Invitation and Program
13. Chemnitzer Fachtagung Mikrosystemtechnik (13th Symposium of Microsystem technology)
- Mikromechanik & Mikroelektronik -
Chemnitz, 25th/26th October 2016
Foreword
Organisation
Supporting Organisation
Program
Venue
General Informations
Binding Application
Foreword
Microsystem technology – the name reflects on the program. Extreme miniaturized functions and shaped elements combined with different operating principles, new materials, technologies, signal processing and controlling technologies have conquered the market with new sensors, actuators and intelligent systems. Since many years there is a rapid evolution. Besides micromechanics and microelectronic, microfluids and micro-optics are very important segments.
The symposium „Chemnitzer Fachtagungen“ exists since 1992 and this year, 2016, it will be its 13th occasion. The colleagues are always very interested in knowledge exchange. So the symposium provides the possibility for experts of micromechanics and microelectronics to discuss knowledge and maintain contacts. The organization of the symposium allows getting information about the development of research results in both fields of microsystems technology. Two competence centers, the center of microtechnology of the TU Chemnitz (ZfM) and the Fraunhofer ENAS participate in the symposium.
Besides invited talks the program contains poster sessions and business presentations. The number of contributions about utilization in the medical area has increased. To encourage the contact between exhibiting companies and specialized audience the companies can use the auditorium to present their products and share their expressions about new micro products and their capacity. The exhibition will be placed during the entire duration of the symposium.
The evening event on the 25th of October will take place in the Saxon museum of industry Sächsischen Industriemuseum Chemnitz, which houses a collection of exhibits from more than 200 years of Saxon industrial culture. A guided tour of the redesigned permanent exhibition and demonstrations of exhibits convey a lasting impression of the services of engineers and technicians. The subsequent reception offers enough time for interesting discussions.
We would like to invite you to be part of our symposium on 25th and 26th of October 2016 in Chemnitz.
| Prof. Dr. J. Mehner | Prof. Dr. G. Herrmann | |
| Organising committee |
Organisation
Program committee:
| C. Dittrich | GEMAC mbH, Chemnitz |
| A. Foitzik | TH Wildau |
| G. Gerlach | TU Dresden |
| U. Heinkel | TU Chemnitz |
| K. Hiller | TU Chemnitz |
| M. Hoffmann | TU Ilmenau |
| L. Kroll | TU Chemnitz |
| F. Lärmer | Robert Bosch GmbH, Stuttgart |
| J. Mehner | TU Chemnitz |
| B. Michel | Fraunhofer ENAS, Chemnitz |
| D. Reuter | TU Chemnitz |
| A. Richter | TU Dresden |
| P. Schneider | Fraunhofer IIS EAS, Dresden |
| U. Schwarz | X-FAB GmbH, Erfurt |
Organising committee:
Prof. Dr. J. Mehner, Dr. M. Dienel
Tel.: 0371 531 24430, Fax: 0371 531 24439
Prof. Dr. G. Herrmann
Tel.: 0371 531 24310, Fax: 0371 531 24319
Frau Dr. M. Vogel, Business presentation
Tel.: 0049371 45001 203, Fax: 0049371 45001 303
Postal Address:
Technische Universität Chemnitz
Fakultät für Elektrotechnik und Informationstechnik
z.H. Dr. M. Dienel
09107 Chemnitz
E-Mail: marco.dienel@…
Supporting Organisations
Technische Universität Chemnitz
Fakultät für Elektrotechnik und Informationstechnik
Verein "Angewandte Mikroelektronik Chemnitz e. V." ( AMEC)
Förderverein für Gerätetechnik und Mikrosystemtechnik Chemnitz e. V.
VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik (GMM)
Program
Tuesday, 25th October 2016
Opening session Day 1Session 1: Medical / biological analysis, medical technology
Business presentation, Poster session
Session 2: Design and Simulation
Session 3: Production and Technology
Evening event
Wednesday, 26th October 2016
Opening session Day 2Session 4: Measurement technology, methods, setup
Session 5: Sensors and sensor networks
Session 6: Circuit technique and Electronics
Session 7: MEMS - NEMS Characterization and Reliability
Tuesday, 25th October 2016
| Timeline | Opening session Day 1 |
|---|---|
| 9.30 | Begrüßung durch den Dekan der Fakultät für Elektrotechnik und Informationstechnik der TU Chemnitz Prof. Dr. Jan Mehner |
| 9.35 | Eröffnung durch den Rektor der TU Chemnitz Prof. Dr. Gerd Strohmeier |
| 9.45 | Automatische Implantierbare Defibrillatoren - 25 Jahre Technologieentwicklung - Eingeladener Vortrag - Dr.-Ing. habil. Jürgen Pilz, BIOTRONIK SE & Co. KG, Berlin |
| 10.25 | Nicht-elektrische Datenerfassung und Speicherung von Verläufen und Zuständen mit MEMS: Eine Alternative zum Harvesting - Eingeladener Vortrag - Prof. Dr. Martin Hoffmann, TU Ilmenau, Fakultät für Maschinenbau, Fachgebiet Mikromechanische Systeme |
| 11.05 - 11.25 |
Coffee |
Tuesday, 25th October 2016
| Timeline | Contribution | Session 1: Medical / biological analysis, medical technology |
|---|---|---|
| 11.30 | S1-1 | Konzeption und Prototyping einer Präzisionsmanipulationseinheit für die minimal-invasive kardiologische Intervention. Basmer, Marc; Gatomski, Gregor; Foitzik, Andeas H.; Technische Hochschule Wildau |
| 11.50 | S1-2 | An intravesical measurement system for catheterless long-term urodynamics. D. Tenholte, S. Wille, J. Hamacher, N. Muthen, P. Schumacher, U. Engelmann, J. Mehner; Chemnitz University of Technology; University Hospital of Cologne: Clinic of Urology; Center for Clinical Trials (ZKS) |
| 12.10 | S1-3 | Entwicklung eines Überwachungssystems für miniaturisierte Bioreaktoren. Andrea Böhme, Felix Schütze, Lars Radke, Sabine Sauer, Loredana Santo, Fabrizio Quadrini, Andreas Foitzik; Technical University of Applied Sciences Wildau; University of Rome "Tor Vergata", Department of Mechanical Engineering, Rome, Italy |
| Timeline | Business presentation | |
| 12.30 - 13.00 |
The exhibiting companies get the possibility to introduce their products and refer to their stands. | |
| 13.00 - 14.00 |
Lunch | |
| Timeline | Poster session | |
| 14.00 - 14.30 |
The authors will introduce their contributions with the help of posters and get in contact with other participants. | |
Tuesday, 25th October 2016
| Timeline | Contribution | Session 2: Design and Simulation |
|---|---|---|
| 14.30 | S2-1 | Teamorientiertes Anforderungsmanagement mit SpecScribe. Chris Drechsler, Matthias Sauppe, Christian Pätz, Ulrich Heinkel; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 14.50 | S2-2 | Bestimmung äquivalenter mechanischer Materialparameter für perforierte MEMS auf Basis numerischer Optimierung. Schmidt, Henry; Naumann, Michael; Mehner, Jan; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik |
| 15.10 | S2-3 | The Tesla Turbine as heat exchanger. Roberto Lisker, Paolo Coppa, Udo Hellwig; University of Applied Sciences Wildau, Department of Industrial Engineering, University of Rome "Tor Vergata", Rome, Italy; ERK Eckrohrkessel GmbH, Berlin |
| 15.30 | S2-4 | Finite Elemente Simulation von Schall in festen Körpern zur Untersuchung der Qualität einer AE-Sensor-Ankopplung. Markus Freitag, Ben Breuer, Jan Mehner; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik |
| 15.50 - 16.15 |
Coffee | |
Tuesday, 25th October 2016
| Timeline | Contribution | Session S3: Production and Technology |
|---|---|---|
| 16.15 | S3-1 | Mikrodichtungen aus Gummi-Hybrid Systemen. Felix Schütze, Andrea Böhme, Loredana Santo, Fabrizio Quadrini, Andreas Foitzik; Technical University of Applied Sciences Wildau; University of Rome "Tor Vergata", Department of Mechanical Engineering, Rome, Italy |
