19. May 2023, pp. 1-2. - IEEE, 2023, 2023)