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Professorship of Smart Systems Integration
Publications

Publications

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Year 2014

Books

Braeuer,J.; Besser,J.; Wiemer,M.; Groth,B.: Chapter Investigation of Reactive and Nano Scale Material Systems for Room-Temperature Reactive Wafer Bonding. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 467-472 (ISBN 978-3-932434-78-5)
Kroll,L; Troeltzsch,J.; Schueller,M.: Chapter Cluster of Excellence MERGE - Integration of Micro- and Nanosystems in Hybrid Structures. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 45-49 (ISBN 978-3-932434-78-5)
Morschhauser,A.; Geidel,S.; Grosse,A.; Nestler,J.; Otto,T.: Chapter Microfluidic System for Agglutination Based Point-of-Care Diagnostics. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 367-371 (ISBN 978-3-932434-78-5)
Nestler,J.; Otto,T.: Chapter Integration in Microfluidics: Towards Smart Microfluidic Systems. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 359-366 (ISBN 978-3-932434-78-5)
Otto,T.: Chapter Smart Systems Integration at Fraunhofer ENAS - Trends and Examples. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 11-22 (ISBN 978-3-932434-78-5)
Vogel,K.; Baum,M.; Roscher,F.; Wiemer,M.; Gessner,T.: Chapter Improvement of Copper Bonding by Analyzing the Mechanical Properties of the Bond Interface. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 529-536 (ISBN 978-3-932434-78-5)
Vogel,K.; Haubold,M.; Wiemer,M.; Gessner,T.: Chapter Overview of Wafer Bonding and Characterization of the Bonded Interface. in the book: Smart Systems Integration for Micro- and Nanotechnologies,, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 473-481 (ISBN 978-3-932434-78-5)
Vogel,M.; Hoeppner,G.; Reuter,D.; Otto,T.; Schulz,S.E.; Hiller,K.: Chapter Development of Fraunhofer ENAS - from Microelectronics and Microsystems to Smart Integrated Systems for Different Applications. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 1-9 (ISBN 978-3-932434-78-5)
Waechtler,T.; Mothes,R.; Hofmann,L.; Schulze,S.; Oswald,S.; Schulz,S.E.; Lang,H.; Hietschold,M.; Gessner,T.: Chapter Deposition of Copper Thin Films for ULSI Interconnects by ALD of Copper Oxide and Subsequent Reduction. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 207-215 (ISBN 978-3-932434-78-5)
Weiss,A.; Moebius,M.; Martin,J.; Otto,T.: Chapter Semiconductor Nanocrystals- Modern Building Blocks for Innovative Microsystems. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 545-552 (ISBN 978-3-932434-78-5)
Wuensch,D.; Hofmann,C.; Braeuer,J.; Wiemer,M.; Gessner,T.: Chapter Investigation of Low Temperature Wafer Bonding Using Plasma Activation. in the book: Smart Systems Integration for Micro- and Nanotechnologies, ed. by Michel, B.; Otto, T.; Schulz, S.E.; Winkler, T. (2014) pp 521-528 (ISBN 978-3-932434-78-5)

Papers

Almeida,M.; Goetze,T.; Ueberschaer,O.; Matthes,P.; Mueller,M.; Ecke,R.; Exner,H.; Schulz,S.E.: Monolithic integration of 2D spin valve magnetic field sensors for angular sensing. Nanofis 2014, Graz (Austria), 2014 Dec 3-5; Materials Today: Proceedings (accepted)
Banerjee,S.; Richter,P.; Buelz,D.; Gordon,D.O.; Reuter,D.; Hiller,K.; Gessner,T.; Zahn,D.R.T.; Salvan,G.: Trench technology- an alternative approach for fabricating laterally stacked hybrid devices. Elecmol 14, Strasbourg (France), 2014 Aug 24-29
Banerjee,S.; Richter,P.; Buelz,D.; Reuter,D.; Hiller,K.; Gessner,T.; Zahn,D.R.T.; Salvan,G.: Organic lateral trench devices fabricated by trench technology. DPG-Fruehjahrstagung of the Condensed Matter Section 2014, Dresden, Mar 30 - Apr 04 (ISSN 0420-0195)
