Professorship Micromanufacturing Technology
Equipment
Professorship Micromanufacturing Technology 

Equipment of the Professorship Micromanufacturing Technology

Portrait: Michael Leibnitz
Michael Leibnitz
Acting Head of Technology and Operations

Machinery

KERN Pyramid Nano

KERN Pyramid Nano

High Precision Machining Centre

Technical specifications:
  • Hydrostatic axes and guideways
  • 5-axis simultaneous machining
  • Position uncertainty: ±0.5 µm
  • Additional spindle for grinding and micromachining up to 160,000 min-1
  • Systems for automatic tool and workpiece measuring
  • Cooling lubrication with emulsion or MQL
  • Suction system for graphite machining
Application:
  • High precision machining and micromanufacturing of metallic and non-metallic materials
  • Generation of functional surfaces
  • Grinding

SPINNER PD 32

SPINNER PD 32

Precision-Turning Machine

Technical specifications:
  • Main and opposed spindle
  • Turret with operated tools
  • Process- integrated measurement system for cutting force and power detection
  • Cooling lubrication with emulsion
Application:
  • Precision-processing of special materials and hardened steels
  • Productions of side elements (e. g. boreholes, threads, spanner flats, ...)

Kugler Microgantry® GU

Kugler Microgantry GU

Microprocessing Machine

Technical specifications:
  • 4 CNC-axes
  • High-frequency spindle with max. 200,000 rpm
  • Position exactness: ±0.3 µm
  • Minimal oil machining system
  • Integrated Nd:YVO4-laser (wavelength of 532 nm via frequency doubling)
Application:
  • Microprocessing (i.e. drilling, milling, sawing) und microstructuring (i.e. laser-beam removing)
  • Machining of non-ferrous metals

Zimmer & Kreim genius700

Zimmer & Kreim genius700

EDM Die-sinking Machine

Technical specifications:
  • 4-axes simultaneous machining
  • Positioning uncertainty: ±1 µm / 0.001 °
  • Max. workpiece weight: 700kg
  • Max. electrode weight: 50 kg static / 50 kg with rotation
  • Rotation spindle with 1000 rpm and high-pressure flushing device for EDM-drilling with high aspect ratio
  • Generator with 52 A working current
  • Generator modules for special materials and polishing processes
Application:
  • Precision- and micro-machining of metal, conductive ceramics and diamond
  • Drilling of bores with min. ⌀ 0.2 mm

Sarix SX-100

Sarix SX-100

Precision Microerosion Machine

Technical specifications:
  • Workspace: 510 mm x 270 mm
  • Travel range X-, Y-, Z-direction: 250 mm, 150 mm, 150 mm
  • Travel precision: ±2 µm at 50 mm travel range
Application:
  • Micromachining (erode) of Metal
  • Micromachining (erode) of ceramics
  • Machining of Microholes down to 50 µm in diameter

Prototype ECM system

Prototyp ECM-Anlage

Modular Self-construction for Jet-ECM and PECM

Technical specifications:
  • Triaxial-system in portal construction-manner
  • Maximum voltage: 56 V
  • Maximum current: 10 A
  • Direct current and pulsed direct current
  • Maximum electrolyte pressure: 525 bar
  • Electrolytes: sodium chloride and sodium nitrate
Application:
  • Equipment for electro-chemical microprocessing

The prototype has been pursued in cooperation with the Fraunhofer-Institute for Machine Tools and Forming Technology IWU.

Prototype Jet-PeP system

Prototyp Jet-PeP-Anlage

Modular set-up for Jet-PeP

Technical specifications:
  • 4-axes gantry system
  • Maximum voltage: 600 V
  • Maximum current: 8.5 A
  • Direct current
  • Maximum electrolyte pressure: 5 bar
  • Ammonium sulphate-based electrolytes
Application:
  • Localized plasma-electrolytic polishing

P.FÜ.MA 200kN

P.FÜ.MA 200kN

Precision Joining Machine

Technical specifications:
  • Working chamber: 500 x 500 mm2
  • Press stroke: 400 mm
  • Press capacity: Fmax = 200 kN
  • Spindle velocity: vmax = 3000 mm/min
  • AC servo-drive
Application:
  • Development of procedures and tool systems for plane microstructuring

