Professorship for Materials and Reliability of Microsystems






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Lecture Reliability of micro and nano systems

Lecturer: Prof. Bernhard Wunderle

General information

  • Study groups:
    • mandatory: M_MN__1 (module 1.6)
    • optional required: M_MP__1, M_MP__3
  • Intensity: 3 contact hours (winter semester)
  • Examination: Written Exam (90 min)
  • Course-related: Tutorial / Problem class, 1 conact hour (winter semester)

Contents

  • Fundamentals of reliability evaluation
  • Reliability of micro and nano systems
  • Fracture mechanics and crack groth concepts
  • Calculation methods and reliability evaluation of MEMS
  • Experimental reliability evaluation
  • Applications

Teaching material

All documents are provided for teaching purposes and are intended for internal use only. It is not allowed to make them accessible to individuals outside the Chemnitz University!

Slides
Lecture slides...   Last Upadate 2013-03-05

Exersices and Revision
Exercises...   Last Update 2013-02-01