Baum,M.; Besser,J.; Wiemer,M.; Thanner,C.; Kreindl,G.; Wimplinger,M.; Gessner,T.: Functional Nano Patterns realized by aligned Nano Imprint Lithography. Smart Systems Integration Conference SSI, Vienna (Austria), 2014 Mar 26-27; Proceedings, 8th (2014) pp 443-446 (ISBN 978-3-86359-201-1)
Baum,M.; Haubold,M.; Wiemer,M.; Gessner,T.: Implantable MEMS sensors and medical MEMS packaging issues for future implants. BMT 2014 Dreiländertagung der Deutschen, Schweizerischen und Österreichischen Gesellschaft für Biomedizinische Technik , Hannover (Germany), 2014 Oct 8-10; Abstraktband, 59, S1 (2014) pp S102 (1144-1145) (ISSN 0013-5585)
Baum,M.; Hofmann,C.; Besser,J.; Vogel,K.; Wiemer,M.; Gessner,T.: Wafer Bonding Technologies for 3D Integration. Smart Systems Integration Conference SSI, Vienna (Austria), 2014 Mar 26-27; Proceedings, 8th (2014) pp 45-51 (ISBN 978-3-86359-201-1)
Bayat,Parisa; Vogel,D.; Rodriguez,Raul D.; Sheremet,E.; Zahn,Dietrich R.T.; Rzepka,S.; Michel,B.: Stress Analysis on Cu Through-Silicon Vias with Micro-Raman Spectroscopy. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings
Belgardt,Christian; Blaudeck,T.; von Borczyskowski,Christian; Graaf,Harald: Colloidal Nanoparticle Films in Laser-Desorbed Stripes of Octadecylsiloxane Monolayers on Silicon Oxide Surfaces. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5
Belgardt,Christian; Blaudeck,T.; von Borczyskowski,Christian; Graaf,Harald: Self-Assembly of Ordered Colloidal Nanoparticle Films in Few-Micron Wide Laser-Desorbed Lines of Octadecylsiloxane Monolayers on Silicon Oxide Surfaces. Advanced Engineering Materials, 16, 9 (2014) p 1090–1097 (ISSN 1527-2648)
Belgardt,Christian; Blaudeck,T.; von Borczyskowski,Christian; Graaf,Harald: Self-Assembly of Ordered Colloidal Nanoparticle Films in Few-Micron Wide Laser-Desorbed Lines of Octadecylsiloxane Monolayers on Silicon Oxide Surfaces (Back Cover). Advanced Engineering Materials, 16, 9 (2014) p 1180 (ISSN 1527-2648)
Billep,D.; Schulze,R.; Gessner,T.: Sensormodul mit Weckeinrichtung. DE102010060906B4
Blaudeck,T.; Adner,David; Hermann,S.; Schulz,S.E.; Lang,Heinrich; Gessner,T.: Wafer-Level Functionalization of Integrated Carbon Nanotubes with Metal Nanoparticles. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings
Blaudeck,T.; Adner,David; Hermann,S.; Zhang,Youwei; Schulz,S.E.; Liu,Ran; Lang,Heinrich; Gessner,T.: Wafer-Level Functionalization of Carbon Nanomaterials with Metal Nanoparticles. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195)
Blaudeck,T.; Kasper,Laura; Adner,David; Bayat,Parisa; Hermann,S.; Kalbacova,Jana; Rodriguez,Raul D.; Lang,Heinrich; Zahn,Dietrich R.T.; Schulz,S.E.: Nanometallization of Arrays of Carbon Nanotube Field-Effect Transistors Using a Wafer-Level Stop-and-Go Microfluidic Approach. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5
Boettger,P.; Meyer,M.; Martin,J.; Otto,T.; Gessner,T.; Seidlitz,H.; Kroll,L.: Integrateable light sources based on semiconductor nanocrystals. Smart System Integration , Vienna (Austria), 2014 Mar 26-27; Proceedings, pp 451-454 (ISBN 978-3-86359-201-1)
Boettger,S.; Hermann,S.; Schulz,S.E.: Towards waferlevel fabricated CNT sensors – Process improvements by length separation of single-walled carbon nanotubes. Trends in Nanotechnology, Barcelona, 2014 Oct 27-31; Proceedings, pp 48-49
Chen,J.; Chen,D.; Yuan,T.; Chen,X.; Zhu,J.; Morschhauser,A.; Nestler,J.; Otto,T.; Gessner,T.: Microfluidic chips for cells capture using 3-D hydrodynamic structure array. Microsystem Technologies, 20, 3 (2014) pp 485-491
Dhakal,D.; Waechtler,T.; Mothes,R.; Schulz,S.E.; Lang,H.; Gessner,T.: In-situ XPS investigation of the surface chemistry of a Cu(I) beta-diketonate precursor and the ALD of Cu2O. Materials for Advanced Metallization (MAM 2014) Conference, Chemnitz (Germany), 2014 March 2-5
