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  • Anmelden

Advanced Integrated Circuit Technologies

Forms of teaching and examination | Objectives and contents

Forms of teaching and examination

The module is devided into lectures and tutorials (§ 4):

  • L: Advanced Integrated Circuit Technologies (3 LVS)
  • T: Advanced Integrated Circuit Technologies (1 LVS)

Classes are taught in English.

The module ends with a final written exam (120 minutes).

If you successfully passed the exam, you can award 5 credit points. The evaluation of the exam follows the examination regulations (§10).

This module is offered once a year and has a duration of one semester.

Objectives and contents

Objectives are: understanding of basics and trends in modern integrated circuit technology, knowledge of process steps and modules; Knowledge of physical models for semiconductor processes, methodology and tools for process and equipment simulation, programming practice.

Contents:

  • Semiconductor Technology Roadmap Requirements and Trends
  • Processes for Micro- and Nanoelectronics (Thin Film Deposition, Ion Implantation, Advanced Lithography, Etching/Patterning, Chemical Mechanical Polishing, Advanced Cleaning) incl. emerging processes
  • CMOS / Bipolar / BiCMOS Technology
  • CMOS Process Modules for modern IC technologies (STI, Gate, Source/Drain, Interconnect Modules, Packaging etc. )
  • Specific aspects of sub 100 nm CMOS
  • New transistor and memory concepts; beyond CMOS approaches
  • 3D technology for increased integration density
  • Numerical methods for semiconductor process and equipment simulation
  • Models and programming for advanced deposition techniques (Monte Carlo and Molecular dynamics calculations)
  • Parameter optimization methods / Applied programming in Java