- Author(s):
- C. Himcinschi, A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T. Geßner, S. Schulze, D.R.T. Zahn
Source:- Appl. Surf. Sci. 175-176 (2001) 715:
Title:- Silicon Oxide in Si-Si Bonded Wafers
Abstract: (visitor access)- /physik/HLPH/publications/p_src/318a.pdf
Type of Publication:- Refereed Journal
Year:- 2001
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