Dhakal,D.; Waechtler,T.; Schulz,S.E.; Gessner,T.; Lang,H.; Mothes,R.; Tuchscherer,A.: Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy. Journal of Vacuum Science and Technology A, 32 (2014) pp 0415051-0415059
Dhakal,D.; Waechtler,T.; Schulz,S.E.; Moeckel,S.; Lang,H.; Gessner,T.: In-situ growth monitoring of ultrathin films of ALD Cu2O and Cu after successive reduction. 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), 2014 Oct 16-17
Dhakal,D.; Waechtler,T.; Schulz,S.E.; Mothes,R.; Moeckel,S.; Lang,H.; Gessner,T.: In-situ XPS Investigation of ALD Cu2O and Cu Thin Films after Successive Reduction. 14th International Conference on Atomic Layer Deposition (ALD 2014), Kyoto (Japan), 2014 June 15-18
Ebermann,M.; Neumann,N.; Hiller,K.; Seifert,M.; Meinig,M.; Kurth,S.: Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases. MOEMS and Miniaturized Systems XIII, San Francisco (USA); Proceedings of SPIE, 8977 (2014) p 89770T
Enderlein,T.; Helke,C.; Harazim,S.; Geidel,S.; Nestler,J.; Otto,T.; Schmidt,O.G.; Gessner,T.: Laser based dry Integration of rolled-up Nanomembranes into Polymer Substrates. , International Congress on Applications of Lasers and Electro-Optics (ICALEO) , San Diego (USA), 2014 Oct 19-23; Proceedings
Enderlein,T.; Helke,C.; Harazim,S.; Nestler,J.; Schmidt,O.G.; Otto,T.; Gessner,T.: Laser based integration method of rolled-up nano membranes in polymer based LoC systems . DPG-Fruehjahrstagung of the Condensed Matter Section, Dresden (Germany), 2014 Mar 30-Apr 04; Proceedings, p 176 (ISSN 0420-0195)
Enderlein,T.; Nestler,J.; Otto,T.; Gessner,T.: Laser Micromachining of brittle and fragile functional Materials. Smart System Integration Conference 2014, Vienna (Austria), 2014 Mar 26-27 pp 467-470 (ISBN 978-3-932434-78-5)
Fiedler,H.; Hermann,S.; Rennau,M.; Schulz,S.E.; Gessner,T.: Localization length of integrated multi-walled carbon nanotubes. 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), San Jose, 2014 May 20-23; Proceedings, pp 159-162
Fiedler,H.; Toader,M.; Hermann,S.; Rodriguez,R.D.; Evegniya,S.; Rennau,M.; Schulze,S.; Waechtler,T.; Zahn,D.R.T.; Hietschold,M.; Schulz,S.E.; Gessner,T.: Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes. Microelectronic Engineering, 120 (2014) pp 210-215
Fiedler,H.; Toader,Marius; Hermann,S.; Rennau,M.; Rodriguez,Raul D.; Sheremet,E.; Zahn,Dietrich R.T.; Hietschold,Michael; Schulz,S.E.; Gessner,T.: Interface Resistance of Carbon-Nanotube-Based Interconnects. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings
Foerster,A.; Wagner,C.; Schuster,J.; Friedrich,J.: Ab-initio study of the trimethylaluminum atomic layer deposition process on carbon nanotubes. Baltic ALD, Helsinki, 2014 May 11-14
Froemel,J.; Baum,M.; Wiemer,M.; Gessner,T.: Solid Liquid Inter-Diffusion Bonding at Low Temperature. Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on, Tokyo (Japan), 2014 Jul 15-16; Proceedings, p 62
Fuchs,F.; Wagner,C.; Zienert,A.; Schuster,J.: Adjustment of Carbon Nanotube Properties for Sensor Applications using Pd Adatoms: An Ab-Initio Study. DPG-Frühjahrstagung der SKM, Dresden (Germany), 2014 Mar 30 - Apr 4; Talk; Abstract in: Verhandlungen der DPG (ISSN 0420-0195)
Fuchs,F.; Zienert,A.; Wagner,C.; Schuster,J.; Schulz,S.E.: Interaction Between Carbon Nanotubes and Metals: Electronic Properties, Stability, and Sensing. MAM, Chemnitz (Germany), 2014 Mar 2-5; Talk
Gaitzsch,M.; Kurth,S.; Voigt,S.; Haas,S.; Gessner,T.: Analysis of Au metal–metal contacts in a lateral actuated RF MEMS switch. International Journal of Microwave and Wireless Technologies, 6, 5 (2014) pp 481-486
Georgi,C.; Hildebrandt,T.; Waechtler,T.; Schulz,S.E.; Gessner,T.; Lang,H.: A cobalt layer deposition study: Dicobaltatetrahedranes as convenient MOCVD precursor systems. J. Mater. Chem. C, 2, 23 (2014) pp 4676-4682 (ISSN 2050-7534)
