Publikationen
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Jahr 2011
Papers
| Baum,M.; Besser,J.; Vetter,C.; Sanchez Ordonez,S.; Wang,X.; Harazim,S.; Schmidt,O.; Wiemer,M.; Gessner,T.: Nano patterned surfaces and their influence on living cells. Biomedizinische Technik 2011, Freiburg, 2011 Sep 27-30; Proceedings Biomed Tech 2011, 56 (Supplement 1) (2011) p Poster P86 (ISSN 0939-4990) |
| Baum,M.; Gessner,T.: Nano Technologies for Smart Systems Integration. Sensors Expo 2011, Conference and Exhibition, Rosemont/Chicago (USA), 2011 Jun 6-8; Presentation |
| Baum,M.; Roscher,F.; Froemel,J.; Jia,C.; Rank,H.; Hausner,R.; Reichenbach,R.; Wiemer,M.; Gessner,T.: Metal Thermo Compression Bonding at Wafer Level and its Capabilities for 3D Integration. Waferbond 2011 - Conference on Wafer Bonding for Micro Systems, 3D and Wafer Level Integration, Chemnitz (Germany), 2011 Dec 6-8; Proceedings, p 83 |
| Baum,M.; Roscher,F.; Wiemer,M.; Gessner,T.; Raukopf,S.; Gebhardt,C.: Sensormodul und Verfahren zum Herstellen eines Sensormoduls. Patentanmeldung, DE 10 2011 001 422.5-54 (2011) |
| Baum,M.; Wiemer,M.: An investigation of nano patterned surfaces and their influence on cell behavior. Tech Connect World - BioNanotech 2011, Boston (USA), 2011 Jun 13-16; Poster and Presentation |
| Belsky,P.; Streiter,R.; Wolf,H.; Schulz,S.E.; Aubel,O.; Gessner,T.: Modeling of TDDB in advanced Cu interconnect systems under BTS conditions. Microelectronic Eng. (2011), in press |
| Bigot,S.; Nestler,J.; Dorrington,P.; Dimov,S.: A Costing Methodology for Products Based on Emerging Micro and Nano Manufacturing Technologies. Micro and Nanosystems, 3, 3 (2011) pp 254-262 (ISSN 1876-4029) |
| Chen,N.; Roscher,F.; Asao,N.; Louzguine-Luzgin,D.V.; Sharma,P.; Wang,J.Q.; Xie,G.Q.; Ishikawa,Y.; Hatakeyama,N.; Lin,Y.C.; Esashi,M.; Yamamoto,Y.; Inoue,A.: Formation and properties of Au-based nanograined metallic glasses. Acta Materialia, 59, 16 (2011) pp 6433-6440 |
| Ding,S.-F.; Xie,Q.; Mueller,S.; Waechtler,T.; Lu,H.-S.; Schulz,S.E.; Detavernier,C.; Qu,X.-P.; Gessner,T.: The Inhibition of Enhanced Cu Oxidation on Ruthenium/Diffusion Barrier Layers for Cu Interconnects by Carbon Alloying into Ru. J. Electrochem. Soc., 158, 12 (2011) pp H1228-H1232 (ISSN 0013-4651) |
| Ebermann,M.; Meinig,M.; Kurth,S.; Hiller,K.; Gittler,E.; Neumann,N.: Tiny MID- and Long-Wave Infrared Spectrometer Module with a mems Dual-Band Fabry-Pérot Filter. IRS², Nürnberg (Germany), 2011 Jun 7-9; Proceedings |
| Ebermann,M.; Neumann,N.; Meinig,M.; Kurth,S.; Hiller,K.; Gittler,E.: Tunable micromachined Fabry-Pérot Filters for infrared spectroscopy: current state and prospects. Smart Systems Integration, Dresden (Germany), 2011 Mar 22-23; Proceedings (ISBN 978-3-8007-3324-8) |
| Fiedler,H.; Hermann,S.; Rennau,M.; Schulz,S.E.; Gessner,T.: Fabrication and characterisation of CNT via interconnects for application in ULSI circuits. AMC 2011, San Diego (USA), 2011 Oct 4-6; Poster presentation |
