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Veröffentlichungen der Arbeitsgruppe
Technische Physik / Physik fester Körper

seit 1994


Die Veröffentlichungen sind nach Jahrgängen geordnet. Bitten wählen Sie ein Jahr aus:

2011  2010  2009  2008  2007  2006  2005  2004  2003  2002  2001  2000  1999  1998  1997  1996  1995  1994


Sollten Sie Interesse an bestimmten Artikeln haben, können Sie sich an einen der Autoren (siehe Mitarbeiterverzeichnis) oder ans Sekretariat wenden.




2011


  • K. Nendel, A. Schumann, A. Bergmann, J. Sumpf, F. Richter, Z. Stryhal, H. Kupfer
    "Kohlenstoffbasierte PVD-Beschichtungen zur Optimierung der tribologischen Eigenschaften von Kunststoffbauteilen in Fördersystemen"
    Technomer 2011, Tagungsband zur 22. Fachtagung über Verarbeitung und Anwendung von Polymeren, Chemnitz, 10.-12.11.2011. Vortrag P 5.1, S. 1-10 auf beiliegender CD-ROM, ISBN: 978-3-939382-10-2
    [Abstract]

  • S. Peter, M. Günther, F. Richter
    "A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy"
    Vacuum 86 (2012) 6, 667-671, DOI:10.1016/j.vacuum.2011.07.037
    [Abstract]

  • I. Bialuch, K. Bewilogua, M. Günther, S. Peter, F. Richter
    "High Rate Deposition of Hard a-C:H Coatings Using Microwave Enhanced Plasma CVD"
    54th Annual SVC Technical Conference Proceedings, Chicago, IL April 16-21, 201 1 ISSN 0737-5921
    [Abstract]

  • S. Berg, S. F. Jahn, H.-J. Koriath, B. Müller, M. Müller, R. Neugebauer, S. Peter, F. Richter, A. Schubert
    "Fabrication and Characterization of a Form- and Force- Locked Piezo-Metal Sensor Module"
    Proc. 3rd Scientific Symposium of the CRC/TR39 "PT-PIESA", 12.-13. September 2011, Chemnitz, R. Neugebauer (ed.), S. 23-28, (ISBN 978-3-00-035549-3)
    [Abstract]

  • M. Günther, I. Bialuch, S. Peter, K. Bewilogua, F. Richter
    "High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD"
    Surface & Coatings Technology 205 (2011) S94-S98, DOI:10.1016/j.surfcoat.2010.12.047
    [Abstract]

  • Th. Welzel, Th. Dunger, B. Liebig, F. Richter
    "Determination of energy modulations of negative oxygen ions during pulsed magnetron sputtering of magnesium oxide"
    Plasma Sources Sci. Technol. 20 (2011) 035020 (8pp), DOI:10.1088/0963-0252/20/3/035020
    [Abstract]

 

2010


  • M. Herrmann, F. Richter
    "Determination of Young's modulus of thin films using the concept of the effective indenter"
    Philosophical Magazine 2010, 1-14 (ISSN 1478-6435 print, 1478-6443 online) DOI:10.1080/14786435.2010.488253
    [Abstract]

  • M. Ouchabane, H. Salah, M. Herrmann, N. Tabet, K. Henda, B. Touchrift, M. Kechouane
    "Influence of bias voltage on the structure and deposition mechanism of diamond-like carbon films produced by RF (13,56MHz) CH4 plasma"
    Physica Status Solidi A 207 (2010) 2311-2318 (ISSN 0031-8965, 1862-6319 online) DOI 10.1002/pssa.200925581
    [Abstract]

  • S. Peter, M. Günther, D. Hauschild, F. Richter
    "Low temperature plasma enhanced chemical vapor deposition of thin films combining mechanical stiffness, electrical insulation, and homogeneity in microcavities"
    Journal of Applied Physics 108, (2010) 043303 online (12 S.)
    [Abstract]

  • O. Molnar
    "Investigations of nanoindentation data obtained by the combination of normal and mixed (normal and lateral) forces"
    Dissertationsschrift der TU-Chemnitz 2010 (verteidigt am 16. 4. 2010), Professur Physik fester Körper
    [Abstract]

  • M. Herrmann
    "Das Konzept des effektiven Indenters für die Ermittlung des Elastizitätsmoduls und der Fließgrenze dünner Schichten"
    Dissertationsschrift der TU-Chemnitz 2010 (verteidigt am 27. 5. 2010), Professur Physik fester Körper
    [Abstract]

  • Th. Welzel
    "Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods"
    (Zeitaufgelöste Charakterisierung gepulster Magnetronentladungen für die Abscheidung dünner Schichten mittels plasmadiagnostischer Methoden)"
    Habilitationsschrift der TU-Chemnitz 2010 (verteidigt am 31. 5. 2010), Professur Physik fester Körper
    [Abstract]

  • K. Nendel, F. Richter, S. Weise, M. Schreiter, A. Schumann, Z. Stryhal, H. Kupfer
    "Entwicklung energieeffizienter Zug- und Tragmittel durch die Verwendung von Verbundbauweisen und Beschichtungen"
    In: R. Neugebauer, Energieeffiziente Produkt- und Prozessinnovationen in der Produktionstechnik (Tagungsband), Verlag Wissenschaftliche Scripten, 08209 Auerbach, S. 597-617 (ISBN 978-3-942267-00-7)
    [Abstract]

  • W. Li, M. Fronk, H. Kupfer, S. Schulze, M. Hietschold, D. R. T. Zahn, G. Salvan
    "Aging of rubrene layers in Ni/rubrene heterostructures studied by magneto-optical Kerr effect spectroscopy"
    J. Am. Chem. Soc. 132 (2010) 5687-5692 (ISSN 0002-7863) DOI 10.1021/ja907728y
    [Abstract]

  • M. Friedrich, H. Kupfer, D. R. T. Zahn
    "Indium tin oxide on copper phthalocyanine - an ellipsometry study"
    Physica Status Solidi C 7 (2010) 2, 304-307 (ISSN 1610-1634, 1862-6351, online 1610-1642) DOI 10.1002/pssc.200982429
    [Abstract]

  • S. Peter, M. Günther, D. Hauschild, D. Grambole, F. Richer
    "Mid-frequency deposition of a-C:H films using five different precursors"
    Vacuum 84 (2010) 958-961 (ISSN 0042-207X)
    [Abstract]
 

2009


  • F. Richter, T. Welzel, R. Kleinhempel, T. Dunger, T. Knoth, M. Dimer, F. Milde
    "Ion energy distributions in AZO magnetron sputtering from planar and rotatable magnetrons"
    Surface & Coatings Technology 204 (2009) 845-849
    [Abstract]

  • S. Peter, M. Günther, P. Belsky, D. Hauschild, M. Herrmann, F. Richter
    "Optimierung der Isolatorschichtabscheidung für metallbasierte Piezomodule"
    2. Wissenschaftliches Symposium des SFB/Transregio 39 "Großserienfähige Produktionstechnologien für leichtmetall- und faserverbundbasierte Komponenten mit integrierten Piezosensoren und -aktoren", Tagungsband
    [Abstract]

  • M. Herrmann, F. Richter
    "On the usage of the effectively shaped indenter concept for analysis of yield strength"
    J. Mater. Res., Vol. 24, No. 3, Mar 2009
    [Abstract]

  • M. Herrmann, F. Richter
    "Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence "
    Int. J. Surface Science and Engineering, Vol. 3, Nos. 1/2, 2009
    [Abstract]

  • T. Welzel, R. Kleinhempel, T. Dunger, F. Richter
    "Ion Energy Distributions in Magnetron Sputtering of Zinc Aluminium Oxide "
    Plasma Process. Polym. 2009, 6, S331-S336
    [Abstract]

  • J. W. Bradley, T. Welzel
    "Physics and phenomena in pulsed magnetrons: an overview "
    J. Phys. D: Appl. Phys. 42 (2009) 093001 (23pp)
    [Abstract]
 

2008


  • M. Herrmann, F. Richter, S.E. Schulz
    "Study of nano-mechanical properties for thin porous films through instrumented indentation: SiO2 low dielectric constant films as an example"
    Microelectronic Engineering 85 (2008) 2172-2174 (ISSN 0167-9317)
    [Abstract]