| 16.35 | S3-2 | Elektronenstrahl-lithographisch erzeugte Nanostrukturen für optische Mikrosysteme. G. Heldt, A. Weiß, Chr. Helke, J.W. Erben, Th. Otto, K. Hiller, D. Reuter, Th. Gessner; Technische Universität Chemnitz, Zentrum für Mikrotechnologien; Fraunhofer ENAS, Chemnitz |
| 16.55 | S3-3 | Entwicklung eines miniaturisierten in vitro-Lymphknotens mit Inlay Analytik. Alexander Zerbst, Thilo Liebscher, Mario Birkholz, Erhard Nullmeier, Foitzik, A.H.; Technische Hochschule Wildau; Hochschule für Technik und Wirtschaft Berlin; Innovations for High Performance Microelectronics/Leibniz-Institut für innovative Mikroelektronik, Frankfurt (Oder) |
Tuesday, 25th Oktober 2016
| Timeline | Evening event |
|---|---|
| ab 18.00 |
Tour, guide and champagne reception in the Saxon museum of industry |
Wednesday, 26th Oktober 2016
| Timeline | Opening session Day 2 | |
|---|---|---|
| 9.00 | Begrüßung der Teilnehmer Prof. Dr. Göran Herrmann |
|
| 9.05 | Single Chip Scanning Probe Microscopes - Eingeladener Vortrag - Neil Sarkar, Integrated, Circuit Scanning Probe Instruments (ICSPI) Corp., Waterloo, Canada |
|
| Timeline | Contribution | Session 4: Measurement technology, methods, setup |
| 9.45 | S4-1 | Bestimmung viskoelastischer Eigenschaften von Polymeren mittels Nanoindentation. Marie Weißbach, Jan Albrecht und Sven Rzepka; Fraunhofer ENAS, Chemnitz |
| 10.05 | S4-2 | Realisierung eines piezogetriebenen Stellsystems als Validierungsansatz für eine experimentelle ESPI. Erik Krumnow, Carsten Stollfuss, Kai-H. Lietzau, Andreas H. Foitzik; Technische Hochschule Wildau |
| 10.25 | S4-3 | Nichtinvasive Überwachung von Leistungselektronik mittels Schallemissionsanalyse. Sebastian Müller, Chris Drechsler, Ulrich Heinkel, Christian Herold; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 10.45 - 11.05 |
Coffee | |
Wednesday, 26th October 2016
| Timeline | Contribution | Session 5: Sensors and sensor networks |
|---|---|---|
| 11.05 | S5-1 | Framework zur Innenraumpositionierung unter Verwendung freier, offener Innenraumkarten und Inertialsensorik. Thomas Graichen, Steffen Weichold; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 11.25 | S5-2 | Mikromechanischer Körperschall-Sensor. C. Auerswald, M. Freitag, J. Mehner; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik |
| 11.45 | S5-3 | Sensorik für die Überwachung von Faserkunststoffverbunden. Peter Wolf, Ulrich Heinkel, Göran Herrmann, Marco Dienel, Tobias Meyhöfer; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf, Professur Mikrosysteme und Medizintechnik; FiberCheck GmbH, Chemnitz |
| 12.05 | S5-4 | Fast capacitive humidity sensor based on reduced graphene oxide. A. Al-Hamry, Tejas Hadkar, C. Müller, O. Kanoun; Technische Universität Chemnitz, Chair of Measurement and Sensor Technology |
| 12.25 | S5-5 | Using automated vacuum cleaner as thermal hot-spot detection system in safety applications. Wolfgang Kilian; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 12.45 - 14.00 |
Lunch | |
Wednesday, 26th October 2016
| Timeline | Contribution | Session 6: Circuit technique and Electronics |
|---|---|---|
| 14.00 | S6-1 | Design, Fabrication, and Characterization of Ultralow Current Operational-Amplifier in the Weak Inversion Mode in a 180nm Technology for a differential Air Pressure Sensor. Farzin Akbar, Marco Ramsbeck, Elias Kögel; Chemnitz University of Technology, Department of Electronic Components |
| 14.20 | S6-2 | Entwurf teilautonomer Messspitzen für den autarken Oszilloskop-Modulträger "OsziCat". Wolfgang Kilian, Christian Roßberg, Ulrich Lentz, Steffen Weichold, Chris Drechsler, Christian Pätz, Ulrich Heinkel; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 14.40 | S6-3 | iUSB-Plug - Ein intelligenter USB-Zwischenstecker zum Steuern und Messen. Daniel Kriesten, Wolfgang Kilian, Christian Pätz, Ulrich Heinkel; Technische Universität Chemnitz, Professur Schaltkreis- und Systementwurf |
| 15.00 - 15.20 |
Coffee | |
Wednesday, 26th October 2016