Grosse,A.; Geidel,S.; Enderlein,T.; Gross,S.; Morschhauser,A.; Nestler,J.; Edelmann,J.; Otto,T.; Gessner,T.: CAPILLARY MICROFLUIDIC CHIP WITH INTEGRATED PUMP AND VALVE ACTUATOR. MicroTAS 2014, San Antonio (USA), 2014 Oct 26-30; 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences October 26-30, 2014, San Antonio, Texas, USA, pp 2217-2219
Harazim,S.; Bola�os,V.; Helke,C.; Enderlein,T.; Otto,T.; Schmidt,O.G.: Multifunctional nanomembranes as sensitive optical sensors in compact MEMS devices. DPG-Fruehjahrstagung of the Condensed Matter Section, Dresden (Germany), 2014 Mar 30-Apr 04; Proceedings, p 169 (ISSN 0420-0195)
Hartmann,Martin; Hermann,S.; Schulz,S.E.: Characterization of integrated single-walled carbon nanotubes by transmission electron microscopy. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195)
Hartmann,Steffen; Blaudeck,T.; Hoelck,Ole; Hermann,S.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Quantitative in-situ scanning electron microscope pull-out experiments and molecular dynamics simulations of carbon nanotubes embedded in palladium. Journal of Applied Physics, 115, 14 (2014) p 144301
Hartmann,Steffen; Hoelck,Ole; Blaudeck,T.; Hermann,S.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Molecular dynamic simulations of maximum pull-out forces of embedded CNTs for sensor applications and validating nano scale experiments . 15th IEEE International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Gent (Belgium), Apr 07-09, 2014; Proceedings
Hartmann,Steffen; Hoelck,Ole; Hermann,S.; Blaudeck,T.; Schulz,S.E.; Gessner,T.; Wunderle,B.: Nanomechanics of carbon nanotube-metal contacts investigated by molecular dynamics and validating experiments. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195)
Hartwig,M.; Ueberfuhr,P.; Mischke,A.; Gaitzsch,M.; Heinrich,M.; Grossmann,T.D.; Kurth,S.; Kroll,L.; Gessner,T.; Baumann,R.R.: Roll-to-roll infrared sintering of gravure printed silver patterns in applications of back-injection-molded functional lightweight structures. Digital Fabrication and Digital Printing NIP 30, Philadelphia (USA), 2014 Sep 7-11; Proceedings, pp 399-403(5)
Helke,C.; Enderlein,T.; Harazim,S.; Nestler,J.; Otto,T.; Schmidt,O.G.; Gessner,T.: Dry Integration Strategies of rolled-up Nanostructures by a Combination of Laser and Mems Technologies. 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS) , San Antonio (USA), 2014 Oct 26-30; Proceedings, pp 1713-1715 (ISBN 978-0-9798064-7-6)
Helke,C.; Enderlein,T.; Harazim,S.; Nestler,J.; Schmidt,O.G.; Otto,T.; Gessner,T.: MEMS based integration of nano scaled architectures manufactured by the rolled-up nanotech method. DPG-Fruehjahrstagung of the Condensed Matter Section, Dresden (Germany), 2014 Mar 30-Apr 04; Proceedings, p 176 (ISSN 0420-0195)
Helke,C.; Enderlein,T.; Harazim,S.; Nestler,J.; Schmidt,O.G.; Otto,T.; Gessner,T.: Integration of Rolled-up Nano Membranes with MEMS- and Lasertechnology. Microsystems Technology in Germany 2014, pp 54-55 (ISBN ISSN 2191-7183)
Helke,C.; Enderlein,T.; Harazim,S.; Queck,H.H.; Nestler,J.; Otto,T.; Schmidt,O.G.; Gessner,T.: Kombination von Laser- und MEMS Technologieprozessen fuer Integrationsstrategien von rolled-up Nano-Architekturen. 12. Chemnitzer Fachtagung Mikrosystemtechnik - Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2014 Oct 21-22; Proceedings, pp 89-93 (ISBN ISBN 978-3-00-047625-9)
Helke,C.; Franziska,F.; Nestler,J.; Mertig,M.; Gessner,T.: Integration of DNA Origami Templates in nanostructured Surfaces. 1st International Conference nanoFIS 2014 - Integrated Functional nano Systems, Graz (Austria), 2014 Dec 03-05; Proceedings
