- Author(s):
- C. Himcinschi, A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T. Geßner, S. Schulze, D.R.T. Zahn
Source:- J. Appl. Phys., 89 (3) (2001) 1992:
Title:- Growth of Buried and Surface Silicon Oxides in Si-Si Wafer Bonds upon Annealing
Abstract: (visitor access)- /physik/HLPH/publications/p_src/308a.pdf
Type of Publication:- Refereed Journal
Year:- 2001
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