Branson Ultraweld L20

Branson Ultraweld L20

Ultrasonic Joining System

Technical specifications:
  • Operation frequency: 20 kHz
  • Power output: Pmax = 4 kW
  • Maximum joining area Fügefläche: Amax = 125 mm²
  • Modular tooling system
  • Automatic frequency control
  • Consistency of the amplitude and load compensation
Application:
  • Development of methods for joining of dissimilar compounds (e.g. metal – CFRP)
  • Development of modular and microstructured ultrasonic joining tools and joining surfaces

Ultimaker 3

Ultimaker 3

Dual Extruder FDM Drucker

Technical specifications:
  • Printdimensions: 215 mm x 215 mm x 200 mm
  • Printable materials: PLA, ABS, PVA, ...
  • Height resolution: 20 µm
  • Nozzlediameter: 0,4 mm
Application:
  • Rapid Prototyping
  • Practical courses for additive manufacturing

Thermal fuel cell test bench

Test bench for fuel cell cooling

Self-construction for characterization of fuel cell cooling

Technical specifications:
  • Temperature measurement by means of thermocouple
  • Regulated test power up to 4 W/cm2
  • System pressure up to 1 bar
  • Volume flow up to 2.8 l/min
  • Different cooling media possible
Application:
  • Optical in-situ characterization of the coolant flow
  • UInvestigation of heat transfer and flow behavior in bipolar plates and stack assemblies

Measurement equipment

Workstation for measurement of roughness, shape and position

LD 120

Roughness measurement system Mahr LD 120

Technical specifications:
  • Touching Distance: 0.1 - 120 mm
  • Measurement range: 10 mm
  • Resolution in z-direction: 2 nm
  • Rz-residual values:  35 nm
  • Measurement point distance in x-direction: 0.05 - 1 µm
  • CNC-y-table (smalest increment: 0.5 µm)
Application:
  • Roughness measurements of micro-sized components
  • Measurement of topography of surfaces for evaluation of functional behaviour
  • Measurement of tools for turning and milling machines
MMQ 200

Form and position measuring device Mahr MMQ 200

Technical specifications:
  • High-precision roundness measurement axis (C)
  • Motorized vertical measurement axis (Z)
  • Motorized horizontal positioning (X)
  • Manual centering and tilting table
Application:
  • Determination of:
    • Cylindrical Shape
    • Form and position tolerances according DIN ISO 1101
    • Roundness
    • Flatness
    • Concentricity and other parameters
  • Roughness measurement axially and in the direction of rotation (on rotationally symmetrical components)
  • Evaluation of twist parameters

Dataphysics OCA 200

Dataphysics OCA 200

Contact Angle Measuring and Drop Contour Analysis System

Technical specifications:
  • high-performance camera system with 10-fold zoom lens
  • engine-powered sample table
  • electronic direct dosing system
  • nanoliter dosing system
  • Peltier temperature control unit -30 °C ...160 °C
Application:
  • measurement of the static and dynamic contact angle
  • temperature-dependent evaluation of the wettability
  • evaluation of surface energy, suface tension and interfacial tension

DMG Microset VIO 20/50 linear

DMG Microset VIO 20/50 linear

Tool Pre-setting System

Technical specifications:
  • Precision spindle
  • Translative axes with linear drives and glass scales
  • Incident light and transmitted light
  • Decond camera for measuring the center height (with incident light)
  • Maximum tool diameter of 420 mm, maximum length of 500 mm
  • Substantial measurement software
Application:
  • Measurement of tools for turning and milling machines
  • Evaluation of tool abrasion

Bruker alicona µCMM

Bruker alicona µCMM

Optical coordinate measuring machine

Technical specifications:
  • Non-contact measurements using shape-from-defocus method
  • Automated change of objectives
  • Finest lateral topographic resolution about 0.6 µm, finest vertical resolution ca. 10 nm
  • Granite machine bed and gantry with air-bearing axes and linear drives
  • Working space for three-axis applications about (310 mm)³
  • Integrated dividing head with motorised rotary and swivel axis
  • Comprehensive software for realisation and analysis of measurements
Application:
  • Examination of the geometry of cutting tools including cutting edges and wear
  • Capture of surface topography
  • Analysis of the geometry of microstructures
  • Determination of deviations in dimension, form, location, and run-out
Signet Land Sachsen
This instrument is co-financed by tax funds on the basis of the budget decided by the Saxon State Parliament.

