- Author(s):
- J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter
Source:- Diamond Relat. Mat. 5 (1996) 1103
Title:- Cubic Boron Nitride Films by d.c. and r.f. Magnetron Sputtering: Layer Characterization and Process Diagnostics
Abstract:- ---
Type of Publication:- Refereed Journal
Year:- 1996
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