  • J. Neidhardt, C. Walter, J.M. Molina-Aldareguia, M. Herrmann, W.J. Clegg, L. Hultman
    "Transmission electron microscopy studies and simulation of the indentation response of superelastic fullerenelike carbon nitride thin films"
    Journal of Applied Physics 103 (2008) 123515-1-8 (ISSN 0021-8979)
    [Abstract]

  • Th. Welzel, Th. Dunger, B. Liebig, F. Richter
    "Spatial and temporal development of the plasma potential in differently configured pulsed magnetron discharges"
    New J. Physics 10 (2008) 123008 (ISSN 1367-2630)
    [Abstract]

  • F. Richter, Th. Welzel, R. Kleinhempel, Th. Dunger
    "Investigation of the ion energies at the substrate in d.c. and pulsed d.c. magnetron sputtering"
    Proceedings of the 14th International Conference on Thin Films & Reactive Sputter Deposition ICTF14&RSD2008, 2008, Gent, Belgium, S. 87-90, Eds.: R. de Gryse, D. Depla, D. Poelman, S. Mahieu, W.P. Leroy and H. Poelman (ISBN-978-90-334-7347-0)
    [Abstract]

  • H. Kupfer, R. Kleinhempel, F. Richter
    "Description of the cross magnetron effect as a local variation of the process operation point"
    Proceedings of the 14th International Conference on Thin Films & Reactive Sputter Deposition ICTF14&RSD2008, 2008, Gent, Belgium, S. 169-172, Eds.: R. de Gryse, D. Depla, D. Poelman, S. Mahieu, W.P. Leroy, H. Poelmann (ISBN-978-90-334-7347-0)
    [Abstract]

  • J. W. Bradley, Th. Welzel
    "Process Diagnostics"
    In: D. Depla & St. Mahieu (Hrsg): "Reactive Sputter Depositions", Kap. 8, Springer Series in Material Sciences 109, S.255-300, Springer-Verlag Berlin Heidelberg (ISBN-978-3-540-76662-9, ISSN 0933-033X)


  • H. Kupfer, F. Richter, R. Kleinhempel, R. Blüthner, T. Raubold
    "Cross-Magnetron-Effekt und ITO-Schichtabscheidung"
    Vakuum in Forschung und Praxis, 20 (2008)1, 28-24 (ISSN 1522-2454 online, 0947-076X print) (DOI:10.1002/vipr.200800340)
    [Abstract]

  • H. Kupfer, F. Richter
    "Reactive magnetron sputtering of indium tin oxide thin films: The cross corner and cross magnetron effect"
    In: D. Depla & St. Mahieu (Hrsg): "Reactive Sputter Depositions", Kap. 10, Springer Series in Material Sciences 109, S.337-366, Springer-Verlag Berlin Heidelberg (ISBN-978-3-540-76662-9, ISSN 0933-033X)
 

2007


  • F. Richter, Th. Chudoba, N. Schwarzer
    "Mechanical properties of thin films"
    Technical Digest, "Optical Interference Coatings Conference (OIC)",Loews Ventana Canyon Resort and Spa, Tucson, Arizona, USA, 3.-8. 6. 2007, TuB1, ISBN 1-55752-841-1


  • Th. Welzel, Th. Dunger, F. Richter
    "Determination of Spatio-temporal Plasma Potential Variations in Asymmetric Bipolar Pulsed DC Magnetron Discharges by Emissive Probes"
    In: J. Schmidt, M. Simek, S. Pekarek, V. Prukner (eds), Proc. of the 28th Int. Conf. Phenomena Ionized Gases (ICPIG), Prague, Czech Republic, 15. - 20. 7. 2007, 1585-1588, ISBN 078-80-87026-01-4


  • S. Peter, P. Belsky, M. Herrmann, F. Richter
    "Entwicklung von Isolatorschichten für metallbasierte Piezomodule"
    Tagungsband 1. Wissenschaftliches Symposium des SFB/Transregio 39, Chemnitz, 14. 11. 2007, Hrsg. Organisationskommitee, S. 18-22 (ISBN 978-3-00-023339-5)


  • M. Herrmann, F. Richter
    "Charakterisierung mechanischer Eigenschaften von Schichtsystemen und Oberflächen am Beispiel von Funktions- und Schutzschichten auf Kunststoffen"
    Tagungsband 15. Neues Dresdner Vakuumtechnisches Kolloquium, Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 17.-18.10.2007, S.145-149 (ISBN 978-3-00-022604-5)
    [Abstract]

  • Th. Dunger, Th. Welzel, B. Berger, F. Richter
    "Temporal and spatial development of the charge carrier distribution on pulsed magnetron discharges:influence of substrate position"
    50th. Annual Technical Conference Proceedings (2007) 431-435 (ISSN 0737-5921)


  • S. Peter, K. Graupner, D. Grambole, F. Richter
    "A comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors"
    Journal of Applied Physics 102 (2007) 053304 (18 pages)
    [Abstract]

  • R. Kleinhempel, B. Graffel, J. Luka&scaron, H. Kupfer, Th. Dunger, Th. Welzel, F. Richter
    "The Influence of Cross-Magnetron Effect on the Properties of Indium Tin Oxide Thin Films Deposited by Pulsed Dual Magnetron Discharges"
    Plasma Processes and Polymers 4 (2007), 325-323.
    [Abstract]

  • Th. Welzel, Th. Dunger, F. Richter
    "Two-Dimensional Double Probe Study of the Temporal Evolution of the Charge Carrier Density in a Pulsed Magnetron"
    Plasma Processes and Polymers 4 (2007), 931–936
    [Abstract]


  • Th.Dunger, H. Kupfer, B. Graffel, R. Kleinhempel, J. Luka&scaron, T. Welzel, F. Richter
    "Influence of Different Pulse Modes on the Plasma Properties in a Dual Magnetron Discharge used for the Deposition of Indium Tin Oxide Films from a Metallic Target"
    Plasma Processes and Polymers 4 (2007), 282–286.
    [Abstract]

  • R. Kleinhempel, G. Kaune, M. Herrmann, H. Kupfer, W. Hoyer, F. Richter
    "Properties of ITO films prepared by reactive magnetron sputtering"
    Microchimica Acta 156, 6l-67 (2007)
    [Abstract]
 

2006


  • H. Kupfer, R. Kleinhempel, B. Graffel, Th. Welzel, Th. Dunger, F. Richter, W.-M. Gnehr, T. Kopte
    "AC powered reactive magnetron deposition of indium tin oxide (ITO) films from a metallic target"
    Surface & Coatings Technology 201 (2006) 3964-3969
    [Abstract]

  • M. Herrmann, N. Schwarzer, F. Richter, S. Frühauf, S.E. Schulz
    Determination of Young's modulus and yield stress of porous low-k materials by nanointendation
    Surface & Coatings Technology 201 (2006) 4305-4310
    [Abstract]

  • F. Richter, M. Herrmann, F. Molnar, T. Chudoba, N. Schwarzer, M. Keunecke, K. Bewilogua, X.W. Zhang, H.-G. Boyen, P. Ziemann
    Substrate influence in Young's modulus determination of thin films by indentation methods: Cubic boron nitride as an example
    Surface & Coatings Technology 201 (2006) 3577-3587
    [Abstract]

  • V. Linss, T. Chudoba, H. Kupfer
    Wear behaviour of aluminium-coated glass compared to uncoated glass investigated by cycling wear tests in the micrometer scale
    Thin Solid Films 515 (2006) 1074-1079
    [Abstract]

  • Th. Welzel, Th. Dunger, F. Richter
    Reactive gas effects in pulsed magnetron sputtering: Time-resolved investigation
    Surface & Coatings Technology 201 (2006) 3959-3963
    [Abstract]

  • James G. Kohl, Irwin L. Singer, Norbert Schwarzer, Victor Y. Yu
    Effect of bond modulus on the durability of silicone duplex coatings
    Progress in Organic Coatings 56 (2006) 220-226
    [Abstract]

  • H. Kupfer, R. Kleinhempel, M. Herrmann, Th. Welzel, F. Richter, U. Krause, T. Kopte, C. Peters, P. Frach, Y. Cheng
    A controlled pulsed reactive magnetron sputtering process for oxide film deposition in: M.A. Aegeter, V. Kirchhoff (eds.), Proc. 6th Int. Conf. on Coatings on Glass and Plastics, Dresden, 18. - 22. 6. 2006, published by the organizing committee
    [Abstract]