Hermann,S.: Wafer level integration of dielectrophoretically assembled carbon nanotubes for electronic and sensor applications. Dielectrophoresis, London, Jul 14-16; Proceedings
Hermann,S.; Boettger,Simon; Bonitz,J.; Shaporin,Alexey; Hartmann,Steffen; Hartmann,Martin; Tittmann-Otto,Jana; Blaudeck,T.; Kalbacova,Jana; Rodriguez,Raul D.; Zahn,Dietrich R.T.; Wunderle,B.; Mehner,J.; Schulz,S.E.; Gessner,T.: Integration and Functionalization of Carbon Nanotubes at the Wafer Level for Sensor Applications. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5
Hermann,S.; Shaporin,Alexey; Bonitz,J.; Hartmann,Steffen; Kalbacova,Jana; Rodriguez,Raul D.; Zahn,Dietrich R.T.; Mehner,J.; Wunderle,B.; Schulz,S.E.; Gessner,T.: Carbon nanotubes for piezoresistive electro-mechanical transducers incorporating a wafer-level technology. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195)
Hille,Toni; Blaudeck,T.; Hermann,S.; Deibel,Carsten; Schulz,S.E.: Spectroscopic Monitoring of Dispersion Preparation for Aligned Deposition of Single-Walled Carbon Nanotubes at the Wafer Level. MRS Fall Meeting 2014, Boston, MA (USA), 2014 Dec 1-5
Hille,Toni; Blaudeck,T.; Hermann,S.; Schulz,S.E.: Dispersion Preparation for Wafer-Level Liquid Processing of Carbon Nanotube Microsensors. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9)
Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Mechanism for the atomic layer deposition (ALD) of copper oxide from (nBu3P)2Cu(acac) and wet O2: a theoretical study. 14th International Conference on Atomic Layer Deposition, Kyoto (Japan), June 15-18
Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Simulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surface. Materials for Advanced Metallization (MAM 2014), Chemnitz (Germany), March 2-5
Hu,X.; Schuster,J.; Schulz,S.E.; Gessner,T.: Thermodynamics and Kinetics of Cu2O ALD from Cu(I) Acetylacetonate. 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai (China), Oct 16-17
Kalbacova,Jana; Rodriguez,Raul D.; Blaudeck,T.; Hermann,S.; Sheremet,E.; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: Raman spectroscopy study of the interaction of gold nanoparticles with carbon-nanotubefield-effect transistors. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9)
Kalbacova,Jana; Rodriguez,Raul D.; Blaudeck,T.; Hermann,S.; Sheremet,E.; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: A Raman Spectroscopy Study of the Interaction of Gold Nanoparticles with a Wafer-Level Integrated Carbon Nanotube Field Effect Transistor. 17th International Conference on Solid Films and Surfaces (ICSFS-17), Rio de Janeiro, Sep 08-11, 2014; Proceedings
Koehler,D.; Seidel,R.; Helke,C.; Hiller,K.; Schueller,M.; Lipowski,M.: High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators. 8th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Wien (Austria), 2014 Mar 26-27; Proceedings, pp 509-512 (ISBN ISBN 978-3-86359-201-1)
Koehler,D.; Seidel,R.; Helke,C.; Hiller,K.; Schueller,M.; Lipowski,M.: Development and Characterization of a High Voltage Amplifier ASIC for MEMS based Piezoelectric Actuator Active Flow Control. Greener Aviation:Clean Sky breakthroughs and worldwide status, Brussels (Belgium), 2014 Mar 12-14; Proceedings
Kolchuzhin,V.; Mehner,J.; Markert,E.; Heinkel,U.; Wagner,C.; Schuster,J.; Gessner,T.: System-level-model development of an SWCNT based piezoresistive sensor in VHDL-AMS. EuroSimE, Ghent, Belgium, 2014 Apr 7-9; Proceedings of 15th international Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, p 6813846 (ISBN 978-1-4799-4790-4)
Kurth,S.; Hiller,K.; Meinig,M.; Besser,J.; Seifert,M.; Ebermann,M.; Neumann,N.; Schlachter,F.; Gessner,T.: Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture. SPIE Photonics West, San Francisco, 2014 Feb 1-6; Proceedings of SPIE, 89950 (2014)
