- Author(s):
- S. Rudra, T. Wächtler, M. Friedrich, S.J. Louis, C. Himcinschi, S. Zimmermann, S.E. Schulz, S. Silaghi, C. Cobet, N. Esser, T. Geßner, D.R.T. Zahn
Source:- Phys. stat. sol. (a), 205 (4) (2008) 922
Title:- Spectroscopic Ellipsometry Study of Thin Diffusion Barriers of TaN and Ta for Cu Interconnects in Integrated Circuits
Abstract:- ---
Type of Publication:- Refereed Journal
Year:- 2008
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