| Timeline | Contribution | Session 7: MEMS - NEMS Characterization and Reliability |
|---|---|---|
| 15.20 | S7-1 | Characterization of temperature gradients on MEMS acceleration sensors. Cristian Nagel, Frederik Ante, Martin Putnik, Johannes Classen, Jan Mehner; Robert Bosch GmbH, Zentralbereich Forschung und Vorausentwicklung, Renningen; Robert Bosch GmbH, Automotive Electronics, Reutlingen; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik |
| 15.40 | S7-2 | Electrical Analysis of Integrated Field Effect Transistors as Electromechanical Transducer for Stress. N. Hafez, M. Ramsbeck, E. Kögel, S. Haas, D. Reuter, M. Schramm, K.-U. Loebel, J.T. Horstmann, T. Geßner; Technische Universität Chemnitz, Professur Elektronische Bauelemente der Mikro- und Nanotechnik, Zentrum für Mikrotechnologien |
| 16.00 | S7-3 | Experimentelle Analyse von thermischen Aktoren in BDRIE-Technologie. Sebastian Voigt, Sarah Schmidt, Alexey Shaporin, Karla Hiller, Jan Mehner; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik, Zentrum für Mikrotechnologien |
| ca. 16.30 | The end of the symposium | |
Poster contributions
| Contribution | Title, Author, Institution |
|---|---|
| P1 | SoC Low pressure measurement by use of stress sensitive ring oscillators and their beat frequency. Elias Kögel, Marco Ramsbeck, Steffen Hartmann; Department Electronic Components of micro-and nanotechnology, Chemnitz University of Technology |
| P2 | Kosynet - Vernetztes Kompensationssystem zur Netzstabilisierung. Ralf Colin; Hochschule Esslingen, Institut für Angewandte Forschung Göppingen |
| P3 | Matrix-Befeuchter - Neuartiges Gasbefeuchtungs- und -erwärmungssystem für minimalinvasive und insbesondere laparoskopische Anwendungen (Bauchspiegelung). Ralf Colin; Hochschule Esslingen, Institut für Angewandte Forschung Göppingen |
| P4 | Bioreaktorsystem für die In-Vitro-Kultivierung und der Interaktion von adhäsiven Zellenkulturen. Jordanka Kostova, Erik Krumnow, Gregor Gatomski, Andreas H. Foitzik; Technische Hochschule Wildau |
| P5 | Sliding behavior of interengaged structured polymer surfaces. Ochoa, Daniela; Gatomski, Gregor; Nguyen, Hong-Nhung, Foitzik, Andeas H.; Technische Hochschule Wildau |
| P6 | Bestimmung von Werkstoffkennwerten an Mikrozugproben aus HARMNST-Polymeren. J. Vogel, H.-J. Feige, Jens Saupe, Juergen Grimm, Rigo Herold; Westsächsische Hochschule Zwickau |
| P7 | Charakterisierung des dynamischen Verhaltens von polymerbasierten High-Speed AFM-Sonden. M. Schönfeld, S. Schubert, J. Saupe, R. Heimburger, J. Grimm, A.-D. Müller, S. Hartmann; Westsächsische Hochschule Zwickau; Anfatec Instruments AG, Oelsnitz (V) |
| P8 | Characteristics of flat electric aluminum heaters with nanoporous anodic alumina and a resistive element of carbon fiber. I. Vrublevsky, K. Chernyakova, A. Tuchkovsky; Belarussian State University of Informatics and Radioelectronics, Minsk, Belarus |
| P9 | Deformationsmessung von Zellsystemen nach Zugabe chemischer Stressoren mittels ESPI. Josefine Gottschalk, Kai-Henning Lietzau, Carsten Stollfuß, Maria Richetta; Technische Hochschule Wildau; University of Rome "Tor Vergata", Department of Industrial Engineering, Rome, Italy |
| P10 | Empfindliche Elemente von den Luftfeuchtigkeitsgebern. KSchimanovitsch, Dmitry; Patschinin, Vitaly; Schulgov, Vladimir; Belarussian State University of Informatics and Radioelectronics, Minsk, Belarus |
| P11 | Design of a high altitude propeller for the measuring drone ATISS to make particle and contaminant measurements on site in high stress and corrosive environments. Sven Angermann, Andreas Frahm, Fabian Quaeck, Claudio Testani, Wolfgang Rüther-Kindel; Technische Hochschule Wildau; Fucine Umbre, Terni, Italy |
| P12 | Aerodynamic optimization and adaptation design for cooling the propulsion system of the measuring drone ATISS to make micro-particle and contaminant measurements on site in high stress and corrosive environments. Andreas Frahm, Sven Angermann, Marco Politzer, Claudio Testani, Wolfgang Rüther-Kindel; Technische Hochschule Wildau; Fucine Umbre, Terni, Italy |