  • N. Schwarzer, T. Chudoba, F. Richter
    Invenstigation of ultra thin coatings using nanoindentation
    Surf. Coat. Technol. 200 (2006) 5566-5580
    [Abstract]

  • N. Schwarzer, T. Chudoba, G.M. Pharr
    On the evaluation of stresses for coated materials during nanoindentation with sharp indenters
    Surf. Coat. Technol. 200 (2006) 4220-4226
    [Abstract]

  • H. Kupfer, R. Kleinhempel, F. Richter, C. Peters, U. Krause, T. Kopte, Y. Cheng
    High-Rate Deposition of MgO by Reactive AC Pulsed Magnetron Sputtering in the Transition Mode
    J. Vac. Sci. Technol. A 24 (2006) 1, 106-113
    [Abstract]

  • N. Schwarzer
    Analysing Nanoindentation Unloading Curves using Pharr's Concept of the Effective Indenter Shape
    Thin Solid Films, 494 (2006) 168-172
    [Abstract]

  • V. Linss, T. Chudoba, M. Karniychuk, F. Richter
    Combination of normal and lateral force-displacement measurements as a new technique for the mechanical characterization of surfaces and coatings
    Thin Solid Films, 494 (2006) 179-183
    [Abstract]
 

2005


  • C. Peters, U. Krause, H. Kupfer, R. Kleinhempel, F. Richter
    Structure and secondar electron emission properties of MgO films deposited by pulsed mid-frequency magnetron sputtering
    SVC - 48th Annual Technical Conference Proceedings, Society of Vacuum Coaters, pp. 695-698

  • M. Karniychuk, T. Chudoba, V. Linss, F. Richter
    Lateral Force Unit: New possibilities for mechanical characterization of materials
    Proc. Int. Conf. Actual Problems of the Solid State Physics (PSS-2005), Minsk, Belarus, October 26 - 28, 2005, Part 2, p. 328-330

  • R. Puschmann, N. Schwarzer, F. Richter, S. Frühauf, S.E. Schulz
    A usable concept for the indentation of thin porous films
    Z. Metallkunde 96 (2005) 11, 1272-1277
    [Abstract]

  • V. Linss, H. Kupfer, S. Peter, F. Richter
    Determination of the neutral gas temperature of nitrogen-containing low-pressure plasmas using a two-temperature model
    Surf. Coat. Technol. 200 (2005) 1696-1701
    [Abstract]

  • Th. Dunger, Th. Welzel, St. Welzel, F. Richter
    Time-resolved investigation of an asymmetric bipolar pulsed magnetron discharge: influence of pressure
    Surf. Coaat. Technol. 200 (2005) 1676-1682
    [Abstract]

  • T. Chudoba, V. Linss, M. Karniychuk, F. Richter
    Lateral force-displacement measurements - a new technique for the investigation of mechanical surface properties
    Surf. Coat. Technol. 200 (2005) 315-3
    [Abstract]

  • Th. Welzel, Th. Dunger, St. Welzel, H. Kupfer, F. Richter
    Studies of the temporal behaviour of a pulsed magnetron deposition discharge
    Surf. Coat. Technol 200 (2005) 630-633
    [Abstract]

  • Th. Welzel, St. Welzel, F. Richter
    Time-resolved investigation of the optical emission in a pulsed magnetron deposition discharge
    in: E.M. van Veldhuizen (ed.), Proc. XXVIIth Intern. Conf. Phenomena in Ionised Gases
    Eindhoven, the Netherlands, 17. - 22.07.2005, #8-082

  • V. Linss
    Spatial distribution of the neutral gas temperature in rf and dc magnetron sputter discharges determined by fitting rotational spectra of the N2+ using a two-temperature fit
    Spectrochimica Acta Part B 60 (2005) 253-263
    [Abstract]

  • V. Linss, N. Schwarzer, T. Chudoba, M. Karniychuk, F. Richter
    Mechanical properties of a graded B-C-N sputtered coating with varying Young's modulus: deposition, theoretical modelling and nanoindentation
    Surf. Coat. Technol. 195 (2005) 287-297
    [Abstract]

  • Th. Welzel
    Zeitaufgelöste In-situ-Charakterisierung reaktive, gepulste Magnetronzerstäubungsprozesse
    Tagungsband der 12. Bundesdeutschen Fachtagung Plasmatechnologie, Braunschweig, 21. - 23. 3. 2005, Hrsg.: Deutsche Gesellschaft für Plasmatechnologie e.V.
 

2004


  • R. Kleinhempel
    Mass density of MgO films determined by x-ray and neutron reflectometrie
    In: A. Schreyer, J. Vollbrandt, R. Willumeit (eds.), GeNF - Experimental Report 2003
    GKSS-Forschungszentrum Geesthacht GmbH, Geesthacht 2004, S.127-128

  • Th. Welzel, Th. Dunger, H. Kupfer, F. Richter
    A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges
    J. Appl. Phys. 96 (2004) 12, 6994-7001
    [Abstract]

  • N. Schwarzer, G. M. Pharr
    On the evaluaton of stresses during nanoindentation with sharp indenters
    Thin Solid Films 469-470 (2004) 194-200
    [Abstract]

  • T. Chudoba, N. Schwarzer, V. Linss, F. Richter
    Determination of mechanical properties of graded coatings using nanoindentation
    Thin Solid Films 469-470 (2004) 239-247
    [Abstract]

  • V. Linss, S.E. Rodil, P. Reinke, M.G. Garnier, P. Oelhafen, U. Kreissig, F. Richter
    Bonding characteristics of DC magnetron sputtered B-C-N thin films investigated by Fourier-tranformed infrared spectroscopy and X-ray photoelectron spectroscopy
    Thin Solid Films 467 (2004) 76-87
    [Abstract]

  • V. Linss, J. Barzola-Quiquia, P. Häussler, F. Richter
    Structural properties of d.c. magnetron sputtered B-C-N thin films and correlation to their mechanical properties: a new empirical formula
    Thin Solid Films 467 (2004) 66-75
    [Abstract]

  • F. Richter, T. Welzel, T. Dunger, H. Kupfer
    Time resolved characterisation of pulsed magnetron discharges using langmuir probes
    Surface and Coatings Technology 188-189 (2004) 384-391
    [Abstract]

  • N. Schwarzer
    Elastic Surface deformation due to Indenters with arbitrary symmetry of revolution
    J.Phys. D: Appl. Phys. 37 (2004) 2761-2772
    [Abstract]

  • F. Richter, T. Welzel, T. Dunger, H. Kupfer
    Time resolved langmuir probe characterisation of reactive pulse magnetron sputtering of MgO thin films
    Surface Engineering 20 (2004) 163-166
    [Abstract]

  • V. Linss, H. Kupfer, S. Peter, F. Richter
    Two N2+(B2&Sigmau+) populations with different Boltzmann ditribution of the rotational levels found in different types of N2/Ar discharges - improved estimation of the neutral gas temperature
    J. Phys. D: Appl. Phys. 37 (2004) 1935-1944
    [Abstract]

  • T. Chudoba, M. Griepentrog, A. Dück, M. Schneider, F. Richter
    Young's modulus measurements on ultra-thin coatings
    J. Mater. Res. 19 (2004) 1, 301
    [Abstract]

  • Y.H. Cheng, H. Kupfer, U. Krause, T. Kopte, C. Peters, F. Richter
    Influence of O2 flow rate on the structural properties of MgO films deposited by dual magnetron sputtering
    Surf. Coat. Technol. 177-178 (2004) 784-788
    [Abstract]

  • Th. Welzel, F. Richter
    Facing-Target Magnetron Operation for the Deposition of CNx Thin Films
    Surf. Coat. Technol. 174-175 (2003) 658-664, Surf. Coat. Technol. 179, 1 (2004) 118
    [Abstract]
 

2003


  • Y.H. Cheng, H. Kupfer, F. Richter
    Influence of duty cycle on the structure and secondary electron emission properties of MgO films deposited by pulsed mid-frequency magnetron sputtering
    J. Appl. Phys. 94 (2003)5, 3624-3628
    [Abstract]

