Professur für Mikrosystem- und Gerätetechnik






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Publikationen

Jahr 2006

Berdinsky, A.S.; Shaporin, A.V.; Yoo, J.-B.; Park, J.-H.; Alegaonkar, P.S.; Han, J.-H.; Son, G.-H.: Field Enhancement Factor for an Array of MWNTs in CNT Paste. Applied Physics A: Materials Science & Processing, Vol. 83 no. 3, (2006), pp. 377-383 (ISSN 1432-0630 (Print) ISSN 0947-8396 (Online))
Dötzel, W.: Mikrosystemtechnik - Wachstum ins Kleine. Sitzungsberichte der Sächsischen Akademie der Wissenschaften zu Leipzig, Technikwissenschaftliche Klasse Band 2, Heft 1, (2006) (ISBN 3-7776-1443-4)
Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.: Electrostatic Force Coupling of MEMS Oscillators for Spectral Vibration Measurements. Eurosensors XX, Göteborg (Sweden), 2006 Sep 17-20, Proceedings, M2B-O2 (ISBN 91-631-9281-0)
Best Oral Presentation Award
Forke, R.; Scheibner, D.; Mehner, J.; Gessner, T.; Dötzel, W.: Micromachined Force Coupled Sensor-Actuator System for Frequency Selective Vibration Monitoring. Actuator, Bremen (Germany), 2006 Jun 14-16, Proceedings, pp. 928-931 (ISBN 3-933339-08-1)
Gessner, T.; Bonitz, J.; Kaufmann, C.; Kurth, S.; Specht H.: MEMS Based Micro Scanners: Components, Technologies and Applications. Actuator, Bremen (Germany), 2006 Jun 14-16, Proceedings (ISBN-3-933339-09-X)
Hanf, M.; Shaporin, A.V.; Hahn, R.; Dötzel, W.; Gessner, T.: Micro Mirror Array as Novel Encoding Mask in a Hadamard Transform Spectrometer. Actuator, Bremen (Germany), 2006 Jun 14-16, Proceedings, pp. 732-735 (ISBN-3-933339-08-1)
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Dötzel, W.: Parametric Finite Element Analysis for Reduced Order Modeling of MEMS. EuroSimE 2006 - 7th International conference on thermal, mechanical and multi-physics simulation and, Como (Italy), 2006 Apr. 23-2, Proceedings, pp. 507-510 (ISBN 1-4244-0275-1)
Kolchuzhin, V.; Mehner, J.; Gessner, T.; Dötzel, W.: Parametric Simulation of MEMS Based on Automatic Differentiation of Finite Element Codes. NSTI Nanotechnology Conference and Trade Show "Nanotech 2006", Boston (USA), 2006 May 7-11, Proceedings, Vol. 3, pp. 507-510 (ISBN 0-9767985-8-1)
Leidich, S.; Voigt, S.; Kurth, S.; Gessner, T.: Microwave Phase Shifter with Electromagnetic Signal Coupling in Silicon Bulk Technology. Int. J. Microwave and Optical Techn., Vol. 1, (2006), pp. 1-9 (ISSN 1553-0396)
Markert, E.; Dienel, M.; Herrmann, G.; Müller, D.; Heinkel, U.: Modeling of a new 2D Acceleration Sensor Array using SystemC-AMS. Journal of Physics: Conference Series, Vol. 34, (2006), pp. 228-234 (ISSN 1742-6588)
Mehner, J.; Forke, R.; Scheibner, D.; Dötzel, W.; Gessner, T.: A Tunable Resonant Vibration Measurement Unit Based on a Micromachined Force Coupled Sensor-Actuator System. IEEE Sensors, Daegu (Korea), 2006 Oct 22-25, Proceedings, pp. 803-806 (ISSN 1930-0395)
DOI: 10.1109/ICSENS.2007.355589
Reuter, D.; Bertz, A.; Billep, D.; Scheibner, D.; Dötzel, W.; Gessner, T.: In-process Gap Reduction of Capacitive Transducers. Sensors and Actuators A: Physical, Volume 126, (2006), pp. 211-217 (ISSN 0924-4247)
Seifert, M.; Hiller, K.; Frühauf, S.; Hanf, M.; Pohl, R.; Shaporin, A.V.: Arrays of Sensors with Variable Stiffness. The VI scientific conference "Solid state chemistry and modern micro and nano technologies", Kislovodsk (Russia), 2006 Sep 18-23, Proceedings, pp. 319-321 (ISBN 5-9296-0157-7)
Voigt, S.; Leidich, S.; Kurth, S.; Gessner, T.; Dötzel, W.: 24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk Technology. Journal of Physics: Conference Series, Vol. 34, (2006), pp. 228-234 (ISSN 1742-6588)