Welcome to the Department of Material Systems for Nanoelectronics
Since June 2009 the Professorship of Material Systems for Nanoelectronics is engaged in research and teaching on materials and their applications in nanoelectronics. The recently established laboratories on the Smart Systems Campus enable our students to experience hands-on work with modern tools like lithography, sputtering systems and atomic layer deposition machines.
Chair
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Secretary
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Carmen Dallüge
 Office: Reichenhainer Str. 31-33, room 113
 Tel.: +49 (0)371 531 33432
 Fax: +49 (0)371 531-833432
 Email: carmen.dalluege...
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Office: Start-up, room 106
Lab: Start-up B101-B105
Tel. Dresden: +49 (0)351 4659 314
Tel. Chemnitz: +49 (0)371 5347 872
Fax: +49 (0)371 5347 871
Email: d.grimm...
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Heisenberg-Fellow
Office: Reichenhainer Str. 39, rooms 003-004
Lab: Reichenhainer Str. 39, rooms K03-04
Tel.: +49 (0)371 531 32481
Fax: +49 (0)371 531-832481
Email: Heidemarie.Schmidt...
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