HLPH - Publication: ID[278] [ print ]  -  [ close ]
Author(s):
A. Milekhin, M. Friedrich, K. Hiller, M. Wiemer, T. Geßner, D.R.T. Zahn

Source:
J. Vac. Sci. Technol. B, 18 (2000) 1392

Title:
Characterisation of Low Temperature Wafer Bonding by Infrared Spectroscopy

Abstract:
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Type of Publication:
Refereed Journal

Year:
2000