  • Th. Pfeifer, Th. Welzel, V. Linss, Th. Dunger, H. Kupfer, F. Richter
    Spannungsbeeinflussung in c-BN-Schichten durch Strukturmodifizierung des Interfacebereiches h-BN/c-BN mittels gezielter Beimengungen
    Sceintific Reports der Hochschule Mittweida (2003)4, 60-67

  • Th. Welzel, Th. Dunger, H. Kupfer, F. Richter
    Time-resolved Double LANGMUIR Probe Measurements in a Mid-frequency Pulsed Magnetron Discharge
    In: J. Meichsner, D. Loffhagen, H.-E. Wagner (eds.), Proc. 26th International Conference on Phenomena in Ionized Gases (ICPIG-26), 15.-20.07.2003, Greifswald, Germany, Vol 1, p. 151-152
    [Abstract]

  • T.Chudoba, F. Richter
    Bestimmung mechanischer Oberflächeneigenschaften mittels Nanoindentation
    Tagungsverband VDI Fachtagung Metrologie in der Mikro- und Nanotechnik, Stuttgart, VDI-Verlag 2003, VDI-Berichte 1669, S. 181-190
    [Abstract]

  • Y.H. Cheng, H. Kupfer, F. Richter, H. Giegengack, W. Hoyer
    Structure and secondary electron emission properties of MgO films deposited by pulsed mid-frequency magnetron sputtering
    J. Appl. Phys. 93 (2003) 1422-1427
    [Abstract]

  • S. Frühauf, I. Streiter, R. Puschmann, S.E. Schulze, T. Gessner. T. Chudoba, F. Richter
    Electrical and Mechanical Properties of Porous Silicon Dioxide as an Ultra Low k Dielectric
    Proc. Materials Week, München, 29.09.-02.10.2002, Werkstoff-Informationsgesellchaft mbH (2003)
    [Abstract]

  • V. Linss, Th. Halm, W. Hoyer, F. Richter, N. Schell
    Analysis of the biaxial strain state of Al-doped c-BN films using diffraction experiments with synchrotron radiation
    Vacuum 70 (2003) 4, 1-9
    [Abstract]

  • Th. Pfeifer, F. Richter, Th. Welzel, H. Kupfer, P. Willich
    Influence of aluminum additions on phase formation in boron nitride films deposited by magnetron sputtering
    J. Appl. Phys. 93 (2003) 4, 2009-2014
    [Abstract]

  • Th. Welzel, Th. Pfeifer, Th. Dunger, F. Richter
    Characterisation of a BN Magnetron Sputtering Process with an Additional Aluminium Sputter Electrode
    Surf. Coat. Technol. 166 (2003) 1, 51-59
    [Abstract]

  • V. Linss, I. Hermann, N. Schwarzer, U. Kreissig, F. Richter
    Mechanical properties of thin films in the ternary triangle B-C-N
    Surf. Coat. Technol. 163-164 (2003) 220-226
    [Abstract]

  • K. Hermann, N.M. Jennet, S. Kuypers, I. McEntegaart, C. Indelbrecht, U. Hangen, T. Chudoba, F. Pohlenz, F. Menelao
    Investigation of the properties of candidate refence materials suited for the calibration of nanoindentation instruments
    Zeitschrift für Metallkunde 94 (2003) 7, 802-806
    [Abstract]

  • N. Schwarzer
    About the theory of thin coated plates
    published in the internet at: http://archiv.tu-chemnitz.de/pub/2002/0005/index.html
 

2002


  • N. Schwarzer
    Experimental and analytical modelling of mechanical contact problems of coating systems
    In: A.J.W. A. Vemeulen (ed.), Towards a detailed NIR roadmap on war resistant/low friction coatings, Philips Centre for Industrial Technology, Juli 2002, CTB 598-02-3099

  • O. Wänstrand, N. Schwarzer, T. Chudoba, A. Kassman-Rudolphi
    Load carrying capacity of Ni plated media in spherical indentation: Experimental and theoretical results
    Surface Engineering 18 (2002)2, 98
    [Abstract]

  • Y.H. Cheng, H. Kupfer, F. Richter, A.M. Paraian
    Deposition of MgO films by pulsed mid-frequency magnetron sputtering
    Applied Surface Science 200(2002) 117-124
    [Abstract]

  • T. Welzel, I. Dani, F. Richter
    Determination of absolute Radical Densities by Optical Emission Spectroscopy during the ECR Plasma Deposition of Si-C-N:H films using TMS as a Precursor
    Plasma Sources Sci. Technol. 11 (2002) 351-359
    [Abstract]

  • E. Weissmantel, Th. Pfeifer, F. Richter
    Electron microscopic analysis of cubic boron nitride films deposited on fused silica
    Thin Solid Films 408 (2002) 1-5
    [Abstract]

  • T. Chudoba, N. Schwarzer, F. Richter
    Steps towards a mechanical modelling of layered systems
    Surf. Coat. Technol. 154 (2002) 140-151
    [Abstract]

  • S. Bhattacharyya, M. Lübbe, P.R. Bressler, D.R.T. Zahn, F. Richter
    Structure of nitrogenated amorphous carbon films from NEXAFS
    Diam. Rel. Mater. 11 (2002) 8-15
    [Abstract]
 

2001


  • T. Chudoba, K. Hermmann
    Verfahren zur Ermittlung der realen Spitzenform von Vickers- und Berkovich-Eindringkörpern
    HTM Härtereitechnische Mitteilungen 56 (2001) 4, 258-264

  • T. Chudoba, F. Richter
    Neue Möglichkeiten der mechanischen Oberflächenprüfung mit Indentermethoden
    HTM Härtereitechnische Mitteilungen 56 (2001) 6, 403-409

  • T. Chudoba, F. Richter
    Investigation of Creep Behaviour under Load During Indentation Experiments and its Influence on Hardness and Modulus Results
    Surf. Coat. Technol. 148 (2001) 191-198

  • N. Schwarzer, I. Hermann, T. Chudoba, F. Richter
    Contact modelling in the vicinity of an edge
    Surf. Coat. Technol. 146-147 (2001) 371-377
    [Abstract]

  • S. Bhattacharyya, F. Richter, U. Starke H. Griessmann, A. Heinrich
    Thermoelectric power of nitrogen-incorporated tetrahedral amorphous-carbon films
    Appl. Phys. Lett. 79 (2001) 25, 4157-4159
    [Abstract]

  • D.A. Evans, S. Evans, J.W. Wells, E. Weissmantel, F. Richter
    Metal Interface with c-BN
    DeBeers Diamond Conference Abstracts 2001, pp. 37.1-37.4

  • S. Peter, H. Giegengack, F. Richter, R. Tabersky, U. König
    An analysis of the TiN plasmachemical vapor deposition process based on optical emission spectroscopy measurements
    Thin Solid Films 398-399 (2001) 343-348
    [Abstract]

  • F. Richter
    Formation of optical thin film by ion and plasma-assisted techniques
    Contrib. Plasma Phys. 61 (2001) 6, 549-561
    [Abstract]

  • S. Bhattacharyya, C. Spaeth, F. Richter
    Valence band spectra of nitrogen incorporated amorphous carbon films
    J. Appl. Phys. 89 (2001) 4, 2414-2421
    [Abstract]

  • S. Bhattacharyya, K. Walzer, M. Hietschold, F. Richter
    Nitrogen doping of tetrahedral amorphous carbon films: Scanning tunneling spectroscopy
    J. Appl. Phys. 89 (2001) 3, 1619-1624
    [Abstract]

  • F. Richter, T. Chudoba, N. Schwarzer, G. Hecht
    Neue Möglichkeiten zur Charakterisierung dünner Schichten mit Indentermethoden -
    Novel possibilities for thin film characterisation using indentationmethods
    Materialwissenschaften und Werkstofftechnik 32 (2001) 621-627
    [Abstract]

  • F. Richter, H. Kupfer, P. Schlott, T. Gessner, C. Kaufmann
    Optical properties and mechanical stress in SiO2/Nb2O5 multilayers
    Thin Solid Films 389 (2001) 1-2. 278-283
    [Abstract]

