@inproceedings{markssi2007,
  author    = "Erik Markert and Uwe Proß and Göran Herrmann and Ulrich Heinkel",
  title     = "A top-down methodology for MEMS design",
  booktitle = "Smart Systems Integration 2007",
  year      = "2007",
  pages     = "545-548",
  publisher = "VDE Verlag Berlin",
  address   = "Paris, France",
  month     = "27--28~" # mar,
  isbn      = "978-3-8007-3009-4",
  pdf       = "ftp://kreuzas.infotech.tu-chemnitz.de/pub/doc2007/markert_paris.pdf"
}