| Fiedler,H.; Hermann,S.; Schulz,S.E.; Gessner,T.: Influence of copper on catalytic carbon nanotube growth process. IITC / MAM, Dresden (Germany), 2011 May 09-12; IEEE Proceedings (ISBN 978-1-4577-0501-4) |
| Fiedler,H.; Hermann,S.; Schulz,S.E.; Gessner,T.: Influence of copper on the catalytic carbon nanotube growth process. MAM / IITC, Dresden (Germany); Poster presentation |
| Fischer,T.; Ahner,N.; Zimmermann,S.; Schulz,S.E.: Influence of thermal cycles on the silylation process for recovering k-value and chemical structure of plasma damaged ultra-low-k materials. Microelectronic Eng. |
| Fronk,M.; Mueller,S.; Waechtler,T.; Schulz,S.E.; Mothes,R.; Lang,H.; Zahn,D.R.T.; Salvan,G.: Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2. E-MRS Spring Meeting, Nice (France), 2011 May 9-13 |
| Fronk,M.; Mueller,S.; Waechtler,T.; Schulz,S.E.; Zahn,D.R.T.; Salvan,G.: Magneto-optical Kerr effect studies of copper oxide and cobalt thin films. Poster presentation, DPG Frühjahrstagung, Dresden (Germany), 2011 Mar 13-18 |
| Graaf,H.; Frideriszik,F.; Wagner,C.; Borczyskowski,C.v.: Optical spectroscopy of trap states in amorphous perylene derivative films. Journal of Physical Chemistry C, 115 (2011) pp 8150-8154 |
| Haubold,M.; Baum,M.; Schubert,I.; Leidich,S.; Wiemer,M.; Gessner,T.: Low Temperature Wafer Bonding Technologies. European Microelectronics Packaging Conference EMPC 2011, Hilton Brighton Metropole, Brighton (United Kingdom), 12.-15.09.2011 |
| Haubold,M.; Baum,M.; Wiemer,M.; Gessner,T.: Mechanical and electrical packaging technologies by the application of functional layers at micro and nano scale. 4. Fachkongress MicroCar 2011, Leipzig (Germany), 2011 March 1 |
| Haubold,M.; Schubert,I.; Leidich,S.; Wiemer,M.; Gessner,T.: Entwicklung einer Verkappungstechnologie für optisch transparente NEMS/MEMS Gehäuse mit niedrigem Temperatureintrag. Mikrosystemtechnik-Kongress, Darmstadt (Germany), 10.-12.10.2011 |
| Heinrich,M.; Schulze,R.; Wegener,M.; Kroll,L.; Walther,M.; Schueller,M.; Gessner,T.: Polymer-based piezoelectric modules by microinjection moulding technology for SHM. 5th International Conference on Structural Health Monitoring of Intelligent Infrastructure (SHMII-5), Cancún (Mexico), 2011 Dec 11-15; Proceedings |
| Hermann,S.; Ecke,R.; Schulz,S.E.; Gessner,T.: Novel nanostructure with vertically aligned carbon nanotubes: Synthesis, structural properties and applications. NT2011, Campridge (UK), 2011 Jul 10-16; Poster |
| Imhof,S.; Wagner,C.; Chernikov,A.; Koch,M.; Koester,N.S.; Kolata,K.; Chatterjee,S.; Koch,S.W.; Lu,X.; Johnson,S.R.; Beaton,D.A.; Tiedje,T.; Rubel,O.; Thraenhardt,A.: Evidence of two disorder scales Ga(AsBi). Phys. Status Solidi B, 248, 4 (2011) pp 851-854 |
| Imhof,S.; Wagner,C.; Thraenhardt,A.; Chernikov,A.; Koch,M.; Koester,N.S.; Kolata,K.; Chatterjee,S.; Koch,S.W.; Rubel,O.; Lu,X.; Johnson,S.R.; Beaton,D.A.; Tiedje,T.: Luminescence dynamics in Ga(AsBi). Appl. Phys. Lett. , 98 (2011) p 161104 |