  • L. Bardos, H. Barankova, Th. Welzel, I. Dani, S. Peter, F. Richter
    Comparison between the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
    J. Appl. Phys. 90 (2001) 4, 1703-1709
    [Abstract]
 

2000


  • D.H. Evans, S. Evans, A. Burgess, J.J. Wells, E. Weissmantel, F. Richter
    c-BN Surfaces: Annealing and Alkali Metal Adsorption
    Proc. DeBeer Conference 2000, pp. 8.1-8.4

  • S. Bhattacharyya, M. Lübbe, F. Richter
    Near edge x-ray absorbtion fine structure of thermally annealed amorphous nitrogenated carbon films
    J. App. Phys. 88 (2000) 10, 1-7
    [Abstract]

  • H. Kupfer, G. K. Wolf
    Plasma and ion beam assisted metallization of polymers and their application
    Nucl. Instr. and Meth. in Phys. Res. B, 166-167 (2000) 722-731
    [Abstract]

  • K. Brämer, T. Chudoba, I. Hermann
    Some remarks about indentation tests with spherical indenters
    Proc. of 3rd Intern. Conf. an Poster Exhibition Micro Materials 2000, 17.-19.4.2000 Berlin, ISBN 3-932434-15-3, pp. 722-725

  • N. Schwarzer, F. Richter
    Adhesion modelling in layered materials using analytical solutions of crack problems
    Proc. 5th European Adhesion Conf. (EURADH 2000), Lyon, France, Sept. 2000, Edition SFV, 19 rue du Renard, 75004 Paris, 586-591.

  • N. Schwarzer, T. Heuer, T. Chudoba
    Application of modern approaches in mechanics to adhesion problems in dentistry
    Proc. 5th European Adhesion Conf. (EURADH 2000), Lyon, France, Sept. 2000, Edition SFV, 19 rue du Renard, 75004 Paris, 377-382.
    [Abstract]

  • T. Chudoba, N. Schwarzer, F. Richter, U. Beck
    Determination of mechanical film properties of a bilayer system due to elastic intendation measurements with a spherical indenter
    Thin Solid Films 377-378 (2000) 366-372
    [Abstract]

  • N. Schwarzer
    Coating design due to analytical modelling of mechanical contact problems on multilayer systems
    Surf. Coat. Technol. 133-134 (2000), 397-402
    [Abstract]

  • N. Schwarzer
    Arbitrary load distribution on a layered half space
    ASME Journal of Tribologz 122 (2000) 4, 672-681
    [Abstract]

  • O. Stenzel, H. Kupfer, Th. Pfeifer, A. Lebedev, S. Schulze
    Probing ultra-thin amorphous carbon films by means of nanometric silver islands
    Optical Materials 15 (2000) 159-165
    [Abstract]

  • S. Peter, F. Richter, R. Tabersky, U. König
    Optical emission spectroscopy of a PCVD process used for the deposition of TIN on cemented carbides
    Thin Solid Films 377-378 (2000) 430-435
    [Abstract]

  • F. Richter
    Thermophysics of superhard thin film materials
    Plenary Lecture, 15thEuropean Conf. on Thermophysical Properties, Würzburg, Germany, 5.-9.September 1999
    [Abstract]

  • K. Bewilogua, F. Richter
    Vapor phase depostion of cubic boron nitride films
    In: R. Riedel (ed.)Handbook of Ceramic Hard Materials, Whiley-VCH, Weinheim, 2000, pp. 420-445

  • S. Bhattacharyya, O. Madel, S. Schulze, P. Hässler, M. Hietschold, F. Richter
    Structure of nitrogenated carbon films by electron diffraction and imaging
    Phys. Rev. B61 (2000) 6, 3927-3935
    [Abstract]

  • S. Bhattacharyya, M. Hietschold, F. Richter
    Investigation on the change in structure of tetrahedral amorphous carbon by a large amount of nitrogen incorporation
    Diam. Rel. Mater. 9(2000) 544-547
    [Abstract]

  • T. Chudoba, N. Schwarzer, F. Richter
    Determination of elastic properties of thin films by indentation measurements with a spherical indenter
    Surf. Coat. Technol. 127 (2000)9-17
    [Abstract]
 

1999


  • V. Linss, O. Stenzel, D.R.T. Zahn
    Correlation between linear optical constants and raman enhancement in phthalocyanine thin solid films with incorporated silver clusters
    J. Raman Spectrosc. 30 (1999) 531-536
    [Abstract]

  • P. Schlott, F. Richter, H. Kupfer
    Abscheidung hochreflektierender Vergütungsschichten für mikromechanische Komponenten
    Technische Universität Chemnitz, Zentrum für Mikrotechnologien (Veranst.), Kolloquium des Sonderforschungsbereiches 379 Mikromechanische Sensor- und Aktorarrays 12. Oktober 1999, S. 43-47, (im Rahmen der 4. Chemnitzer Fachtagung Mikrosystemtechnik)
    [Abstract]

  • C. Spaeth, U. Kreissig, F. Richter
    Sputtering and chemical erosion during CNx synthesis by ion beam assisted filtered cathodic arc evaporation
    Surf. Coat. Technol (1999) 284-289
    [Abstract]

  • H. Kupfer, Th. Flügel, F. Richter, P. Schlott
    Intrinsic stress in dielectric thin films for micromechanical components
    Surf. Coat. Technol. (1999) 116-119
    [Abstract]

  • T. Chudoba
    Fortschritte bei der Bewertung dünner Randschichten mit Hilfe von registrierenden Härtemessungen
    Freiberger Forschungshefte Bd. 297, Werkstoffwissenschaft, Werkstofffertigungstechnologie, 1999, S. 81-92
    ISBN: 3-86012-094-8

  • N. Schwarzer, T. Chudoba, D. Billep, F. Richter
    Investigation of Coating Substrate Compounds using inclined sperical indentation
    Surf. Coat. Technol. 116-119 (1999) 244 - 252
    [Abstract]

  • T. Chudoba, N. Schwarzer, F. Richter
    New possibilities of mechanicalsurface characterization with spherical indenters by comparison of experimental and theoretical results
    Thin Soluid Films 355 - 356 (1999) 284-289
    [Abstract]

  • H. Kupfer, F. Richter, P. Schlott, A. Duparre, S. Gliech
    Light scattering and atomic force microscopic investigation on magnetron sputtered Oxide Single Layers and Multilayers for micromechanical Laser mirrors
    in: C. Amra, A. Macleaod (eds.), Advanced in Optical Interference Coatings, ISBN 0-8194-3212-1, Proc. of Conf. on Advances in Optical Interference Coatings, Berlin, 25-27 May 1999, SPIE Vol. 3738, 294-400
    [Abstract]

  • St. Collard, H. Kupfer, W. Hoyer, G. Hecht
    Growth of nitrogen stabilized cubic ZrO2 phase by reactive magnetron sputtering using two reactive gases
    Vacuum 55 (1999)153 - 157
    [Abstract]

  • I. Dani, S. Peter, F. Richter
    ECR - Microwave Diagnostics during the growth of SiCN.H films
    in: H. Hrabovsky, M. Konrad, V. Kopecky (eds.), Proc. 14th International Symposium on Plasma Chemistry (ISPC-14) 2.-6. August 1999, Prag, Vol. V, 1275 - 1280.
    [Abstract]

  • N. Schwarzer, F. Richter, G. Hecht
    The elastic field in a coatet half-space under Hertzian pressure distribution
    Surf. Coat. Technol. 114 (1999) 292 - 304
    [Abstract]

  • H. Kupfer, G. Hecht, R. Ostwald
    Ecologically important metallizationprocess for high performance polymers
    Surf. Coat. Technol 112 (1999) 379 - 383
    [Abstract]

  • St. Collard, H. Kupfer, G. Hecht, W. Hoyer, H. Moussaoui
    The reactive magnetron deposition of CrxOy films: first results of property investigation
    Surf. Coat. Technol. 112 (1999) 181 - 184
    [Abstract]

  • C. Spaeth, M. Kühn, T. Chudoba, F. Richter
    Mechanical properties of carbon nitride thin films prepared by ion beam assisted filtered cathodic vacuum arc deposition
    Surf. Coat. Technol. 112 (1999) 140-145
    [Abstract]