Keyence VK-9700

Keyence VK-9700

3D-Laserscanning-Microscope

Technical specifications:
  • Violet laser diode and halogen lamp
  • Maximal z-axis resolution of 1nm
  • Objectives with the following magnification rates: 10x, 20x, 50x, 100x, 150x
  • Automatic measurements through engine-powered microscope stage
Application:
  • Optical surface detection
  • Measurement of microstructures
  • Measurement of tools for turning and milling machines
  • Evaluation of the tool abrasion

Keyence VHX-100

Keyence VHX-100

3D-Microscope

Technical specifications:
  • 18 million pixel resolution
  • Three-dimensional display function
Application:
  • Valuation of tool wear
  • Evaluation of surface features

Nikon MM-400

Nikon MM-400

Microscope for Measurement

Technical specifications:
  • Objectives with magnifying of 2.5x, 10x, 20x, 50x, 100x
  • Micrometer-positioning table (150 mm x 100 mm)
Application:
  • Measurement of microstructures
  • Valuation of tool wear
  • Measurement of microforming tools
  • Measurement of turning- and milling tools
  • Evaluation of surface features

Polytec Modular Laser-Vibrometersystem

OFV-5000 Controller

OFV-5000 Controller

Technical specifications:
  • Digital Broadband-decoder VD-09:
    • Broadband: 0 – 2.5 MHz
    • Maximum Speed: 10 m/s
    • Resolution: 0.02 µm/s
  • Digital broadband-decoder DD900:
    • Resolution of travel: 15 pm
    • Frequency: 0 – 2.5 MHz
Application:
  • Contactless mesure of vibration
  • Mesurement of minimal length movements
OFV-505 Vibrometer-Einpunkt-Messkopf

OFV-505 Vibrometer-Mesurement Unit

Technical specifications:
  • He-Ne Laser with wavelengh of 633 nm
  • Working distance > 250 mm to ca. 5 m

Sartorius ME36S

Sartorius ME36S

Micro Scale

Technical specifications:
  • Weighing range: 31 g
  • Reading precision: 0.001 mg
  • Reproducibility: ≤ 2 µg
  • Fully automated calibration and adjustment function
Application:
  • Determination of the removed mass after electrochemical machining processes via differential weighing

Sartorius ME614S-0CE

Sartorius ME614S-0CE

Analytical Scale

Technical specifications:
  • Weighing range: 10 mg – 610 g
  • Reading precision: 0.1 mg
  • Fully automated calibration and adjustment function
Application:
  • Determination of the removed mass after electrochemical machining processes via differential weighing
  • Determination of the (through abrasion) removed mass, for tribological investigations

Software

COMSOL Multiphysics®

COMSOL Multiphysics

FEM Simulations Software

  • 2D- and 3D-environment
  • Available Modules:
    • AC/DC Module
    • Acoustics Module
    • CFD Module
    • Electrodeposition Module
    • Heat Transfer Module
    • Microfluidics Module
    • Nonlinear Structural Materials Module
    • Optimization Module
    • Plasma Module
    • Structural Mechanics Module
    • CAD-Import
    • Material Library

Server infrastructure with 1024 GB RAM and 96 CPU cores
Information about server operation via intranet [de]

Siemens Simcenter STAR-CCM+ (Version 2021.2)

Simcenter STAR-CCM+

Multiphysics FVM simulations software

  • Main focus:
    • Fluid mechanics
    • Multiphase flows
    • Particle flows
    • Heat transfer
    • Electrochemical processes
  • Geometry spectrum: 2D, complex 3D structures
  • CAD interfaces for common CAD formats
  • Automation by means of individual macros
  • Integrated pre- and post-processing

MountainsMap7.4®

MountainsMap

Surface Imaging, Analysis and Metrology Software

  • Data analysis of all file formats (confocal microscopes, white light interferometers, scanning probe microscopes, contact and non-contact profilometers)
  • Universal data export
  • Determination of areal surface characteristics

Miscellaneous Equipment

  • CO2 snow-jet cleaning-device
  • Microscopes
  • Modular laser vibrometer Polytec OFV-5000
  • Pyrometer Infratherm IP 140
  • Digital height measuring system Mahr 817 CLM-2D

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