| Jaschinsky,P.; Erben,J.; Choi,K.-H.; Schulze,K.; Gutsch,M.; Freitag,M.; Schulz,S.E.; Steidel,K.; Hohle,C.; Gessner,T.; Kuecher,P.: Variable-shaped e-beam lithography enabling process development for future copper damascene technology. Microelectronic Eng., 88 (2011) pp 1978-1981 (ISSN 0167-9317) |
| Krasselt,C.; Schuster,J.; von Borczyskowski,C.: Photoinduced hole trapping in single semiconductor quantum dots at specific sites at silicon oxide interfaces. Phys. Chem. Chem. Phys., 13, 38 (2011) pp 17084 - 17092 |
| Kuechler,M.; Hofmann,L.; Hahn,R.; Bertz,A.; Gessner,T.: Eingesetzte Ätzanlage; Fortschritte in der Anwendung des tiefen Siliziumätzens (DRIE). 1. Workshop "Tiefes Siliziumätzen", Dresden, Fraunhofer IPMS, 2011 Feb 14 |
| Kurth,S.; Leidich,S.; Bertz,A.; Nowack,M.; Kaufmann,C.; Faust,W.; Gessner,T.: Reliability enhancement of Ohmic RF MEMS switches. SPIE Photonics West, San Francisco (USA), 2011 Jan 22-27; Proceedings, Vol. 7928-11 (2011) |
| Kurth,S.; Voigt,S.; Leidich,S.; Nowack,M.; Bertz,A.; Gessner,T.: Kapazitiver MEMS-Mischer und Signalfilter für wake up receiver. Mikrosystemtechnik Kongress 2011, Darmstadt, 2011 Oct 10-12; Proceedings, pp 988-991 (ISBN 978-3-8007-3367-5) |
| Lee,J.-W.; Lin,Y.-C.; Chen,N.; Louzguine,D.V.; Esashi,M.; Gessner,T.: Development of the Large Scanning Mirror using Fe-based Metallic Glass Ribbon. Journal of Japanese Applied Physics, 50, 8R (2011) pp 087301-1-087301-3 |
| Lee,J.-W.; Lin,Y.-C.; Kaushik,N.; Sharma,P.; Makino,A.; Inoue,A.; Esashi,M.; Gessner,T.: Micromirror with large-tilting angle using Fe-based metallic glass. Optics Letters, 36, 17 (2011) pp 3464-3466 |
| Leidich,S.; Kurth,S.; Nowack,M.; Bertz,A.; Froemel,J.; Kaufmann,C.; Gessner,T.: HF-MEMS Schalter mit ohmschen Kontakt und lateraler Bewegungsrichtung. Mikrosystemtechnik Kongress 2011, Darmstadt, 2011 Oct 10-12; Proceedings, pp 976-979 (ISBN 978-3-8007-3367-5) |
| Martin,J.; Piasta,D.; Kiessling,T.; Otto,T.; Gessner,T.; Staudinger,U.; Demir,E.; Poetschke,P.; Voit,B.: Material integrated sensor films based on photoluminescent quantum dots. Euromat, Montpellier (France), 2011 Sept 12-15 |
| Martin,J.; Piasta,D.; Kiessling,T.; Otto,T.; Gessner,T.; Staudinger,U.; Demir,E.; Poetschke,P.; Voit,B.: Materialintegrierte Zustandsüberwachung mit Halbleiter-Nano-Kristallen. Öffentliches Statusmeeting zum Kompetenznetzwerk für Nanosystemintegration, Chemnitz (Germany), 2011 Nov 3 |
| Martin,J.; Piasta,D.; Kiessling,T.; Otto,T.; Gessner,T.; Staudinger,U.; Demir,E.; Poetschke,P.; Voit,B.: Materialintegrierte Sensorschicht basierend auf Quantum-Dot Limineszenz. Mikrosystemtechnikkongress (MST), Darmstadt (Germany), 2011 Okt 10-12; Proceedings, CD-ROM (ISBN 978-3-8007-3367-5) |
| Martin,J.; Piasta,D.; Otto,T.; Gessner,T.: Influence of Charges on the Photolumindescence of Semiconductor Nanocrystals. Smart System Integration (SSI) 2011, Dresden (Germany), 2011 Mar 22-23; Proceedings, p Paper 85 (ISBN 978-3-8007-3324-8) |