  • F. Richter, G. Flemming, M. Kühn, S. Peter, H. Wagnery
    Characterization of the arc evaporation of a hot boron cathode
     Surf. Coat. Technol. 112 (1999) 43-47
    [Abstract]
 

1998


  • N. Schwarzer, F. Richter, B. Michel
    Penny shaped interface crack under uniform pressure ans shear loading
    in: S.N. Atluri, P.E. O'Donoghue (eds.): Modelling and Simulation based Engineering Vol. II
    Tech Science Press, Atlanta, USA 1998

  • H. Kupfer, R. Ostwald
    Physical and chemical surface preconditioning and metallization of thermoplastic packaging for electronic components
    in: K.L. Mittal (ed.), Metallized Plastic 5+6: Fundamental and Applied Aspects
    Utrecht 1998, pp. 85 - 96
    [Abstract]

  • F. Richter, G. Krannich, M. Kühn, S. Peter, Chr. Spaeth
    Cathodic Arc Evaporation - A versatile tool for Thin Film Deposition
    in: H. Hoffmann (ed.), Trends and New Application in Thin Films
    ISBN 0-87849-815x, Materials Science Forum Vols. 287 - 288,
    Trans Tech Publications Ltd., Zürich 1998, pp. 193 - 198
    [Abstract]

  • C. Spaeth, M. Kühn, F. Richter, U. Falke, M. Hietschold, R. Kilper, U. Kreissig
    A comparative study of elastic recoil detection (ERDA), electron energy loss spectroscopy (EELS) and X-ray photoelectron spectroscopy (XPS) for structural analysis of amorphous carbon nitride films
    Diam. Rel. Mater. 7 (1998) 1727-1733
    [Abstract]

  • F. Richter, S. Peter, V. B. Filippov, G. Flemming, M. Kühn
    Characteristics of the Cathodic Arc Discharge with a Hot Boron Cathode
     Proc. XVIIth ISDEIV, Eindhoven, August 17-21, 1998, IEEE Catalog number 98CH36073, Vol. 2, 668-671
    [Abstract]

  • F. Richter, S. Peter, V. B. Filippov, G. Flemming, M. Kühn
    Characteristics of the Cathodic Arc Discharge with a Hot Boron Cathode
     Proc. XVIIth ISDEIV, Eindhoven, August 17-21, 1998, IEEE Catalog number 98CH36073, Vol. 2, 668-671
    [Abstract]

  • S. Intarasiri, L. D. Yu, T. Chudoba, H. Reuther, U. Rammelt, E. Richter
    Hardness, tribological behaviour and corrosion performance at the very near surface of nitrogen implanted X5CrNi18.10 steel
     Surf. Coat. Technol. 88 (1998) 305-310
    [Abstract]

  • S. Grigull, W. Jacob, D. Henke, C. Spaeth, L. Sümmchen, W. Sigle
    Transport and structural modification during nitrogen implantation of hard amorphous carbon films
     J. Appl. Phys. 83 (1998) 10, 5185-5194
    [Abstract]

  • N. Schwarzer, F. Richter
    A Simple Biaxial Bending Technique for Coated Materials - Theory and Application
     in: H. Oettel, S. Hogmark, J. v. Stebut (eds.), Mechanical Behaviour of PVD Coated Materials, Freiberg 1998, 91-100
    [Abstract]    [Abstract + Figures]

  • Th. Welzel, R. Pintaske, F. Richter
    A LIF and OES investigation on the role of metastable argon atoms on the excitation conditions in an Ar-N2 r.f. magnetron discharge
     in: D. Riley, C. M. O. Mahony, W. G. Graham (eds.), Europhysics Conference Abstracts 22H(1998) 346

  • J. K. Walters, M. Kühn, C. Spaeth, E. Dooryhee and R. J. Newport
    X-ray diffraction studies of the effects of N incorporation in amorphous CNx materials
     J. Appl. Phys. 83 (1998) 3529
    [Abstract]

  • C. Spaeth, F. Richter, S. Grigull, U. Kreissig
    Conversion algorithm for ERDA multielement spectra and its application to thin-film problems
    Nucl. Instrum. Meth. B 140 (1998) 243-250
    [Abstract]

  • M. Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, J. Hahn
    Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry
     Thin Solid Films 313-314 (1998) 692-696
    [Abstract]

  • U. Hoffmann, A. Weber, T. Löhken, C.-P. Klages, C. Spaeth, F. Richter
    Electron Field Emission of Amorphous Carbon Films
     Diam. Rel. Mater. 7 (1998) 682-686
    [Abstract]

  • A. Anders, M. Kühn
    Characterization of a low-energy constricted-plasma source
     Rev. Sci. Instrum. 69 (1998) 3, 1340-1343
    [Abstract]

  • F. Richter, R. Pintaske, J. Hahn, Th. Welzel
    Deposition of Cubic Boron Nitride: Process Diagnostics and Film Characterization
    in A. Kumar, Y.-W. Chang, R.W.J. Chia (eds.): Hard Coatings Based on Borides, Carbides and Nitrides: Synthesis, Characterization and Applications, The Minerals, Metals and Materials Society, Warrendale, PA, USA, 1998, 153-168
    [Abstract]

  • R. Pintaske, Th. Welzel, M. Schaller, N. Kahl, J. Hahn, F. Richter
    Spectroscopic Studies of a Magnetron Sputtering Discharge for Boron Nitride Deposition
    Europhys. Conf. Abstr. 20E (1996), Surf. Coat. Technol. 99 (1998) 3, 266-280
    [Abstract]
 

1997


  • H. Kupfer
    Plasmagestützte Verfahren für eine haftfeste Metallisierung von Gehäusekomponenten
    In: Poster und Proc. zum Statusseminar Oberflächen- und Schichttechnologien, Würzburg, 9.-11. Juli 1997
    VDI Technologiezentrum Physikalische Technologien Düsseldorf (Hrsg.), (i.A. und mit Unterstützung des BMBF)
    Bd. 2, S. 295

  • A.K. Jamting, J.M. Bell, M.V. Swain, N. Schwarzer
    Investigation of the Elastic Modulus of Thin Films using simple Biaxial Bending techniques
    Thin Solid Films 308 - 309 (1997) 304 - 309
    [Abstract]

  • T. Chudoba
    Registrierende Härtemessung, Ein neues Modell für die Bewertung von Ergebnissen
    Materialprüfung 39 (1997) 9, 357-361
    [Abstract]

  • U. Falke, A. Weber, M. Kühn, C. Spaeth, M. Hietschold
    EXELFS-Investigations of Carbon and Carbon Nitride Films
    European J. of Cell Biology 74 (1997) 45-51
    [Abstract]

  • J. Kourtev, R. Pascova, E. Weißmantel
    A modified method for arc deposition of Ti-N thin films
    Vacuum 48 (1997) 1, 7-12
    [Abstract]

  • K.C. Tang, A. Faulkner, N. Schwarzer, R.D. Arnell, F. Richter
    Comparison between an elastic-perfectly Plastic F.E.M. and a purely elastic analytical model for a spherical indenter on a layered substrate
    Thin Solid Films 300 (1997) 177-188
    [Abstract]

  • A. Weber, U. Hoffmann, T. Löhken, C.-P. Klages, M. Kühn C. Spaeth, F. Richter
    Carbon Based Field Emitters for Field Emission Displays
     SID Int. Symp., Boston, May 28-30, 1997, Digest of Technical Papers (1997) 591-594
    [Abstract]

  • S. Grigull, W. Jacob, D. Henke, A. Mücklich, C. Spaeth, L. Sümmchen
    On the presence of molecular nitrogen in nitrogen-implanted amorphous carbon
    Appl. Phys. Lett. 70 (1997) 1387-1389
    [Abstract]

    • J.K. Walters, M. Kühn, C. Spaeth, H. Fischer, F. Richter, R. J. Newport
    Neutron Diffraction Studies of Amorphous CNx Materials
    Phys. Rev. B 56 (1997) 14315
    [Abstract]

  • M. Kühn, C. Spaeth, R. Pintaske, S. Peter, F. Richter, A. Anders
    The Effect of Additional Ion/Plasma Assistance in CNx-Film Deposition Based on a Filtered Cathodic Arc
    Thin Solid Films 311 (1997) 151-156
    [Abstract]

