Publikationen
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Jahr 2020
Papers
| A.Preuss; S.Notz; E.Kovalski; M.Korb; Blaudeck,T.; Hu,X.; Schuster,J.; D.Miesel; T.Rueffer; A.Hildebrandt; K.Schreiter; S.Spange; Schulz,S.E.; H.Lang: Ferrocenyl-Pyrenes, Ferrocenyl-9,10-Phenanthrenediones, and Ferrocenyl-9,10-Dimethoxyphenanthrenes:Charge-Transfer Studies and SWCNT Functionalization. Chem. Eur.J., 26, 12 (2020) p 2635 –2652 (ISSN 1521-3765) |
| A.Preuss; S.Notz; E.Kovalski; M.Korb; Blaudeck,T.; Hu,X.; Schuster,J.; D.Miesel; T.Rueffer; A.Hildebrandt; K.Schreiter; S.Spange; Schulz,S.E.; H.Lang: Cover Feature: Ferrocenyl‐Pyrenes, Ferrocenyl‐9,10‐Phenanthrenediones, and Ferrocenyl‐9,10‐Dimethoxyphenanthrenes: Charge‐Transfer Studies and SWCNT Functionalization (Chem. Eur. J. 12/2020). Chem. Eur. J., 26, 12 (2020) pp 2518-2518 (ISSN 1521-3765) |
| Almeida,M.; Sharma,A.; Matthes,P.; Okano,S.; Hellwig,O.; Ecke,R.; Zahn,D.R.T.; Salvan,G.; Schulz,S.E.: Spectroscopic ellipsometry and magneto-optical Kerr effect spectroscopy study of thermally treated Co60Fe20B20 thin films . J. Phys.: Condens. Matter , 32 (2020) p 055702 |
| Boettger,S.; Hartmann,M.; Hermann,S.: Developing an Advanced Integration Technology for Condition Monitoring with Pre-strained Carbon Nanotubes. 2020 MRS Virtual Spring/Fall Meeting & Exhibit, Online, 2020 Nov 27-4 |
| Bonitz,J.; Hamm,L.; Mueller,P.; Hermann,S.: Verbesserte Prozessüberwachung durch hochsensitive CNT-Kraftaufnehmer. ZWF Zeitschrift für wirtschaftlichen Fabrikbetrieb, 7-8 (2020) pp 488-491 |
| Clauss,B.; Meinecke,C.; Guenther,W.; Akthari,S.; Albers,J.; Forke,R.; Streit,P.; Reuter,D.; Schubert,A.: Process monitoring and impulse detection in face milling using capacitive acceleration sensors based on MEMS. Procedia CIRP, 93 (2020) pp 1454-1459 (ISSN 2212-8271) |
| Franz,M.; Junghans,R.; Schmitt,P.; Szeghalmi,A.; Schulz,S.E.: Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir. Beilstein Journal of Nanotechnology, 11 (2020) pp 1439-1449 (ISSN 2190-4286) |
| Gadhiya,G.; Kersjes,S.; Fernandes,F.; Rzepka,S.; Otto,T.: The Systematic Study of Fan-Out Wafer Warpage Using Analytical, Numerical and Experimental Methods. InterPACK Conference, Virtual Projekt: EuroPAT-MASiP, 2020 Oct 27-29; Proceedings (ISBN 978-0-7918-8404-1) |
| Gadhiya,G.; Kuisma,H.; Cardoso,A.; Braemer,B.; Rzepka,S.; Otto,T.: Virtual Prototyping, Design for Reliability, and Qualification for a Full SiP Product Portfolio of a FOWLP Line. 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Virtual Projekt: EuroPAT-MASiP, Cracow (Poland), 2020 Jul 6-8; Proceedings (ISBN 978-1-7281-6049-8, 978-1-7281-6050-4) |
| Ghosh,J.; Salvan,G.; Reuter,D.: Study of Laterally Stacked Nanostructures using an organic Semiconducting Channel fabricated by trench isolation technique. IEEE Transactions on Nanotechnology, 19 (2020) pp 410-414 |
| Haase,M.; Melzer,M.; Lang,N.; Ecke,R.; Zimmermann,S.; van Helden,J.-P.H.; Schulz,S.E.: On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes. AIP Advances, 10 (2020) p 065212 |
| Hartmann,M.; Boettger,S.; Heldt,G.; Claus,M.; Schroeter,M.; Hermann,S.: Asymmetric CNT transistors for Enhanced High Frequency Performance - talk . MRS Virtual Spring/Fall Meeting & Exhibit, online, 2020 Nov-27 |
| Hartmann,M.; Tittmann-Otto,J.; Boettger,S.; Heinrich,K.; Heldt,G.; Claus,M.; Schulz,S.E.; Schroeter,M.; Hermann,S.: Gate Spacer Investigation for Improving the Speed of High-Frequency Carbon Nanotube-Based Field-Effect Transistors. ACS Applied Materials and Interfaces, 12, 24 (2020) p 27461–27466 |