| Martin,J.; Piasta,D.; Weiss,A.; Otto,T.; Gessner,T.: The Fluorescence of Semiconductor Nanocrystals - From Basics to Nanosensor Technology. MicroCar 2011 - Micromaterials, Nanomaterials for Automotives, Leipzig (Germany), 2011 Mar 1; Proceedings, 13 (2011) pp 202-205 (ISSN 1619-2486) |
| Meinig,M.; Ebermann,M.; Neumann,N.; Kurth,S.; Hiller,K.; Gessner,T.: Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers. TRANSDUCERS, Beijing (China), 2011 Jun 5-9; Proceedings, pp 2538-2541 (ISBN 978-1-4577-0157-3 ) |
| Meinig,M.; Kurth,S.; Hiller,K.; Neumann,N.; Ebermann,M.; Gittler,E.; Gessner,T.: Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors. MOEMS and Miniaturized Systems X, San Francisco, CA (USA), 2011 Jan 24-26; Proceedings of SPIE, 7930 (2011) p 79300K (ISBN 9780819484673) |
| Mueller,M.; Roscher,F.; Sowade,E.; Seifert,T.; Wiemer,M.; Gessner,T.; Baumann,R.R.: Aerosol jet as a deposition method for conductive layers in micro- system-technology using nanoparticle inks. Printing Future Days, Chemnitz, 2011 Nov |
| Mueller,S.; Waechtler,T.; Tuchscherer,A.; Mothes,R.; Gordan,O.; Lehmann,D.; Haidu,F.; Ogiewa,M.; Gerlich,L.; Ding,S.-F.; Schulz,S.E.; Gessner,T.; Lang,H; Zahn,D.R.T.; Qu,X.-P.: Thermal ALD of Cu via Reduction of CuxO films for the Advanced Metallization in Spintronic and ULSI Interconnect Systems. Semiconductor Conference Dresden, Dresden, 2011 Sep 27-28; Oral presentation |
| Mueller,S.; Waechtler,T.; Tuchscherer,A.; Mothes,R.; Gordan,O.; Lehmann,D.; Haidu,F.; Ogiewa,M.; Gerlich,L.; Ding,S.-F.; Schulz,S.E.; Gessner,T.; Lang,H; Zahn,D.R.T.; Qu,X.-P.: Thermal ALD of Cu via Reduction of CuxO films for the Advanced Metallization in Spintronic and ULSI Interconnect Systems. Semiconductor Conference Dresden, Dresden, 2011 Sep 27-28; IEEE proceedings |
| Mueller,S.; Waechtler,T.; Tuchscherer,A.; Mothes,R.; Gordan,O.; Lehmann,D.; Haidu,F.; Schulz,S.E.; Gessner,T.; Lang,H.; Zahn,D.R.T.: An Approach for Cu ALD via Reduction of Ruthenium- Containing CuxO Films for the Metallization in Spintronic and ULSI Interconnect Systems. 11th International Conference on Atomic Layer Deposition (ALD 2011), Cambridge, MA USA, June 26-29; Oral presentation |
| Nowack,M.; Leidich,S.; Reuter,D.; Kurth,S.; Kuechler,M.; Bertz,A.; Gessner,T.: Novel Post-Process Gap Reduction Technology of High Aspect Ratio Microstructures Utilizing Micro Welding. Transducers 11, Beijing (China), 2011 Jun 5-9; Proceedings, pp 1352-1355 (ISBN 978-1-4577-0156-6) |
| Nowack,M.; Leidich,S.; Reuter,D.; Kurth,S.; Kuechler,M.; Bertz,A.; Gessner,T.: Lokales Mikroschweißen als post-process Technologie zur permanenten Reduzierung des Elektrodenabstandes von HARMS. Mikrosystemtechnik Kongress 2011, Darmstadt, 2011 Oct 10-12; Proceedings, pp 610-613 (ISBN 978-3-8007-3367-5) |
| Otto,T.; Enderlein,T.; Nestler,J.; Morschhauser,A.; Klenert,P.; Gessner,T.: Micromachining of polymers on base of renewable raw materials for microfluidic systems. MikroSystemTechnik Kongress 2011, Darmstadt, 2011 Oct 10-12; Proceedings, pp 654-657 (ISBN 978-3-8007-3367-5) |