Luo,J.; Billep,D.; Blaudeck,T.; Sheremet,E.; Rodriguez,R.D.; Zahn,Dietrich R.T.; Toader,M.; Hietschold,M.; Otto,T.; Gessner,T.: Chemical post-treatment and thermoelectric properties of poly(3,4-ethylenedioxylthiophene):poly(styrenesulfonate) thin films. Journal of Applied Physics, 115 (2014) p 054908
Meinecke,C.; Bertz,A.; Dittrich,C.; Schunke,S.; Kreutziger,P.; Gessner,T.: Technologieentwicklung, Herstellung und Charakterisierung von hochauflösenden Inertialsystemen. 12. Chemnitzer Fachtagung Mikrosystemtechnik - Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2014 Oct 21-22; Proceedings, pp 108-112 (ISBN 978-3-00-047625-9)
Moebius,M.; Martin,J.; Poppitz,E.A.; Ueberfuhr,P.; Tofighi,G.; Gordan,O.D.; Dzhagan,V.M.; Lang,H.; Baumann,R.R.; Zahn,D.R.T.; Otto,T.; Gessner,T.; Kroll,L.: Structural health monitoring with quantum dots. Smart System Integration , Vienna (Austria), 2014 Mar 26-27; Proceedings, pp 543-546 (ISBN 978-3-86359-201-1)
Otto,T.; Saupe,R.; Stock,V.; Seider,T.; Gessner,T.: A new generation of MEMS middle infrared spectrometers. MOEMS and miniaturized systems XIII, San Francisco, 3 - 6 February 2014; Proceedings of SPIE ., 8977 (2014) (ISBN 978-0-8194-9890-8)
Rodriguez,Raul D.; Kalbacova,Jana; Blaudeck,T.; Hermann,S.; Bayat,Parisa; Adner,David; Lang,Heinrich; Schulz,S.E.; Zahn,Dietrich R.T.: Interaction of gold nanoparticles with wafer-level integrated carbon nanotubes probed by Raman spectroscopy. DPG-Frühjahrstagung, Dresden, Mar 30 - Apr 04, 2014; Verhandlungen (ISSN 0420-0195)
Roscher,F.; Seifert,T.; Vogel,K.; Wiemer,M.; Gessner,T.: Abscheidung von Ag Nanopartikel Zwischenschichten für das Wafer- und Chip-level Packaging. Mikro-Nano-Integration - Beiträge des 5. GMM-Workshops, Ilmenau, 2014 Oct 8-9 (ISBN 978-3-8007-3632-4)
Rupprecht,J.; Kurth,S.; Hiller,K.; Seifert,M.; Besser,J.; Meinig,M.; Ebermann,M.; Neumann,N.; Gessner,T.: Subwavelength grating reflectors for fabrication cost reduction of Fabry-Perot infrared filters. 1st International Conference nanoFIS 2014 - Integrated Functional nano Systems, Graz (Austria), 2014 Dec 03-05; Proceedings
Saupe,R.; Stock,V.; Otto,T.; Kurth,S.; Hiller,K.; Meinig,M.; Neumann,N.; Gessner,T.: Smart Monitoring Systems for a Green Future. ECS Transactions, 60 (2014) pp 1109-1114
Schaufuss,J.; Decker,R.; Walther,M.; Tsapkolenko,A.; Dienel.M.; Schueller,M.; Kroll,L.; Gessner,T.; Mehner,J.: Entwicklung eines intelligenten, textilen Halbzeugs. 12. Chemnitzer Fachtagung Mikrosystemtechnik - Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2014 Oct 21-22; Proceedings, pp 131-136 (ISBN ISBN 978-3-00-047625-9)
Schramm,M.; Haas,S.; Reuter,D.; Heinz,S.; Loebel,K.-U.; Horstmann,J.T.; Gessner,T.: Direktintegration von Feldeffekttransistoren in Siliziummembranen als piezoresistive Sensorelemente. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, 2015 Oct 21-22
Schramm,M.; Haas,S.; Reuter,D.; Loebel,K.-U.; Heinz,S.; Bertz,A.; Horstmann,J.T.; Gessner,T.: Integration von MOS-Transistoren als Wandler für mechanische Spannungen. DPG-Frühjahrstagung of the Condensed Matter Section, Dresden, Mar 30 - Apr 04 (ISSN 0420-0195)
Schueller,M.; Lipowski,M.; Schulze,R.; Weigel,P.; Otto,T.; Gessner,T.: Development and test of synthetic jet actuators based on dual transducer concept. SPIE Smart Structures /NDE 2014, San Diego (USA), 2014 Mar 9-13; Proceedings, SPIE 9059 (2014) (ISBN 978-0-8194-9985-1)
Schueller,M.; Walther,M.; Lipowski,M.; Weigel,P.; Schulze,R.; Nestler,J.; Otto,T.; Gessner,T.; Kroll,L.: Integration concepts for fluidic actuators in hybrid structures. Smart System Integration Conference 2014, Vienna (Austria), 2014 Mar 26-27 pp 77-84 (ISBN 978-3-86359-201-1)