| Hertel,S.; Vogel,K.; Wiemer,M.; Otto,T.: Electroplating of Pd/Sn Multilayers for Reactive Bonding in Packaging and Assembly Applications. 8th Electronics System-Integration Technology Conference (ESTC), Vestfold (Norwegen) (Online), 15-18 Sept. 2020; Proceedings 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) |
| Hertel,S.; Wiemer,M.; Otto,T.: Galvanische Aluminium-Abscheidung auf unterschiedlichen Startschichten für die Leiterplatten- und Mikrosystemtechnik/ Teil 1-3. Galvanotechnik, 6, 7, 8 (2020) pp 873-878, 1038-1043, 1190-1195 |
| Hofmann,C.; Froehlich,A.: Induktives Bonden in der Mikrosystemtechnik. Schweissen und Schneiden, 4 (2020) pp 210-215 (ISSN 0036-7184) |
| Hu,X.; Schuster,J.; Schulz,S.E.: Ab initio study on the surface reactions of thermal atomic layer etching of Al2O3. The AVS 20th International Conference on Atomic Layer Deposition (ALD 2020), Belgium, 2020 Jul 31 |
| Jaeckel,L.: Optimization of Atomic Layer Deposition Processes Using Simulation: an Overview. ALD for Industry, online, 2020 December 2-3; Talk |
| Lange,S.; Schroeder,D.; Hedayat,C.; Hangmann,C.; Otto,T.; Hilleringmann,U.: Investigation of the Surface Equivalence Principle on a Metal Surface for a Near-Field to Far-Field Transformation by the NFS3000. 2020 International Symposium on Electromagnetic Compatibility - EMC EUROPE, Rome (Italy), 2020 Sep 23-25; Proceedings, pp 1-6 (ISBN 978-1-7281-5580-7) |
| Meinel,K.; Melzer,M.; Stoeckel,C.; Shaporin,A.; Forke,R.; Zimmermann,S.; Hiller,K.; Otto,T.; Kuhn,H.: 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors, 20, 22 (2020) p 6599 |
| Meinel,K.; Stoeckel,C.; Melzer,M.; Zimmermann,S.; Forke,R.; Hiller,K.; Otto,T.: Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. IEEE Sensors Journal, p accepted |
| Melzer,M.; Roessel,K.; Trieschmann,J.; Mussenbrock,T.; Stoeckel,C.; Zimmermann,S.: Wafer level sensor structure for measuring the ion energy and ion angle distribution function in process plasmas. International Workshop - Diagnostic Systems for Process Monitoring, Oederan, Germany, 2020 Oct 14 |
| Otto,T.: A Platform for Fostering Industry-Academia Collaboration. AIMR Magazine. -Advances Institute for Materials Research (AIMR). 2020, pp 5-6 |
| Saeidi,N.; Kou,Y.; Selvam,K.; Baum,M.; Wiemer,M.; Otto,T.: Preliminary Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers (CMUT) for Targeted Cell Ablation Applications. BMT 2020, 54th Annual Conference of the German Society for Biomedical Engineering, , Online, 2020 29 Sep.- 1 Dec; Proceedings |
| Solonenko,D.; Lan,C ; Schmidt,C.; Stoeckel,C.; Hiller,K.; Zahn,D.R.T.: Co-sputtering of Al(1-x)Sc(x)N thin films on Pt(111): a characterization by Raman and IR spectroscopies. Journal of Materials Science , 55, 36 (2020) pp 17061-17071 |
| Solonenko,D.; Schmidt,C.; Stoeckel,C.; Hiller,K.; Zahn,D.R.T.: The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si (111) via Magnetron Sputtering. physica status solidi (b) 257 (5), 1900400 |
| Zulfiqar,B.; Vogel,H.; Ding,Y.; Golmohammadi,S.; Kuechler,M.; Reuter,D.; Geistlinger,H.: The Impact of Wettability and Surface Roughness on Fluid Displacement and Capillary Trapping in 2‐D and 3‐D Porous Media: 2. Combined Effect of Wettability, Surface Roughness, and Pore Space Structure on Trapping Efficiency in Sand Packs and Micromodels. Water Resources Research, 56 (2020) p 27965 (16 S.) (ISBN 1944-7973 ) |
