Professur für Mikrosystem- und Gerätetechnik






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Publikationen

Jahr 2003

Bennini, F.; Mehner, J.; Dötzel, W.: System Level Simulations of MEMS Based on Reduced Order Finite Element Models. International Journal of Computational Engineering Science, Vol. 2, Nr. 2, 2003 Jun, pp. 385-388 (ISSN 1465-8763)
Geiger, W.; Breng, U.; Leinfelder, P.; Gutmann, W.; Ohmberger, R.; Kunz, J.; Ruf, M.; Huber, M.; Ryrko, B.; Hafen, M.; Spahlinger, G.; Schröder, W.; Handrich E. (LITEF GmbH Freibu; Hiller, K.; Billep D. (Chemnitz University of Technology): The micromechanical Coriolis Rate Sensor µCORS II. Symposium Gyro Technology, Stuttgart (Germany), (2003)
Hanf, M.; Dötzel, W.: Micromechanical electrostatic field sensor for the detection of surface charges. Eurosensors XVII, Guimaraes (Portugal), Proceedings, (2003), pp. 374-375
Hanf, M.; Kurth, S.; Billep, D.; Hahn, R.; Faust, W.; Heinz, S.; Dötzel, W.; Gessner, T.: Application of micro mirror arrays for Hadamard transform optics. 9th International Symposium on Microwave and Optical Technology (ISMOT2003), Ostrava (Czech Republic), (2003)
Mehner, J.; Dötzel, W.; Schauwecker, B.; Ostergard, D.: Reduced Order of Fluid Structural Interactions in MEMS Based on Modal Projection Techniques. 12. International Conference on Solid State Sensors, Actuators and Microsystems, Boston (USA), Proceedings, (2003), pp. 1840-1843
Mehner, J.; Shaporin, A.V.; Dötzel, W.: Simulation for MEMS - Packaging. Mems Packaging Workshop 2003, Chemnitz (Germany), (2003)
Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: Wide Range Tunable Resonators for Vibration Measurements. Microelectronic Engineering, Vol. 67-68, (2003), pp. 542-549 (ISSN 0925-1030)
DOI: 10.1109/MEMSYS.2003.1189802
Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.: Tunable Resonators with Electrostatic Self Test Functionality for Frequency Selective Vibration Measurements. MEMS 2003, Kyoto (Japan), 2003 Jan 20-23, Proceedings, pp. 526-529 (ISBN 0-7803-7744-3)
Scheibner, D.; Wibbeler, J.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation. Analog Integrated Circuits and Signal Processing, (2003), pp. 35-43