Schueller,M.; Walther,M.; Troeltzsch,J.; Otto,T.; Mehner,J.; Gessner,T.; Kroll,L.: Smart System Integration Technologies for Lightweight structures. Smart System Integration Conference 2014, Vienna (Austria), 2014 Mar 26-27 pp 569-572 (ISBN 978-3-932434-78-5)
Schulze,R.; Heinrich,M.; Nossol,P.; Forke,R.; Sborikas,M.; Tsapkolenko,A.; Billep,D.; Wegener,M.; Kroll,L.; Gessner,T.: Piezoelectric P(VDF-TrFE) transducers assembled with micro injection molded polymers. Sensors and Actuators A: Physical, 208 (2014) pp 159-165 (ISSN 0924-4247)
Schulze,R.; Streit,P.; Fischer,T.; Tsapkolenko,A.; Heinrich,M.; Sborikas,M.; Kroll,L.; Gessner,T.; Wegener,M.: Fiber-reinforced Composite Structures with Embedded Piezoelectric Sensors. IEEE Sensors 2014, Valencia (Spain), 2014 Nov 3-5; Proceedings IEEE Sensors 2014, pp 1563-1566
Sheremet,E.; Rodriguez,Raul D.; Krayev,A.; Kalbacova,Jana; Hermann,S.; Schulz,S.E.; Zahn,Dietrich R.T.: Tip-Enhanced Raman Spectroscopy for the Characterization of Carbon Nanotubes. 12. Chemnitzer Fachtagung Mikrosystemtechnik, Chemnitz, Oct 21-22, 2014; Proceedings (ISBN 978-3-00-047625-9)
Singh,P.K.; Zimmermann,S.; Waechtler,T.; Schulze,Steffen; Schulz,S.E.; Hietschold,Michael: Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy. Materials for Advanced Metallization (MAM) 2014, Chemnitz, Mar 02-05, 2014; Proceedings
Steller,W.; Meinecke,C.; Gottfried,K.; Woldt,G.; Guenther,W.; Wolf,M.J.; Lang,K.D.: SIMEIT-Project: High Precision Inertial Sensor Integration on a Modular 3D-Interposer Platform. IEEE 64th Electronic Components and Technology Conference (ECTC), Orlando, Florida (USA), 2014 May 27-30; Proceedings, pp 1218-1225
Stoeckel,C.; Kaufmann,C.; Hahn,R.; Schulze,R.; Billep,D.; Gessner,T.: Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties. Journal of Applied Physics, 116, 3 (2014)
Teichert,F.: Elektronischer Transport in defektbehafteten quasi-eindimensionalen Systemen am Beispiel von Kohlenstoffnanoröhrchen. Master Thesis, TU Chemnitz (Germany), 2014
Teichert,F.; Zienert,A.; Schuster,J.: Electronic transport through defective carbon nanotubes. DPG-Frühjahrstagung der SKM, Dresden (Germany), 2014 Mar 30 - Apr 4; Talk; Abstract in: Verhandlungen der DPG (ISSN 0420-0195)
Teichert,F.; Zienert,A.; Schuster,J.: Electronic transport through defective carbon nanotubes. IWEPNM 2013, Kirchberg in Tirol (Austria), 2014 Mar 8-15; Poster presentation
Teichert,F.; Zienert,A.; Schuster,J.; Schreiber,M.: Strong localization in defective carbon nanotubes: a recursive Green's function study. New Journal of Physics, 16, 12 (2014) p 123026 (ISSN 1367-2630)
Tittmann,J.; Fiedler,H.; Adner,D.; Hermann,S.; Schulz,S.E.; Gessner,T.: Wafer-level integration of carbon nanotubes for high-frequency field-effect transistors. The Tenth International Nanotechnology Conference on Communication and Cooperation (INC10), Gaithersburg, Maryland, May 13-15; Poster
Tittmann,J.; Hermann,S.; Schulz,S.E.; Pacheco-Sanchez,A.; Claus,M.; Schroeter,M.: Hysteresis-free carbon nanotube field-effect transistors without passivation. IEEE/ACM International Symposium on Nanoscale Architectures (NANOARCH), Paris, July 8-10; Proceedings, pp 137-138
Tofighi,G.; Moebius,M.; Haidu,F.; Gordan,O.D.; Martin,J.; Spudat,C.; Otto,T.; Gessner,T.; Zahn,D.R.T.: Optimizing quantum dot based sensor device structure by determining the band level alignment for better charge injection: a combined UPS/IPS study. Smart System Integration , Vienna (Austria), 2014 Mar 26-27; Proceedings, pp 539-542 (ISBN 978-3-86359-201-1)
Tofighi,G.; Moebius,M.; Haidu,F.; Martin,J.; Dzhagan,V.M.; Spudat,C.; Otto,T.; Gessner,T.; Gordan,O.D.; Zahn,D.R.T.: An UPS/IPS Study of Band Level Alignment Of a Quantum Dot Based Sensor. EUCMOS 2014, Duesseldorf (Germany), 2014 Aug 24 - Aug 28; Book of Abstracts, p 252 (ISBN 978-3-00-046327-3)
