- Author(s):
- A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T Geßner, D.R.T. Zahn
Source:- Kolloquium des SFB 379, Mikromechanik Sensor- und Aktorarrays (12. Oktober 1999) Chemnitz, (2000) 35
Title:- IR Spectroscopical Characterisation of Low Temperature Wafer Bonding Mechanisms
Abstract:- ---
Type of Publication:- Refereed Journal
Year:- 2000
|
|