  • M. Schubert, B. Rheinländer, E. Franke, H. Neumann, T.E. Tiwald, J.A. Woollam, J. Hahn, F. Richter
    Infrared Optical Properties of Mixed-phase Thin Films by Spectroscopic Ellipsometry using Boron Nitride as an Example
    Phys. Rev. B 56 (1997) 20, 13306-13313
    [Abstract]

  • E. Franke, M. Schubert, H. Neumann, T.E. Tiwald, D.W. Thompson, J.A. Woollam, J. Hahn, F. Richter
    Phase and Microstructure Investigations of Boron Nitride Thin Films by Spectroscopic Ellipsometry in the Visible and Infrared Spectral Range
    J. Appl. Phys. 82 (1997) 6, 2906-2911
    [Abstract]

  • M. Kühn, R. Pintaske, F. Richter
    Optical Emission Spectroscopy in Cathodic Arc Deposition
     IEEE Trans. Plasma Sci. 25 (1997) 694-699
    [Abstract]

  • C. Spaeth, M. Kühn, U. Kreissig, F. Richter
    Preparation of CNx - Films by Ion Beam Assisted Filtered Cathodic Arc Deposition
    Diam. Rel. Mater. 6 (1997) 626-630
    [Abstract]

  • M. Schubert, B. Rheinländer, E. Franke, H. Neumann, J. Hahn, M. Röder, F. Richter
    Anisotropy of Boron Nitride Thin Films Reflectivity Spectra by Generalized Ellipsometry
    Appl. Phys. Lett. 70 (1997) 14, 1819-1821
    [Abstract]

  • M. Friedrich, Th. Welzel, R. Rochotzki, H. Kupfer, D.R.T. Zahn
    Optical Properties of Nitrogen-Rich Carbon Films Deposited by dc Magnetron Sputtering
    Diam. Rel. Mater. 6 (1997) 33-40
    [Abstract]

  • E. Franke, H. Neumann, M. Schubert, T.E. Tiwald, J.A. Woollam, J. Hahn
    Infrared-Ellipsometry on Hexagonal and Cubic Boron Nitride Thin Films
    Appl. Phys. Lett. 70 (1997) 13, 1668-1670
    [Abstract]

  • M. Kühn, F. Richter
    Characteristics in Reactive Arc Evaporation
    Surf. Coat. Technol. 89(1997) 16-23
    [Abstract]

  • J. Hahn, F. Richter, R. Pintaske, M. Röder, E. Schneider, Th. Welzel
    Formation of c-BN thin films under reduced ion impact
     Surf. Coat. Technol. 92 (1997) 129-134
    [Abstract]

  • G. Krannich, F. Richter, J. Hahn, R. Pintaske, V.B. Filippov, Y. Paderno
    Formation of Cubic Boron Nitride Thin Films by Reactive Cathodic Arc Evaporation
    Diam. Rel. Mater. 6 (1997) 1005-1009
    [Abstract]

  • T. Werninghaus, J. Hahn, F. Richter, D.R.T. Zahn
    Raman Spectroscopy of Size Effects in Cubic Boron Nitride
    Appl. Phys. Lett. 70 (1997) 8, 958-960
    [Abstract]

  • R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. Richter
    Process Diagnostics during the Deposition of Cubic Boron Nitride
    Surf. Coat. Technol. 90 (1997) 3, 275-284
    [Abstract]

  • T. Werninghaus, M. Friedrich, J. Hahn, F. Richter, D.R.T. Zahn
    Raman Spectroscopy Investigations of Cubic Boron Nitride Single Crystals and Layers on Si(100)
    Diam. Rel. Mater. 6 (1997) 612-616
    [Abstract]

  • F. Richter, G. Krannich, J. Hahn, R. Pintaske, M. Friedrich, S. Schmidbauer, D.R.T. Zahn
    Utilization of the Cathodic Arc Evaporation for the Deposition of Boron Nitride Thin Films
    Surf. Coat. Technol. 90 (1997) 178-183
    [Abstract]

  • M. Röder, J. Hahn, U. Falke, S. Schulze, F. Richter, M. Hietschold
    Electron Microscopic Phase Analysis of BN Thin Films
    Mikrochimica Acta, 125 (1997) 283-286
    [Abstract]
 

1996


  • T. Chudoba
    Spitzenkorrektur bei Härteprüfkörpern, Möglichkeiten und Grenzen der Korrektur
     Materialprüfung 38 (1996) 9, 380-384
    [Abstract]

  • J. Kourtev, R. Pascova, E. Weißmantel
    Arc evaporated Ti-N films with reduced macroparticle contamination
    Thin Solid Films 287, 1-2 (1996) 202-207
    [Abstract]

  • R. Pintaske, M. Schaller, Th. Welzel, N. Kahl, J. Hahn, F. Richter
    Spectroscopic Studies of a Magnetron Sputtering Discharge
    Proc. of the 13th European Sectional Conference on Atomic and Molecular Processes in Ionized Gases (ESCAMPIG XIII), Proprad, Slovakia, Aug. 1996, Europhysics Conference Abstracts, col. 20E, 245

  • H. Kupfer, G. Hecht, P. Schlott
    Haftfestes Metallisieren von Polymeroberflächen durch ionengestütztes Plasmakonditionieren
     mo metalloberfläche 50 (1996) 2, 131-134
    [Abstract]

  • G. Hecht, H. Kupfer
    Ion assisted plasma etching of polymeric substrates and adhesion related surface modifications
     Proceedings auf dem 5th International Symposium on Trends and New Applications in Thin Films, Colmar, France, 1996, Herausgeber: Societe du Vide und Deutsche Vakuum Gesellschaft, S. 119- 121
    [Abstract]

  • M. Ellrodt, M. Kühn
    Investigation of the Cathode Spot Dynamics in a Vacuum Arc Coating Process
     Contrib. Plasma Phys. 36 (1996) 6, 687-696
    [Abstract]

  • S. Peter, St. Pfau, J. Radecker, F. Richter
    Ion Energy Distributions at the Cathode of d.c. and Pulsed d.c. H2-N2-Ar Glow Discharges
     in: P. Lukac, I. Kosinar, J.D. Skalny (eds.), Europhys. Abstracts Vol. 20E, Part A (Proc. ESCAMPIC 96, Poprad, Slovakia, August 27-30, 1996), pp.113

  • C. Spaeth, M. Kühn, F. Richter
    Herstellung von CNx-Schichten mittels ionenstrahlgestützter Vakuumbogenentladung
     Werkstoffwoche Stuttgart, 28.-31. 5. 1996, Tagungsband Vol. 5, ISBN 3-88355-233-X, DGM Informationsgesellschaft Verlag, Oberursel, 1996

  • O. Stenzel, J. Hahn, M. Röder, A. Ehrlich, S. Prause, F. Richter
    The Optical Constants of Cubic and Hexagonal Boron Nitride Thin Film and Their Relation to the Bulk Optical Constants
    phys. stat. sol. (a) 158 (1996) 1, 281-287
    [Abstract]

  • F. Richter
    Dünne Schichten aus superharten Materialien
     in: Werkstoffe für die Fertigungstechnik, A. de Paoli (Hrsg.), ISBN 3-88355-233-X, DGM Informationsgesellschaft Verlag, Oberursel, 1996, 31-38

  • M. Kühn, C. Spaeth, F. Richter
    Properties of CNx - Films Prepared by Ion Beam Assisted Filtered Cathodic Arc Deposition
    J.W. Patrick (ed.), Ext. Abstr. Book of the European Carbon Conf. '96, Newcastle upon Tyne, UK, July 7-12, 1996, Vol. II, pp. 413
    [Abstract]

  • M. Kühn, R. Pintaske, F. Richter
    Optical Emission Spectroscopy in Cathodic Arc Deposition
     Proc. XVIIth Int. Symp. on Discharges and Electrical Insulation in Vacuum,Berkeley, CA, July 21-26, 1996, Vol.II, 932-936
    [Abstract]

  • F. Richter
    Superharte dünne Schichten
    Phys. Blätter 52 (1996) 4, 355
    [Abstract]

  • S. Schmidbauer, H. Klose, A. Ehrlich, M. Friedrich, M. Röder, F. Richter
    Vacuum arc deposition of thin films from a LaB6 cathode
     Surf. Coat. Technol. 82 (1996) 247-253
    [Abstract]

  • T. Flügel, P. Schlott, H. Kupfer, F. Richter
    Herstellung dielektrischer Schichten mittels reaktiver Magnetronzerstäubung
     Kolloquium des Sonderforschungsbereiches 379 mit internationaler Beteiligung, Chemnitz, 4./5. 11. 1996, Tagungsband S. 79-82

  • J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn
    Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics
     Diam. Rel. Mater. 5 (1996) 1103-1112
    [Abstract]

  • A. P. Knights, A. S. Saleh, P. C. Rice-Evans, S. Bull, F. Elstner, F. Richter, H . Kupfer
    Investigations of magnetron-sputtered titanium nitride films using positron annihilation spectroscopy
     J. Phys.: Condens. Matter 8 (1996) 2479-2468
    [Abstract]
 

1995


  • H. Kupfer
    Haftfeste Metallisierungen auf Polymergehäsen mit physikalischen Abscheideverfahren
     Proceedings des Workshops Systemtechnologien für Mikro- und Millimeterwellenschaltungen,
    Herausgeber VDI/VDE-Technologiezentrum GmbH, (6 S., 11 Abb. 3 Tab.)