| P13 | EA micro-structured surface to promote condensation in Tesla Turbines. Roberto Lisker, Paolo Coppa, Udo Hellwig; Technische Hochschule Wildau; University of Rome "Tor Vergata", Department of Industrial Engineering, Rome, Italy |
| P14 | Biege-Aktor basierend auf Formgedächtnis-Drähten.s C. Auerswald, B. Senf, J. Mehner, W.-G. Drossel; Technische Universität Chemnitz, Professur Mikrosysteme und Medizintechnik |
| P15 | Evaluation of different technologies for the fabrication of air coupled CMUT devices. Klaus Vogel, Thomas Müller, Frank Roscher, Maik Wiemer; Fraunhofer ENAS, Chemnitz; Technische Universität Chemnitz, Fakultät für Elektrotecehnik und Informationstechnik |
Venue
Mercure Kongress Hotel Chemnitz, Brückenstr. 19, D-09111 ChemnitzBusiness presentation
Business and product presentations will be part of the symposium "13. Chemnitzer Fachtagung Mikrosystemtechnik - Mikromechanik & Mikroelektronik".General Informations
Symposium office | Attendance fee | Accommodation | Transport linkSymposium office:
Until 24nd October 2016 the symposium office is placed at the organizing committee and on the 25th/26th at the venue. Opening hours during the symposium:Tuesday, 25th of October 2016: 8.00 a.m. until 17.30 p.m.
Wednesday, 26th of October 2016: 8.00 a.m. until 15.00 p.m.
Telephone number during the symposium: +49 (0)371 / 531 33256
Attendance fee:
| Payment until 9/10/16 | Payment after 9/10/16 | |
|---|---|---|
| normal | EUR 380,- EUR 285,-* |
EUR 410,- EUR 315,-* |
| reduced (Members of Universities, Universities of Applied Sciences and Technical Schools) | EUR 320,- EUR 240,-* |
EUR 350,- EUR 270,-* |
| Students, Military and Alternative service |
EUR 200,- EUR 150,-* |
EUR 230,- EUR 180,-* |
| Referees, Poster exhibitor (only 1 Person per contribution) |
EUR 270,- EUR 200,-* |
EUR 300,- EUR 230,-* |
| Registered business exhibitor | separately arranged | |
*... Attendance fee for one-day participation
The attendance fee includes snacks, lunch, participation in the evening event and conference papers (USB flash drive).
It has to be transferred to the bank account of the "Fördervereins für Gerätetechnik und Mikrosystemtechnik Chemnitz e.V." at the Volksbank Chemnitz,
BIN 870 962 14,
Account Number 300 00 88 52,
IBAN: DE72 8709 6214 0300 0088 52, BIC: GENODEF1CH1
Reference: "MST 16, Name, Organisation"
Please present the deposit receipt in the symposium office while doing your application. In exceptional cases it is possible to pay cash at the symposium office. Therefore you have to pay a EUR 5, - service charge.
Accommodation:
Until the 30th of September the Mercure Kongress Hotel Chemnitz will provide a contingent of rooms with special conditions for accommodation in the time of 24/10/16 until 26/10/16.
Reservation requirements after 30/09/16 can only be respected according to room occupancy. If you wish to arrive earlier/later (24/10/16 or 26/10/16) please talk to the hotel.
Price per night:
| Privilege Room | EUR 70,- |
| Standard Room | EUR 57,- |
Prices per room and night including breakfast and VAT. Depending on the category there are more offers/services. Please ask the hotel.
Reservation under the subject "MST2016" / Please pay directly at the hotel:
Mercure Kongress Hotel Chemnitz
Brückenstr. 19
D-09111 Chemnitz
Tel.: +49 (0)371 683 0
FAX: +49 (0)371 683 505
Transport link:
Arrival by Car:
Please have a look at the homepage of the hotel. According to availability the hotel provide the possibility to use the parking lot – for a fee. The gallery Galerie Roter Turm and the car park Parkhaus Galerie Roter Turm do have a basement garage. The reception will be pleased to help you.
Arrival by Train:
Destination station: Chemnitz Hbf, use the tram lines (station forecourt) 4 or 6 until station Brückenstraße.
More information about hotels, transport links or Chemnitz, especially the University/ Department of Electrical Engineering and Information Technology - please have a look :