Tofighi,G.; Moebius,M.; Martin,J.; Spudat,C.; Otto,T.; Gessner,T.; Gordan,O.D.; Zahn,D.R.T.: Electronic structure and photoluminescence of core CdSe QDs and core/shell CdSe/ZnS QDs. DPG-Fruehjahrstagung, Dresden (Germany), 2014 Mar 30 - Apr 4; Talk; Abstract in: Verhandlungen der DPG (ISSN 0420-0195)
Waechtler,T.; Sharma,A.; Ahner,N.; Melzer,M.; Mueller,S.; Lehmann,D.; Schaefer,P.; Schulze,S.; Schulz,S.E.; Zahn,D.R.T.; Hietschold,M.; Gessner,T.: ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics. MAM - Materials for Advanced Metallization, Chemnitz (Germany), 2014 Mar 2-5
Wagner,C.; Kolchuzhin,V.; Markert,E.; Schuster,J.; Mehner,J.; Gessner,T.: Carbon nanotubes under strain: Ab-initio investigations and compact models. DPG-Frühjahrstagung der SKM, Dresden (Germany), 2014 Mar 30 - Apr 4; Talk; Abstract in: Verhandlungen der DPG (ISSN 0420-0195)
Wagner,C.; Schuster,J.; Gessner,T.: Modellierung des optimalen Arbeitsbereiches für Inertialsensoren auf Basis von Kohlenstoffnanoröhrchen. Mikrosystemtechnik-Kongress; Präsentation, Chemnitz, 2014 Oct 21-22; Vortrag; 12. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Proceedings (ISBN 978-3-00-047625-9)
Wagner,C.; Schuster,J.; Gessner,T.: Modellierung des optimalen Arbeitsbereiches für Inertialsensoren auf Basis von Kohlenstoffnanoröhrchen. 12. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, p S4.3 (ISBN ISBN 978-3-00-047625-9)
Weidlich,S.; Forke,R.; Konietzka,S.; Hiller,K.; Gessner,T.: Entwicklung eines experimentellen Aufbaus zur Systemcharakterisierung von MEMS Gyroskopen auf Waferlevel. 12. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2014 Oct 21-22; Proceedings, p S8.1 (ISBN 978-3-00-047625-9)
Wen,Q.; Schulze,R.; Billep,D.; Otto,T.; Gessner,T.: Modeling and Optimization of a Vortex Induced Vibration Fluid Kinetic Energy Harvester. EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers, Brescia (Italy), 2014 Sep 7-10; Procedia Engineering, 87 (2014) p 779–782
Wiemer,M.; Wuensch,D.; Froemel,J.; Gessner,T.; Bargiel,S.; Baranski,M.; Passilly,N.; Gorecki,C.: Multi-wafer bonding, stacking and interconnecting of integrated 3-D MEMS micro scanners. International Journal of Microwave and Optical Technology , 9, 1 (2014) pp 128-133 (ISSN 1553-0396)
Wuensch,D.; Froemel,J.; Wiemer,M.; Gessner,T.: Ceramic wafer bonding for vertically integrated MEMS. IWLPC, San Jose (US, California), 2014 Nov 11-13; Proceedings, 11 (2014) pp 316-322
Zienert,A.; Schuster,J.; Gessner,T.: Metallic carbon nanotubes with metal contacts: electronic structure and transport. Nanotechnology, 25, 42 (2014) pp 425203-425213 (ISSN 0957-4484)
Zienert,A.; Schuster,J.; Gessner,T.: Electronic Transport Properties of Metallic Carbon Nanotubes with Metal Contacts. International CECAM-Workshop-Tutorial "High performance models of charge transport in large scale systems", Bremen (Germany), 2014 Oct 05-10; Poster presentation
Zienert,A.; Schuster,J.; Gessner,T.: Electronic Transport Properties of Metallic Carbon Nanotubes with Metal Contacts. First Annual DCCMS Workshop, Dresden (Germany), 2014 Oct 20; Poster presentation
Zienert,A.; Schuster,J.; Gessner,T.: Electronic transport properties of metallic carbon nanotubes with metal contacts: size effects and contact resistance. QuantumHagen 2014 - Modeling of Electronic Devices and Materials at the Nanoscale, Kopenhagen (Denmark), 2014 Jul 01-04; Talk
Zimmermann,S.; Brunschwiler,T.; Zuercher,J.; Burg,B.; Hong,G.; Poulikakos,D.; Baum,M.; Hofmann,C.:3D Systems Integration Conference (3DIC), 2014 International , Kinsdale, 2014 Dec 1-3; Proceedings, pp 1-7 (ISSN 15291788 )