| Roscher,F.; Baum,M.; Braeuer,J.; Wuensch,D.; Wiemer,M.; Gessner,T.: Current Results and Future Approaches in Wafer-Level-Packaging at Fraunhofer ENAS. Semicon Europe , Dresden, 2011 Oct 11-13 |
| Roscher,F.; Baum,M.; Gebhardt,C.; Raukopf,S.; Wiemer,M.; Gessner,T.: Si Interposer Technologies for three dimensional Sensor Systems. Smart Systems Integration, Dresden, Germany, 2012 Mar 22-23; Proceedings, p Paper 94 (ISBN 978-3-8007-3324-8) |
| Schueller,M.; Schulze,R.; Gebauer,C.; Lipowski,M.; Kaulfersch,E.; Nestler,J.; Otto,T.; Gessner,T.: Netzwerkmodellierung von Doppelwandler Synthetic Jet Aktoren. Deutscher Luft- und Raumfahrtkongress 2011, Bremen, 2011 Sept 27-29 |
| Schueller,M.; Schulze,R.; Zeising,V.; Gebauer,C.; Otto,T.; Gessner,T.: Model based design of micro actuators for flow control applications. Smart System Integration (SSI), Dresden (Germany), 2011 Mar 22-23; Proceedings, p Paper 97 (ISBN 978-3-8007-3324-8) |
| Schulz,B.; Taeuber,D.; Schuster,J.; Baumgaertel,T.; von Borczyskowski,C.: Influence of mesoscopic structures on single molecule dynamics in thin smectic liquid crystal films. Soft Matter, 7, 16 (2011) pp 7431 - 7440 |
| Schulze,R.; Billep,D.; Bach,D.; Gratias,A.; Gessner,T.: Wake-up-generator detecting external events of mechanical excitation for the improvement of energy efficient wireless inertial sensor systems. Smart System Integration (SSI), Dresden, 2011 Mar 22-23; Proceedings, paper 98 (2011) (ISBN 978-3-8007-3324-8 ) |
| Schulze,R.; Heinrich,M.; Wegener,M.; Schueller,M.; Kroll,L.; Gessner,T.: Mikrosysteme auf Basis der Mehrkomponentenmikrospritzgießtechnologie (Microsystems based on Multi Component Micro Injection Moulding Technology). Mikrosystemtechnik Konferenz 2011, Darmstadt (Germany), 2011 Oct 10-12 pp 583-586 (ISBN 978-3-8007-3367-5 ) |
| Specht,H.; Meinig,M.; Kurth,S.; Hiller,K.; Ebermann,M.; Neumann,N.; Gittler,E.; Gessner,T.: Neuartiger frequenz- und amplitudenabstimmbarer Infrarotfilter. Mikrosystemtechnik Kongress, Darmstadt (Germany), 2011 Oct 10-12; Proceedings, pp 106-109 (ISBN 978-3-8007-3367-5) |
| Vogel,K.; Wuensch,D.; Shaporin,A; Mehner,J.; Billep,D.; Wiemer,M.: Crack propagation in micro-chevron-test samples of direct bonded silicon-silicon wafers. Frattura ed Integrità Strutturale, 15 (2011) pp 21-28 (ISSN 1971-8993) |
| Voigt,S.; Nowack,M.; Bertz,A.; Leidich,S.; Meinig,M.; Kurth,S.; Gessner,T.; Grosser,V.; Braunschweig,M.; Krumm,R.: Autarkes Sensornetzwerk zur Überwachung von Hochspannungsleitungen. Mikrosystemtechnik Kongress 2011, Darmstadt, 2011 Oct 10-12; Proceedings, pp 354-357 (ISBN 978-3-8007-3367-5) |
| Waechtler,T.; Auerswald,E.; Hoebelt,I.; Nowack,M.; Noack,E.; Gollhardt,A.; Vogel,D.; Michel,B.; Schulz,S.E.; Gessner,T.: REM/FIB-Analytik für die Smart Systems Integration. ZEISS CrossBeam Workshop, Jena (Germany), 2011 May 3-4 |
| Waechtler,T.; Ding,S.-F.; Hofmann,L.; Mothes,R.; Xie,Q.; Oswald,S.; Detavernier,C.; Schulz,S.E.; Qu,X.-P.; Lang,H.; Gessner,T.: ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems. Microelectron. Eng., 88 (2011) pp 684-689 (ISSN 0167-9317) |
