HLPH - Publication: ID[173] [ print ]  -  [ close ]
Author(s):
F. Richter, G. Krannich, J. Hahn, P. Pintaske, M. Friedrich, S. Schmidbauer, D. R. T. Zahn

Source:
Surf. Coat. Technol. 90 (1997) 178

Title:
Utilization of Cathodic Arc Evaporation for the Deposition of Boron Nitride Thin Films

Abstract:
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Type of Publication:
Refereed Journal

Year:
1997