Inductive Heating Based on VHF-ISM Radio Band Frequencies as Technology Platform for Efficient Heating of Metallic Micro-Scaled Bonding Layers in MEMS Packaging - Hofmann, Christian*; Kroll, Martin; Panhale, Sushant; Wiemer, Maik; Kunke, Andreas; Hiller, Karla; Kuhn, Harald (In: IEEE Transactions on Magnetics (November 2023), Article Sequence Number: 2800905. - Cairo University Giza, Egypt : IEEE. - 59. 2023, 11, S. 1 - 5, 2023)