| Waechtler,T.; Mueller,S.; Hofmann,L.; Mothes,R.; Ding,S.-F.; Schulz,S.E.; Lang,H.; Qu,X.P.; Gessner,T.: Copper Films Grown via Copper Oxide ALD Integrated with Different Liner Materials for Interconnect Applications. 11th International Conference on Atomic Layer Deposition (ALD 2011), Cambridge, MA USA, June 26-29; Oral presentation |
| Waechtler,T.; Mueller,S.; Mothes,R.; Tuchscherer,A.; Schubert,C.; Lehmann,D.; Haidu,F.; Schaefer,P.; Schulz,S.E.; Lang,H.; Albrecht,M.; Zahn,D.R.T.; Gessner,T.: Copper ALD for Applications in ULSI Metallization Systems and Spintronic Layer Stacks. IMEC Workshop on Atomic Layer Deposition for Applications in Nanotechnology, Leuven (Belgium), 2011 Nov 28-29 |
| Waechtler,T.; Mueller,S.; Schulz,S.E.; Gessner,T.: Process Development for the ALD of Thin Copper Films for ULSI Metallization Systems and Magnetosensors. SENTECH Plasma Process Technology Seminar, Berlin (Germany), 2011 Nov 22 |
| Wagner,C.; Imhof,S.; Thraenhardt,A.; Chatterjee,S.; Koch,M.; Koch,S.W.; Johnson,S.R.; Beaton,D.A.; Kolata,K.; Koester,N.S.; Lu,X.; Rubel,O.; Tiedje,T.: Disorder Effects in Ga(AsBi). DPG Frühjahrstagung, Dresden, 2011 Mar 13-18; Posterbeitrag |
| Weiss,A.; Martin,J.; Piasta,D.; Otto,T.; Gessner,T.: Fabrication of an all-spin-coated CdSe/ZnS Quantum Dot Light-Emitting Diode. SPIE Photonics West 2011, San Francisco (USA), 2011 Jan 22-27; Proceedings of SPIE, 7945, Quantum Sensing and Nanophotonic Devices VIII, 79452Q (2011) |
| Weiss,A.; Martin,J.; Piasta,D.; Otto,T.; Gessner,T.: Fabrication of an all-spincoated CdSe/ZnS Quantum Dot Light-Emitting Diode. Smart System Integration (SSI), Dresden (Germany), 2011 Mar 22-23; Proceedings, p paper 106 (ISBN 978-3-8007-3324-8) |
| Wen,Q.; Billep,D.; Schulze,R.; Gessner,T.: Rotating free fluid kinetic energy harvester based on Karman vortex street. Smart System Integration (SSI); Proceedings, paper 107 (2011) (ISBN 978-3-8007-3324-8) |
| Wuensch,D.; Braeuer,J.; Wiemer,M.; Gessner,T.: Plasma activated bonding of the heterogeneous material combinations LiTaO3/Si and poly-Si/SiO2. SSI, Dresden (Germany), March 22-23; Proceedings (ISBN 978-3-8007-3324-8) |
| Zienert,A.; Schuster,J.; Streiter,R.; Gessner,T.: Quantum mechanical methods for the simulation of electronic transport through carbon nanotubes. IITC/MAM, Dresden (Germany), 2011 May 9-12; Proceedings, pp 1-3 (ISBN 978-1-4577-0503-8) |
| Zimmermann,S.; Ahner,N.; Fischer,T.; Schaller,M.; Schulz,S.E.; Gessner,T.: Talk: A less damage patterning regime for a successful integration of ultra low-k materials in modern nanoelectronic devices . MRS Spring Meeting 2011, San Francisco (USA), April 25 - 29, 2011 |
| Zimmermann,S.; Reich,R.; Zacher,M.; Schulz,S.E.; Gessner,T.: Prediction of wafer homogeneity maps using a virtual metrology scheme consisting of time resolved OES measurements and a neural network. 11th European Advanced Equipment Control / Advanced Process Control Conference, AEC/APC 2011, Dresden (Germany), April 4-6, 2011 |