  • H. Kupfer, K. Rusnak, Th. Welzel, G. Hecht
    Reactive Magnetron Sputtering of CNx Films with rf Substrate Bias Voltage
     gemeinsamer Proceedingsband der International Conference on Advanced Materials and Technologies, 13.-16. Juni 1995, Plzen und des 17th Symposium on Plasma Physics and Technology, 13.-16. Juni 1995, Prague

  • S. Peter, F. Richter
    In situ Characterization of Plasma MOCVD of Ti-C-N Films
     in: J.V. Heberlein, D. W. Ernie, J. T. Roberts (eds.), Proc. of the 12th Int. Symp. on Plasma Chemnistry (ISPC-12), August, 1995, Minneapolis, MN, 2137-2142

  • R. Pintaske, J. Hahn, N. Kahl, M. Schaller, F. Richter
    Process Diagnostics during the Deposition of Cubic Boron Nitride
    in: J.V. Heberlein, D. W. Ernie, J. T. Roberts (eds.), Proc. of the 12th Int. Symp. on Plasma Chemistry (ISPC-12), August 1995, Minneapolis, MN, USA, 2119-2124

  • F. Richter, F. Elstner, H. Kupfer, M. Kühn
    Reactive Layer Deposition using Magnetron Sputtering and Arc Evaporation
     Plenarvortrag auf dem 10th International Colloquium on Plasma Processes, Antibes, France, June 11-14, 1995,
    veröffentlicht in LE VIDE, Suppl. 275, Jan./Feb./M¨rz 1995, 209-217
    [Abstract]

  • N. Schwarzer, M. Whittling, M. Swain, F. Richter
    The analytical solution of the contact problem of spherical indenters on layered materials: application for the investigation of TiN films on silicon
    Thin Solid Films 270 (1995) 371-375
    [Abstract]

  • N. Schwarzer, H. Djabella, F. Richter, R. D. Arnell
    Comparison between analytical and FEM calculations for the contact problem of spherical indenters on layered materials
    Thin Solid Films 270 (1995) 279-282
    [Abstract]

  • A. Ehrlich, M. Kühn, F. Richter, W. Hoyer
    Complex Characterization of Vacuum Arc Deposited Thin Films
     Surf. Coat. Technol. 76-77 (1995) 280-286
    [Abstract]

  • M. Friedrich, J. Hahn, S. Laufer, F. Richter, H.-J. Hinneberg,D.R.T. Zahn
    The Formation of Cubic Boron Nitride and Silicon Carbide Layers on Silicon
     in K.V. Ravi and J.P. Dismukes (eds.): Diamond Materials IV
    (Electrochemical Society Proceedings Volume 95-4), The Electrochemical Society, Pennington, NJ, 1995, 394-402
    [Abstract]

  • F. Richter
    Cubic boron nitride and carbon nitride films: Recent developments
     in K.V. Ravi and J.P. Dismukes (eds.): Diamond Materials IV
    (Electrochemical Society Proceedings Volume 95-4), The Electrochemical Society, Pennington, NJ, 1995, 347-358
    [Abstract]

  • F. Elstner, H. Kupfer, F. Richter
    Activation Energy of Point Defect Diffusion in Low-Temperature Deposited TiN
     physica status solidi (a) 147 (1995) 2, 373-377
    [Abstract]

  • H. Kupfer, F. Richter, S. Friedrich, H.-J. Spies
    Deposition and Properties of TiN/C Multilayers for Corrosion Protection of Steel
     Surf. Coat. Technol. 74-75 (1995) 333-338
    [Abstract]

  • N. Schwarzer, F. Richter
    Adhesion and Elastic Contact Stresses of Coating/Substrate Systems under Normal and Tangential Load
     Surf. and Coat. Technol. 74-75 (1995) 97-103
    [Abstract]
 

1994


  • H. Kupfer, G. Hecht
    Vakuumphysikalische Metallisierung von Plastwerkstoffen: Schichthaftung und funktionelle Eigenschaften
     Proceedings des 1. Öffentlichen Statusseminars Systemtechnologien für Mikro- und Millimeterwellenschaltungen, Juni 1994, Berlin
    VDI/VDE-Technologiezentrum Informationstechnik GmbH

  • H. Kupfer, G. Hecht
    The PVD-Metallization of Plastic Materials: Influence of the Interface structure on the Thin Fils properties
    in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel 1994, 97 - 101

  • N. Schwarzer, J. Schimmel, F. Richter
    The Elastic Indentation of Coating-Substrate Systems with Large Difference in the Young Moduli
     physica status solidi (a) 145 (1994) 379-383
    [Abstract]

  • N. Schwarzer, J. Schimmel, F. Richter
    Adhesion and Elastic Indentation of Coating/Substrate Systems
     LE VIDE, les Couches Minces 272, Aug./Sept./Oct. 1994, 246-251
    [Abstract]

  • S. Peter, F. Richter
    The Ion Component in a Plasma CVD Process
     in: M.C.M. van de Sanden (ed.) Proc. of the 12th European Sectional Conf. on the Atomic and Molecular Physics of Ionized Gases
    Noordwijkerhout, The Netherlands, August 23-26, 1994 (Europhysics Conference Abstracts, Vol. 18E), 382

  • F. Richter, S. Peter, R. Pintaske, G. Hecht
    In situ Characterization of a Plasma MOCVD Process
     Surf. Coat. Technol. 68-69 (1994) 719-723
    [Abstract]

  • S. Peter, R. Pintaske, F. Richter, G. Hecht
    Deposition of Si-C-N Films by Metalorganic Plasma CVD
    in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel, 1994, 191-194

  • S. Peter, R. Pintaske, B. Reinhold, F. Richter, G. Hecht
    Determination of Ion Energy Distribution in Glow Discharges
    in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel, 1994, 187-190

  • N. Schwarzer, J. Schimmel, S. Schmidbauer, J. Hahn
    The Peeling Test with Initialized Crack Formation
    in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel, 1994, 486-489

  • N. Schwarzer, J. Schimmel, F. Richter
    The Contact Problem of Elastic Indentation of Coating/Substrate Systems
     in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel, 1994, 391 - 394
    [Abstract]

  • R. Pintaske, S. Peter, J. Lang, G. Hecht, F. Richter
    Characterization of the Plasma Enhanced CVD Process using optical Emission Spectroscopy
    in: G. Hecht, F. Richter, J. Hahn (eds.): Thin Films
    DGM Informationsgesellschaft Verlag, Oberursel, 1994, 183-186

  • F. Elstner, A. Ehrlich, H. Giegengack, H. Kupfer, F. Richter
    Structure and properties of titanium nitride thin films deposited at low temperatures using d.c. magnetron sputtering
    J. Vac. Sci. Technol. 12A (1994) 2, 476-483
    [Abtstract]

  • G. Jungnickel, M. Kühn, S. Deutschmann, F. Richter, U. Stephan, P. Blaudeck, Th. Frauenheim
    Structure and Chemical Bonding in High Density Amorphous Carbon
    Diam. Rel. Mater. 3 (1994) 1056-1065
    [Abstract]